公开(公告)号：DE60225216D1

公开(公告)日：2008-04-10

申请号：DE60225216

申请日：2002-09-06

Applicant: ASML NETHERLANDS BV

Inventor： LEENDERS MARTINUS HENDRIKUS AN ,  MOORS JOHANNES HUBERTUS JOSEPH ,  LOOPSTRA ERIK ROELOF ,  GILISSEN NOUD JAN ,  EURLINGS MARKUS F A

IPC: G03F7/20 ,  G21K1/04 ,  G21K5/02 ,  H01L21/027

Abstract: An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity.

公开(公告)号：DE60225216T2

公开(公告)日：2009-03-05

申请号：DE60225216

申请日：2002-09-06

Applicant: ASML NETHERLANDS BV

Inventor： LEENDERS MARTINUS HENDRIKUS ANTONIUS ,  MOORS JOHANNES HUBERTUS JOSEPHINA ,  LOOPSTRA ERIK ROELOF ,  GILISSEN NOUD JAN ,  EURLINGS MARKUS F A

IPC: G03F7/20 ,  G21K1/04 ,  G21K5/02 ,  H01L21/027

Abstract: An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity.