公开(公告)号：NL2024779A

公开(公告)日：2020-04-23

申请号：NL2024779

申请日：2020-01-28

Applicant: ASML NETHERLANDS BV

Inventor： TIJMEN PIETER COLLIGNON ,  GEORGIOS TSIROGIANNIS

IPC: G03F7/20

Abstract: Disclosed is a method of determining a freeform shape impact parameter which describes the impact of a freeform shape of a substrate on a clamped substrate coordinate grid corresponding to said substrate subsequent to clamping onto a substrate support. The method comprises obtaining first measurement 5 data relating to the substrate when in a first clamped state on said substrate support and second measurement data relating to the substrate when in a second clamped state on said substrate support. The freeform shape impact parameter is determined from the first measurement data and the second measurement data.

公开(公告)号：NL2024627A

公开(公告)日：2020-01-31

申请号：NL2024627

申请日：2020-01-09

Applicant: ASML NETHERLANDS BV

Inventor： ARNAUD HUBAUX ,  JOHAN FRANCISCUS MARIA BECKERS ,  JOHAN GERTRUDIS CORNELIS KUNNEN ,  WILLEM RICHARD PONGERS ,  DYLAN JOHN DAVID DAVIES ,  AJINKYA RAVINDRA DAWARE ,  MAXIM PISARENCO ,  NICK KANT ,  FREDERIK EDUARD DE JONG ,  HENDRIK CORNELIS ANTON BORGER ,  CHUNG-HSUN LI ,  GEORGIOS TSIROGIANNIS ,  JUAN MANUEL GONZALEZ HUESCA ,  ANDRIY VASYLIOVICH HLOD

IPC: G03F7/20

Abstract: Described is a method and associated computer program and apparatuses for method for making a decision Within a manufacturing process. The method comprises obtaining scanner data relating to one or more parameters of a lithographic exposure step of the manufacturing process and applying a decision 5 model. The decision model outputs a value for each of one or more categorical indicators based on the scanner data, each categorical indicator being indicative of a quality of the manufacturing process. An action is decided upon (e. g., to inspect a substrate as a candidate for rework) based on a value of the categorical indicator. 10 Figure 4.