公开(公告)号：NL2003693A

公开(公告)日：2010-05-20

申请号：NL2003693

申请日：2009-10-22

Applicant: ASML NETHERLANDS BV

Inventor： LEEWIS CHRISTIAN ,  KERKHOF MARCUS ,  MAST KAREL ,  VANOPPEN PETER ,  SANCHEZ RUBEN ALVAREZ

IPC: G01N21/47 ,  G03F7/20

公开(公告)号：NL2004542A

公开(公告)日：2010-11-15

申请号：NL2004542

申请日：2010-04-13

Applicant: ASML NETHERLANDS BV

Inventor： COENE WILLEM ,  MAST KAREL ,  SCHAAR MAURITS

IPC: G03F7/20 ,  G01N21/47

Abstract: A method of determining an overlay error in which asymmetry of a first order of a diffraction pattern is modeled as being a weighted sum of harmonics. Both the first order harmonic and higher order harmonics are non-negligible and weights for both are calculated. The weights are calculated using three or more of sets of superimposed patterns using a least mean square method.