Patent search ap:("ASML NETHERLANDS BV") AND inv:"NAAIJKENS GEERT-JAN" Page 1

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发明专利
A POSITIONING SYSTEM AND A METHOD FOR POSITIONING A SUBSTAGE WITH RESPECT TO A FRAME. 未知

公开(公告)号：NL2005062A

公开(公告)日：2011-02-15

申请号：NL2005062

申请日：2010-07-09

Applicant: ASML NETHERLANDS BV

Inventor： HOL SVEN , EIJK JAN , GROOT ANTONIUS , VERMEULEN JOHANNES , NAAIJKENS GEERT-JAN , KESSELS MARIJN , HOBBELEN DANIEL GODFRIED EMMA

IPC: G03F7/20 , G03F9/00

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