公开(公告)号：CA3148137A1

公开(公告)日：2021-02-04

申请号：CA3148137

申请日：2020-07-24

Applicant: ASML NETHERLANDS BV

Inventor： JANSSEN PAUL ,  BIRON MAXIME ,  DONMEZ NOYAN INCI ,  FERRE LLIN LOURDES ,  GIESBERS ADRIANUS JOHANNES MARIA ,  KLOOTWIJK JOHAN HENDRIK ,  KUNTZEL JAN HENDRIK WILLEM ,  NOTENBOOM ARNOUD WILLEM ,  ROLLIER ANNE-SOPHIE ,  VAN DER WOORD TIES WOUTER ,  VAN ZWOL PIETER-JAN

IPC: G03F1/62

Abstract: A method of manufacturing a pellicle membrane, the method comprising: providing a first sacrificial layer on a planar substrate to form a stack; and providing, to at least a portion of the stack, at least one metal silicide or doped metal silicide pellicle core layer which forms at least part of the pellicle membrane is described. Also described is a pellicle membrane assembly comprising a substrate, a first sacrificial layer, and at least one metal silicide or doped metal silicide pellicle layer which forms at least part of a pellicle core, as well as a lithography apparatus comprising such pellicles.