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    Lithographic equipment and method of manufacturing device
    1.
    发明专利
    Lithographic equipment and method of manufacturing device 有权
    LITHOGRAPHIC设备及其制造方法

    公开(公告)号：JP2007318107A

    公开(公告)日：2007-12-06

    申请号：JP2007115026

    申请日：2007-04-25

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： KAMIDI RAMIDIN I ,  TSO YIN TIM ,  TOUSAIN ROB

    IPC: H01L21/027 ,  G03F7/20 ,  G05B11/32 ,  G05D3/12

    CPC classification number: G03F7/70725

    Abstract: PROBLEM TO BE SOLVED: To provide lithographic equipment capable of improving the throughput without sacrificing the overlay performance. SOLUTION: Lithography equipment has a movable object and a control system for controlling the position of the movable object. The control system comprises a position measuring system for measuring the position of the movable object, a comparing unit for generating a servo error signal by subtracting a position signal which shows the actual position of the movable object from a reference signal, a control unit for generating a first control signal based on the servo error signal, a feedforward unit for generating a feedforward signal based on the reference signal, an adding unit for generating a second control signal by adding the first control signal and the feedforward signal, and an actuator for making the movable object operate. The gain of the feedforward unit depends on the position of the movable object. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够在不牺牲覆盖性能的情况下提高吞吐量的光刻设备。 解决方案：平版印刷设备具有可移动物体和用于控制可移动物体的位置的控制系统。 控制系统包括用于测量可移动物体的位置的位置测量系统，用于通过从参考信号中减去表示可移动物体的实际位置的位置信号来产生伺服误差信号的比较单元，用于产生可移动物体的控制单元 基于所述伺服误差信号的第一控制信号，用于基于所述参考信号产生前馈信号的前馈单元，用于通过将所述第一控制信号和所述前馈信号相加来产生第二控制信号的加法单元，以及用于使 可移动物体运行。 前馈单元的增益取决于可移动物体的位置。 版权所有（C）2008，JPO＆INPIT

    Self-adaptation feed-forward control adjustment for motion system, and lithography equipment having such motion system
    2.
    发明专利
    Self-adaptation feed-forward control adjustment for motion system, and lithography equipment having such motion system 有权
    用于运动系统的自适应进给前向控制调整，以及具有这种运动系统的平移设备

    公开(公告)号：JP2006128685A

    公开(公告)日：2006-05-18

    申请号：JP2005311385

    申请日：2005-10-26

    Applicant: Asml Netherlands Bv ,  エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ

    Inventor： TOUSAIN ROB

    IPC: H01L21/027 ,  G03F7/207

    CPC classification number: G03B27/42 ,  G03F7/70725

    Abstract: PROBLEM TO BE SOLVED: To provide a system that controls a high-precision motion such as a stepping and scanning operation of a lithography projection apparatus, i.e., a flexible control system that combines lower feed-forward control and iterative learning control with no need of manual adjustment while being simple, plus being adaptive to a slow change of a motion system.
    SOLUTION: This motion control system takes into consideration a snap s, a jerk j, an accelerated velocity a, and a velocity v that are all the targets of control, begins respective feed-forward coefficients kfs, kfj, kfa, and kfv with initial settings, and learns until there will be no difference between a desired motion and a real motion, repeating updates. This will enable feed-forward adjustment to be automated, and to be easily executed by being combined with existing motion control software, and will eliminate manual adjustment steps, and adapt the system to a slow change since it is continuously updated.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题：提供一种控制光刻投影装置的步进和扫描操作的高精度运动的系统，即，将较低的前馈控制和迭代学习控制与 在简单的情况下不需要手动调整，同时适应于运动系统的缓慢变化。 解决方案：该运动控制系统考虑到所有控制目标的卡扣，加速度j，加速速度a和速度v，开始各自的前馈系数kfs，kfj，kfa和 kfv具有初始设置，并学习直到所需运动与实际运动之间没有差异，重复更新。 这将使前馈调整能够自动化，并且可以通过与现有的运动控制软件相结合来轻松执行，并且将消除手动调整步骤，并且随着系统的不断更新而使系统变化缓慢。 版权所有（C）2006，JPO＆NCIPI

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