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    Lithographic apparatus and method for compensating for effect of disturbance on projection system of lithographic apparatus
    1.
    发明专利
    Lithographic apparatus and method for compensating for effect of disturbance on projection system of lithographic apparatus 有权
    用于补偿影像设备投影系统影响的平面设备和方法

    公开(公告)号：JP2010141321A

    公开(公告)日：2010-06-24

    申请号：JP2009276028

    申请日：2009-12-04

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： LOOPSTRA ERIK ROELOF ,  WIJCKMANS MAURICE WILLEM JOZEF ETIENNE ,  TOUSAIN ROBERTUS LEONARDUS ,  KOEVOETS ADRIANUS HENDRIK

    IPC: H01L21/027

    CPC classification number: G03F7/709 ,  G03F7/70525 ,  G03F7/70758 ,  G03F7/70766

    Abstract: PROBLEM TO BE SOLVED: To provide a lithographic apparatus which decreases disturbance of a projection system due to the scanning power of a movable object.
    SOLUTION: The lithographic apparatus includes: an illumination system configured to condition a radiation beam; a patterning device support constructed to support a patterning device capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table WT constructed to hold a substrate; a projection system PS configured to project the patterned radiation beam onto a target portion of the substrate; an active air mount AM supporting the projection system PS and including at least one actuator; and a feed-forward device FD configured to provide a feed-forward signal to the at least one actuator on the basis of a set-point signal of a movable object, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system PS due to movement of the movable object.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种降低由于可移动物体的扫描力引起的投影系统干扰的光刻设备。 解决方案：光刻设备包括：被配置为调节辐射束的照明系统; 图案形成装置支撑件，其被构造成支撑能够在其横截面中赋予辐射束图案以形成图案化辐射束的图案形成装置; 构造成保持衬底的衬底台WT; 投影系统PS被配置为将图案化的辐射束投影到基板的目标部分上; 支撑投影系统PS并且包括至少一个致动器的主动气垫AM; 以及前馈装置FD，其被配置为基于可移动对象的设定点信号向所述至少一个致动器提供前馈信号，其中所述前馈信号被设计为减小对所述可移动物体的干扰效应 投影系统PS由于可移动物体的移动。 版权所有（C）2010，JPO＆INPIT

    Positioning system and method, and lithographic equipment
    3.
    发明专利
    Positioning system and method, and lithographic equipment 有权
    定位系统和方法，以及平面设备

    公开(公告)号：JP2010093256A

    公开(公告)日：2010-04-22

    申请号：JP2009231092

    申请日：2009-10-05

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： TOUSAIN ROBERTUS LEONARDUS ,  HAMELS MARTIJN ROBERT ,  RAAYMAKERS JEROEN ARNOLDUS LEONARDUS JOHANNES

    IPC: H01L21/027 ,  G03F7/20

    CPC classification number: G03B27/58 ,  G03F7/70725

    Abstract: PROBLEM TO BE SOLVED: To provide a positioning system improved in position accuracy, and also to provide lithographic equipment reduced in overlay error and/or problem with image formation. SOLUTION: The lithographic equipment includes a positioner which positions the first section of the equipment relative to the second position of the equipment, the positioner includes a motor having a motor constant which depends on a motor position which defines the relationship between a motor input and a motor output, and a control system which drives the motor, the control system includes a set point generator which provides a reference signal based on a desired position of the first section relative to the second position, and a controller which provides a drive signal to the motor based on the reference signal, and the controller includes a compensator which at least partially compensates the drive signal for the motor constant depending on a motor position. The present invention relates to a positioner, a method for optimizing the positioning system, and a method for deriving a motor constant depending on a motor position. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种提高位置精度的定位系统，并且还提供降低叠加误差和/或图像形成问题的平版印刷设备。 解决方案：平版印刷设备包括定位器，其将设备的第一部分相对于设备的第二位置定位，定位器包括具有电动机常数的电动机，该电动机常数取决于电动机位置，其定义电动机 输入和马达输出以及驱动马达的控制系统，所述控制系统包括设定点发生器，所述设定点发生器基于所述第一部分相对于所述第二位置的期望位置提供参考信号;以及控制器，其提供驱动器 基于参考信号向电动机发信号，并且控制器包括补偿器，该补偿器根据电动机位置至少部分地补偿用于电动机恒定的驱动信号。 定位器技术领域本发明涉及定位器，优化定位系统的方法以及根据电动机位置导出电动机常数的方法。 版权所有（C）2010，JPO＆INPIT

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