公开(公告)号：JP2012227528A

公开(公告)日：2012-11-15

申请号：JP2012092233

申请日：2012-04-13

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： LAMBERTUS DONDERS SJOERD NICOLAAS ,  BANINE VADIM YEVGENYEVICH ,  MOORS JOHANNES HUBERTUS JOSEPHINA ,  VERHAGEN MARTINUS CORNELIS MARIA ,  OLAV WALDEMAR VLADIMIR FRIJNS ,  VAN DONK GERRIT ,  HENK JAN VAN GERNER

IPC: H01L21/027

CPC classification number: G03F7/70858 ,  F28D15/0266

Abstract: PROBLEM TO BE SOLVED: To provide a heat adjusting system capable of using a small cooling flow path with improved cooling efficiency.SOLUTION: A two-phase heat adjusting system includes an evaporator 3 thermally contacting one part 1 of a lithographic device and extracting heat from one part by evaporating a fluid inside the evaporator; a condenser 5 for removing heat by condensing the fluid inside the condenser; fluid lines 7, 8 arranged between the evaporator 3 and the condenser 5; a pump 14 for circulating the fluid in a circuit; an accumulator 16 constituted to hold the fluid and having a heat exchanger 18 fluid-communicated with the circuit and transmitting heat between the circuit and the fluid inside the heat exchanger; a temperature sensor 23 constituted to provide measurement signals indicating a temperature of the fluid; and a control device 27 constituted to maintain a substantially constant temperature of the fluid inside the circuit by adjusting an amount of heat transmitted by the heat exchanger 18 between the it and the fluid inside the accumulator based on the measurement signals.

Abstract translation: 要解决的问题：提供一种能够使用具有提高的冷却效率的小型冷却流路的热调节系统。 解决方案：两相热调节系统包括蒸发器3，其与光刻设备的一部分1热接触并且通过蒸发蒸发器内的流体从一部分提取热量; 用于通过冷凝器内的流体冷凝来除热的冷凝器5; 布置在蒸发器3和冷凝器5之间的流体管线7,8; 用于使流体在回路中循环的泵14; 储液器16构造成保持流体并具有与回路流体连通的热交换器18，并在回路和热交换器内的流体之间传递热量; 构成为提供表示流体温度的测量信号的温度传感器23; 以及控制装置27，其通过基于测量信号调节由蓄热器内的热交换器18和蓄液器内的流体之间传递的热量，来维持电路内的流体的基本恒定的温度。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2011071513A

公开(公告)日：2011-04-07

申请号：JP2010210311

申请日：2010-09-21

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： JACOBS JOHANNES HENRICUS WILHELMUS ,  KATE NICOLAAS TEN ,  OTTENS JOOST JEROEN ,  VAN DONK GERRIT ,  VEN ES JOHANNES

IPC: H01L21/027

CPC classification number: G03B27/52 ,  G03F7/70341 ,  G03F7/70875

Abstract: PROBLEM TO BE SOLVED: To provide a system that reduces uneven cooling of an object so that the object may be maintained at a substantially uniform temperature. SOLUTION: A lithographic apparatus is provided that includes a substrate holder configured to hold a substrate, and a heat pipe configured to maintain the substrate holder at a substantially uniform temperature. The heat pipe has a chamber containing a liquid reservoir and a vapor space, and a heating element at least partly in contact with liquid in the chamber. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供减少物体的不均匀冷却的系统，使得物体可以保持在基本均匀的温度。 解决方案：提供一种光刻设备，其包括被配置为保持基板的基板保持器和被配置为将基板保持器保持在基本上均匀的温度的热管。 热管具有容纳液体储存器和蒸汽空间的室，以及在室中至少部分地与液体接触的加热元件。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2011069608A

公开(公告)日：2011-04-07

申请号：JP2010210310

申请日：2010-09-21

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： JACOBS JOHANNES HENRICUS WILHELMUS ,  KATE NICOLAAS TEN ,  OTTENS JOOST JEROEN ,  PATEL HRISHIKESH ,  VAN DONK GERRIT ,  VEN ES JOHANNES

IPC: F28D15/02 ,  H01L21/027

CPC classification number: F28D15/04 ,  G03F7/70341 ,  G03F7/70875

Abstract: PROBLEM TO BE SOLVED: To provide a system for reducing the non-uniform cooling of an object such that the object is maintained at a substantially uniform temperature.
SOLUTION: The heat pipe maintains the object at a substantially uniform temperature. The heat pipe includes a liquid reservoir and a vapor space, a chamber with one part defined by a condensation face, and a liquid transport device applying force adding to gravity to a liquid and transporting the liquid from the condensation face to the reservoir. The condensation face is formed such that a condensation liquid is moved toward the liquid transport device along the condensation face.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种用于减少物体的不均匀冷却的系统，使得物体保持在基本均匀的温度。

解决方案：热管将物体保持在基本均匀的温度。 热管包括液体储存器和蒸汽空间，具有由冷凝面限定的一部分的腔室以及将重力加到液体并将液体从冷凝面传送到储液器的液体输送装置。 冷凝面形成为使得冷凝液沿着冷凝面向液体输送装置移动。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：SG185191A1

公开(公告)日：2012-11-29

申请号：SG2012020897

申请日：2012-03-22

Applicant: ASML NETHERLANDS BV

Inventor： DONDERS SJOERD NICOLAAS LAMBERTUS ,  BANINE VADIM YEVGENYEVICH ,  MOORS JOHANNES HUBERTUS JOSEPHINA ,  VERHAGEN MARTINUS CORNELIS MARIA ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  VAN DONK GERRIT ,  VAN GERNER HENK JAN

Abstract: A two-phase thermal conditioning system for thermal conditioning a part of a lithographic apparatus, includes an evaporator to be positioned in thermal contact with the part of the lithographic apparatus for extracting heat from the part by evaporation of a fluid inside the evaporator; a condenser to be positioned at a distance from the part of the lithographic apparatus for removing heat from the fluid inside the condenser by condensation of the fluid inside the condenser; fluid lines arranged between the evaporator and the condenser to form a circuit in which fluid is able to flow; a pump arranged in the circuit to circulate the fluid in the circuit; an accumulator configured to hold fluid, wherein the accumulator is in fluid communication with the circuit and comprises a heat exchanger to transfer heat from or to fluid inside the accumulator; a temperature sensor configured to provide a measurement signal representative of the temperature of the fluid; and a controller configured to maintain a substantially constant temperature of the fluid inside the circuit by regulating the amount of heat transferred by the heat exchanger from or to fluid inside the accumulator based on the measurement signal.(Figure 2)