公开(公告)号：US20230335366A1

公开(公告)日：2023-10-19

申请号：US18213229

申请日：2023-06-22

Applicant: ASML Netherlands B.V.

Inventor： Alexander Hendrik Vincent VAN VEEN ,  Derk Ferdinand WALVOORT

IPC: H01J37/04 ,  H01J37/317

CPC classification number: H01J37/045 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0437

Abstract: The invention relates to an exposure apparatus and a method for projecting a charged particle beam onto a target. The exposure apparatus comprises a charged particle optical arrangement comprising a charged particle source for generating a charged particle beam and a charged particle blocking element and/or a current limiting element for blocking at least a part of a charged particle beam from a charged particle source. The charged particle blocking element and the current limiting element comprise a substantially flat substrate provided with an absorbing layer comprising Boron, Carbon or Beryllium. The substrate further preferably comprises one or more apertures for transmitting charged particles. The absorbing layer is arranged spaced apart from the at least one aperture.

公开(公告)号：US20230317402A1

公开(公告)日：2023-10-05

申请号：US18118701

申请日：2023-03-07

Applicant: ASML Netherlands B.V.

Inventor： Derk Ferdinand WALVOORT ,  Dmitry MUDRETSOV ,  Xuerang HU ,  Qingpo XI ,  Jurgen VAN SOEST ,  Marco Jan-Jaco WIELAND

IPC: H01J37/09

CPC classification number: H01J37/09 ,  H01J2237/0266 ,  H01J2237/024

Abstract: Disclosed herein is an electron-optical assembly for an electron-optical column for projecting a charged particle beam along a beam path towards a target, the electron-optical assembly comprising: electromagnetic shielding surrounding the charged particle beam path and configured to shield the charged particle beam from an electromagnetic field external to the electromagnetic shielding; wherein the electromagnetic shielding comprises a plurality of sections extending along different positions along the beam path, each section surrounding the charged particle beam, wherein the sections are separable.

公开(公告)号：US20230207252A1

公开(公告)日：2023-06-29

申请号：US18168531

申请日：2023-02-13

Applicant: ASML Netherlands B.V.

Inventor： Derk Ferdinand WALVOORT ,  Marc SMITS ,  Teunis VAN DE PEUT

IPC: H01J37/15

CPC classification number: H01J37/15 ,  H01J37/28

Abstract: Disclosed herein is an actuator arrangement comprising: a wall defining a cavity; a casing protruding from the wall and defining an interior in fluid communication with the cavity; an actuator comprising: a force imparter configured to impart force on a component in the cavity; and an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing and exposed to the cavity; and a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a seal.