公开(公告)号：WO02082491A3

公开(公告)日：2002-12-05

申请号：PCT/US0210335

申请日：2002-04-04

Applicant: AXCELIS TECH INC

Inventor： SRIVASTAVA ASEEM ,  RICHARDSON DANIEL

IPC: H01J37/32

CPC classification number: H01J37/32192 ,  H01J37/321

Abstract: A supplemental ion source (74) for a plasma processing system (10) having a plasma processing chamber (16) is provided. The ion source (74) comprises: a signal generator (82, 96) for generating an output signal; and an antenna assembly (76, 90) located proximate the process chamber (16), whereby energization of the antenna assembly by the signal generator ionizes plasma confined within the processing chamber (16) to create plasma having a substantial ionized content. The antenna assembly (76, 90) is generally planar in shape and may take the form of a plate or coil antenna. The signal generator preferably generates an output signal in the radio frequency (RF) range. The supplemental energizer operates independently of the first plasma source such that either, or both, may be switched on or off at any time.

Abstract translation: 提供了一种用于具有等离子体处理室（16）的等离子体处理系统（10）的补充离子源（74）。 离子源（74）包括：用于产生输出信号的信号发生器（82,96）; 以及位于处理室（16）附近的天线组件（76,90），由此由信号发生器对天线组件的通电电离了处理室（16）内限制的等离子体，以产生具有基本电离含量的等离子体。 天线组件（76,90）的形状大体上是平面的并且可以采取板或线圈天线的形式。 信号发生器优选地在射频（RF）范围内产生输出信号。 辅助增能器独立于第一等离子体源操作，使得任一个或两者可以在任何时间被打开或关闭。

公开(公告)号：WO03007340A2

公开(公告)日：2003-01-23

申请号：PCT/US0223233

申请日：2002-07-12

Applicant: AXCELIS TECH INC

Inventor： KINNARD DAVID ,  RICHARDSON DANIEL

IPC: B25J9/06 ,  B25J9/00 ,  B25J9/04 ,  B65G49/07 ,  H01L21/677 ,  H01L

CPC classification number: B25J9/042 ,  B25J9/0093 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  Y10S414/139

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

Abstract translation: 负载锁定室组件包括负载锁定室，可拆卸地连接到负载锁定室的子室和在子室内具有主枢转轴线的第一机器人臂，其中第一机器人臂能够将基板从大约在 装载锁定室的中心到装载锁定室外的位置。

公开(公告)号：AU2002354691A1

公开(公告)日：2003-01-29

申请号：AU2002354691

申请日：2002-07-12

Applicant: AXCELIS TECH INC

Inventor： KINNARD DAVID ,  RICHARDSON DANIEL

IPC: B25J9/06 ,  B25J9/00 ,  B25J9/04 ,  B65G49/07 ,  H01L21/677 ,  H01L21/00

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

公开(公告)号：AU2002322577A1

公开(公告)日：2003-01-29

申请号：AU2002322577

申请日：2002-07-12

Applicant: AXCELIS TECH INC

Inventor： JANOS ALAN ,  RICHARDSON DANIEL

IPC: H01J65/00 ,  G03F7/20 ,  H01L21/00 ,  H01L21/304 ,  H01J65/04 ,  H01J61/12

公开(公告)号：AU2002256040A1

公开(公告)日：2002-10-21

申请号：AU2002256040

申请日：2002-04-04

Applicant: AXCELIS TECH INC

Inventor： RICHARDSON DANIEL ,  SRIVASTAVA ASEEM

IPC: H01J37/32