公开(公告)号：WO2020247378A1

公开(公告)日：2020-12-10

申请号：PCT/US2020/035723

申请日：2020-06-02

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： SPORLEDER, David ,  BASSOM, Neil ,  COLVIN, Neil ,  AMEEN, Mike ,  XU, Xiao

IPC: H01J37/317 ,  C23C14/06 ,  C23C14/48 ,  H01J37/08

Abstract: An ion source assembly (202) and method has a source gas supply (210) to provide a molecular carbon source gas (211) to an ion source chamber (206). A source gas flow controller (219) controls flow of the molecular carbon source gas to the ion source chamber. An excitation source (214) excites the molecular carbon source gas to form carbon ions and radicals. An extraction electrode (207) extracts the carbon ions from the ion source chamber, forming an ion beam (204). An oxidizing co-gas supply (220) provides oxidizing co-gas (221) to chamber. An oxidizing co-gas flow controller (222) controls flow of the oxidizing co-gas to the chamber. The oxidizing co-gas decomposes and reacts with carbonaceous residues and atomic carbon forming carbon monoxide and carbon dioxide within the ion source chamber. A vacuum pump system (234) removes the carbon monoxide and carbon dioxide, where deposition of atomic carbon within the ion source chamber is reduced and a lifetime of the ion source is increased.

公开(公告)号：WO2022240998A1

公开(公告)日：2022-11-17

申请号：PCT/US2022/028786

申请日：2022-05-11

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： PLATOW, Wilhelm ,  SILVERSTEIN, Paul ,  BASSOM, Neil ,  FARLEY, Marvin ,  SPORLEDER, David

IPC: H01J37/08 ,  H01J37/317 ,  H01J27/08 ,  H01J2237/0807 ,  H01J27/024 ,  H01J37/3171

Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.