公开(公告)号：WO2014072885A3

公开(公告)日：2014-07-03

申请号：PCT/IB2013059777

申请日：2013-10-30

Applicant: BASF SE ,  BASF CHINA CO LTD

Inventor： KIENLE MARCEL PATRIK ,  MAYER DIETER ,  RÖGER-GÖPFERT CORNELIA ,  HAAG ALEXANDRA ,  EMNET CHARLOTTE ,  FLÜGEL ALEXANDER ,  ARNOLD MARCO

IPC: C08G73/14 ,  C25D3/38

CPC classification number: C25D3/38 ,  C23C18/38 ,  C25D3/32

Abstract: Disclosed is a composition comprising a source of metal ions and at least one additive comprising one polyaminoamide represented by formula I. Further disclosed is the use of said composition in a bath for depositing metal containing layers which have reduced overplating, particularly reduced mounding.

Abstract translation: 公开了包含金属离子源和至少一种添加剂的组合物，其包含一种由式I表示的聚氨基酰胺。进一步公开了所述组合物在浴中用于沉积含有减少的过镀层，特别是减小的堆积的含金属层的用途。

公开(公告)号：WO2011012462A3

公开(公告)日：2012-01-19

申请号：PCT/EP2010060276

申请日：2010-07-16

Applicant: BASF SE ,  ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  HAAG ALEXANDRA ,  MAYER DIETER ,  EMNET CHARLOTTE

Inventor： ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  HAAG ALEXANDRA ,  MAYER DIETER ,  EMNET CHARLOTTE

IPC: C25D3/02 ,  C25D3/38 ,  C25D7/12 ,  H01L21/768 ,  H05K3/42

CPC classification number: C25D3/38 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/42

Abstract: According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n (I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

Abstract translation: 根据本发明，提供了包含至少一种金属离子源和至少一种添加剂的组合物，所述添加剂可通过使a）至少一种式（I）的多元醇（I）X（OH）n（I ）与b）至少一种烯化氧以形成包含聚氧化烯侧链的多元醇缩合物，其中n是3至6的整数，X是具有2至10个的n价直链或支链脂族或脂环族基团 碳原子，其可以是取代或未取代的。

公开(公告)号：SG174264A1

公开(公告)日：2011-10-28

申请号：SG2011064086

申请日：2010-03-25

Applicant: BASF SE

Inventor： ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  EMNET CHARLOTTE ,  HAAG ALEXANDRA ,  MAYER DIETER

Abstract: A composition for filling submicrometer sized features having an aperture size of 30 nanometers or less comprising a source of copper ions, and at least one suppressing agent selected from compounds of formula (I) wherein - the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer. - the R2 radicals are each independently selected from R1 or alkyl. - X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylen and Z-(O-Z)m wherein the Z radicals are each independently selected from C2 to C6 alkylen, - n is an integer equal to or greater than 0. - m is an integer equal to or greater than 1.

公开(公告)号：SG171904A1

公开(公告)日：2011-07-28

申请号：SG2011040011

申请日：2009-12-08

Applicant: BASF SE

Inventor： ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  EBERT SOPHIA ,  EMNET CHARLOTTE ,  HAAG ALEXANDRA ,  MAYER DIETER

Abstract: A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1-OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2-N(R1-OH)2 (Ib) to give a polyalkanolamine(ll), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(ll).

公开(公告)号：MY172822A

公开(公告)日：2019-12-12

申请号：MYPI2015001181

申请日：2013-10-30

Applicant: BASF SE

Inventor： HAAG ALEXANDRA ,  ARNOLD MARCO ,  FLUGEL ALEXANDER ,  ROGER-GOPFERT CORNELIA ,  KIENLE MARCEL PATRIK ,  MAYER DIETER ,  EMNET CHARLOTTE

Abstract: Disclosed is a composition comprising a source of metal ions and at least one additive comprising one polyaminoamide represented by formula I. Further disclosed is the use of said composition in a bath for depositing metal containing layers which have reduced overplating, particularly reduced mounding.

公开(公告)号：MY158203A

公开(公告)日：2016-09-15

申请号：MYPI2011004272

申请日：2010-03-25

Applicant: BASF SE

Inventor： ROGER-GOPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  EMNET CHARLOTTE ,  HAAG ALEXANDRA ,  MAYER DIETER

IPC: C23C18/31 ,  C25D3/38 ,  C23C18/32 ,  C25D3/58 ,  C25D7/12 ,  H01L21/288 ,  H01L21/768 ,  H05K3/18 ,  H05K3/24 ,  H05K3/42

Abstract: A COMPOSITION FOR FILLING SUBMICROMETER SIZED FEATURES HAVING AN APERTURE SIZE OF 30 NANOMETERS OR LESS COMPRISING A SOURCE OF COPPER IONS, AND AT LEAST ONE SUPPRESSING AGENT SELECTED FROM COMPOUNDS OF FORMULA I WHEREIN - THE R¹ RADICALS ARE EACH INDEPENDENTLY SELECTED FROM A COPOLYMER OF ETHYLENE OXIDE AND AT LEAST ONE FURTHER C3 TO C4 ALKYLENE OXIDE, SAID COPOLYMER BEING A RANDOM COPOLYMER. - THE R² RADICALS ARE EACH INDEPENDENTLY SELECTED FROM R¹ OR ALKYL. - X AND Y ARE SPACER GROUPS INDEPENDENTLY, AND X FOR EACH REPEATING UNIT INDEPENDENTLY, SELECTED FROM C1 TO C6 ALKYLEN AND Z-(O-Z)m WHEREIN THE Z RADICALS ARE EACH INDEPENDENTLY SELECTED FROM C2 TO C6 ALKYLEN, - N IS AN INTEGER EQUAL TO OR GREATER THAN 0. – M IS AN INTEGER EQUAL TO OR GREATER THAN 1

公开(公告)号：SG10201404394QA

公开(公告)日：2014-10-30

申请号：SG10201404394Q

申请日：2010-07-16

Applicant: BASF SE

Inventor： RÖGER-GÖPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  HAAG ALEXANDRA ,  MAYER DIETER ,  EMNET CHARLOTTE

公开(公告)号：SG10201401324YA

公开(公告)日：2014-08-28

申请号：SG10201401324Y

申请日：2010-03-29

Applicant: BASF SE

Inventor： RÖGER-GÖPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  EMNET CHARLOTTE ,  HAAG ALEXANDRA ,  MAYER DIETER

Abstract: A composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides, said suppressing agent having a molecular weight Mw of 6000 g/mol or more.

公开(公告)号：SG177685A1

公开(公告)日：2012-02-28

申请号：SG2012003315

申请日：2010-07-16

Applicant: BASF SE

Inventor： ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  HAAG ALEXANDRA ,  MAYER DIETER ,  EMNET CHARLOTTE

Abstract: According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n (I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

公开(公告)号：SG174393A1

公开(公告)日：2011-11-28

申请号：SG2011066396

申请日：2010-03-31

Applicant: BASF SE

Inventor： ROEGER-GOEPFERT CORNELIA ,  RAETHER ROMAN BENEDIKT ,  EMNET CHARLOTTE ,  HAAG ALEXANDRA ,  MAYER DIETER

Abstract: Composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising at least three active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides.