公开(公告)号：EP2458354A1

公开(公告)日：2012-05-30

申请号：EP10192354.8

申请日：2010-11-24

Applicant: FEI COMPANY

Inventor： Van den Boom, Stepahnus ,  Dona, Pleun ,  Kwakman, Loek ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen

IPC: G01K5/68

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract translation: 本发明涉及确定的采矿的方法中的带电粒子光学设备，在DASS模方法，其特征的样品载体的温度包括使所述样品载体与带电粒子束观测，观测给出关于的温度信息 样品载体。 本发明是基于这样的认识，并带电粒子光学设备中，检查作为TEM，STEM，SEM或FIB，可以用来观察样品载体的温度相关的变化。 所述改变可以是机械变化（双金属的E.G.），结晶学变化（钙钛矿的E.G.），和发光的变化（在强度或衰减时间）。 在一个优选实施方案中的样品载体显示了两个双金属（210A，21 0B），显示金属（208，210）具有不同的热膨胀系数在相反方向上弯曲。 两个双金属之间的距离被用作温度计。