公开(公告)号：EP2458354A1

公开(公告)日：2012-05-30

申请号：EP10192354.8

申请日：2010-11-24

Applicant: FEI COMPANY

Inventor： Van den Boom, Stepahnus ,  Dona, Pleun ,  Kwakman, Loek ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen

IPC: G01K5/68

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract translation: 本发明涉及确定的采矿的方法中的带电粒子光学设备，在DASS模方法，其特征的样品载体的温度包括使所述样品载体与带电粒子束观测，观测给出关于的温度信息 样品载体。 本发明是基于这样的认识，并带电粒子光学设备中，检查作为TEM，STEM，SEM或FIB，可以用来观察样品载体的温度相关的变化。 所述改变可以是机械变化（双金属的E.G.），结晶学变化（钙钛矿的E.G.），和发光的变化（在强度或衰减时间）。 在一个优选实施方案中的样品载体显示了两个双金属（210A，21 0B），显示金属（208，210）具有不同的热膨胀系数在相反方向上弯曲。 两个双金属之间的距离被用作温度计。

公开(公告)号：EP2292954A1

公开(公告)日：2011-03-09

申请号：EP10175349.9

申请日：2010-09-06

Applicant: FEI Company

Inventor： Van den Boom, Henricus ,  Jonkers, Roland ,  Van den Boom, Stepahnus ,  Uland, Henk ,  De Groot, Rients

IPC: F16J15/06 ,  F16J15/14 ,  F16J15/40

CPC classification number: F16L23/18 ,  F16J15/062 ,  F16J15/14 ,  F16J15/40 ,  F16J15/406 ,  F16L23/22

Abstract: The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-ring seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs.
The invention proposes to place the O-ring (110) in a channel (108,109) in which dry gas, such as dry nitrogen, is blown. In this way no water can permeate through the O-ring, resulting in a reduced base pressure and highly reduced ice growth.

Abstract translation: 本发明涉及用作高真空密封件的改进的O形密封圈。 标准O型圈密封的限制是水通过O型圈的渗透。 特别是对于零件保持低温温度的仪器，如低温电子显微镜，真空中存在水是一个问题，因为这会导致低温部分产生冰块。 作为解决方案，通常使用双O形密封圈或金属密封。 这两种解决方案都有严重的拖延。 本发明提出将O形环（110）放置在其中吹干干燥气体（例如干燥氮气）的通道（108,109）中。 以这种方式，没有水可以通过O形环渗透，导致降低的基础压力和高度减少的冰的生长。