公开(公告)号：EP1947675A1

公开(公告)日：2008-07-23

申请号：EP08150440.9

申请日：2008-01-21

Applicant: FEI COMPANY ,  The Regents of the University of California ,  BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

Inventor： Duden, Thomas ,  Schmid, Andreas ,  Petrov, Ivan ,  Donchev, Todor ,  Olson, Eric ,  Van de Water, Jeroen ,  Wagner, Raymond ,  Van den Oetelaar, Johannes ,  Bruggers, Jan Willem ,  Slingerland, Hendrik ,  Ottevanger, Adriaan

IPC: H01J37/20 ,  B25J7/00 ,  G01N23/22 ,  G02B21/32 ,  H01L41/09

CPC classification number: H01J37/20 ,  B25J7/00 ,  B25J15/0004

Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.

Abstract translation: 用于例如机器人的操纵器。 描述了透射电子显微镜（TEM），所述操纵器能够旋转和平移样品架（4）。 操纵器将圆形样品保持器夹在两个构件（3A，3B）之间，所述构件安装在致动器（2A，2B）上。 沿着相同的方向移动致动器导致样品架的平移，同时沿相反方向移动致动器导致样品架的旋转。

公开(公告)号：EP1947675B1

公开(公告)日：2009-03-25

申请号：EP08150440.9

申请日：2008-01-21

Applicant: FEI COMPANY ,  The Regents of the University of California ,  Board of Trustees at the University of Illinois

Inventor： Duden, Thomas ,  Schmid, Andreas ,  Petrov, Ivan ,  Donchev, Todor ,  Olson, Eric ,  Van de Water, Jeroen ,  Wagner, Raymond ,  Van den Oetelaar, Johannes ,  Bruggers, Jan Willem ,  Slingerland, Hendrik ,  Ottevanger, Adriaan

IPC: H01J37/20 ,  B25J7/00 ,  G01N23/22 ,  G02B21/32 ,  H01L41/09

CPC classification number: H01J37/20 ,  B25J7/00 ,  B25J15/0004

公开(公告)号：EP1852889A2

公开(公告)日：2007-11-07

申请号：EP07107071.8

申请日：2007-04-27

Applicant: FEI COMPANY

Inventor： Hoeks, Petrus ,  Van de Water, Jeroen

IPC: H01J37/20

CPC classification number: H01J37/20

Abstract: The invention relates to a thermal switch for particle-optical apparatus. In, for example, a cryo-TEM (transmission electron microscope), a sample 34 that is placed at an extremity 20 of a sample holder 7 can be maintained at, for example, the temperature of liquid nitrogen. There is a need to be able to inspect a sample at, for example, room temperature in a simple manner, without heating the microscope as a whole from the cryogenic temperature to room temperature. By using the thermal switch 40, this becomes possible. To this end, the thermal switch changes the thermal path between a cold source 22 in the apparatus and the extremity 20 of the sample holder 7, whereby, in one position, position 46 a , a connection is made from the extremity 20 to the cold source 22, and, in the other position, position 46 b , a connection is made to a portion 44 of the apparatus that is maintained at room temperature.

Abstract translation: 本发明涉及一种用于粒子光学设备的热敏开关。 在例如冷冻TEM（透射电子显微镜）中，放置在样品架7的末端20处的样品34可以保持在例如液氮的温度。 需要能够以简单的方式在例如室温下检查样品，而无需将显微镜整体从低温温度加热到室温。 通过使用热敏开关40，这成为可能。 为此，热开关改变设备中的冷源22和样品保持器7的末端20之间的热路径，由此在位置46a的一个位置处，从末端20到冷源 22，并且在另一位置46b处，与维持在室温的设备的部分44连接。

公开(公告)号：EP2458355A3

公开(公告)日：2012-08-08

申请号：EP11190235.9

申请日：2011-11-23

Applicant: FEI Company

Inventor： Van den Boom, Stephanus ,  Dona, Pleun ,  Kwakman, Laurens ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen ,  Remigy, Herve-William

IPC: G01K5/68 ,  G01K11/20

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

公开(公告)号：EP2458354A1

公开(公告)日：2012-05-30

申请号：EP10192354.8

申请日：2010-11-24

Applicant: FEI COMPANY

Inventor： Van den Boom, Stepahnus ,  Dona, Pleun ,  Kwakman, Loek ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen

IPC: G01K5/68

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract translation: 本发明涉及确定的采矿的方法中的带电粒子光学设备，在DASS模方法，其特征的样品载体的温度包括使所述样品载体与带电粒子束观测，观测给出关于的温度信息 样品载体。 本发明是基于这样的认识，并带电粒子光学设备中，检查作为TEM，STEM，SEM或FIB，可以用来观察样品载体的温度相关的变化。 所述改变可以是机械变化（双金属的E.G.），结晶学变化（钙钛矿的E.G.），和发光的变化（在强度或衰减时间）。 在一个优选实施方案中的样品载体显示了两个双金属（210A，21 0B），显示金属（208，210）具有不同的热膨胀系数在相反方向上弯曲。 两个双金属之间的距离被用作温度计。

公开(公告)号：EP1883096A1

公开(公告)日：2008-01-30

申请号：EP07112812.8

申请日：2007-07-20

Applicant: FEI COMPANY

Inventor： Van Gaasbeek, Erik ,  Dona, Pleun ,  Barends, Paul ,  Van Hees, Ian ,  Van de Water, Jeroen ,  Van den Oetelaar, Johannes

IPC: H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01J37/20

Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder (10) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

Abstract translation: 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。

公开(公告)号：EP2458355A2

公开(公告)日：2012-05-30

申请号：EP11190235.9

申请日：2011-11-23

Applicant: FEI Company

Inventor： Van den Boom, Stephanus ,  Dona, Pleun ,  Kwakman, Laurens ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen ,  Remigy, Herve-William

IPC: G01K5/68 ,  G01K11/20

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract translation: 本发明涉及一种确定带电粒子光学设备中的样品载体的温度的方法，其特征在于该方法包括用带电粒子束观察样品载体，该观察提供关于 样品载体。 本发明基于以下认识：可以使用诸如TEM，STEM，SEM或FIB的带电粒子光学设备观察样品载体的温度相关变化。 这些变化可以是机械变化（例如双金属），晶体学变化（例如钙钛矿）和发光变化（强度或衰减时间）。 在优选实施例中，样品载体显示两个双金属片（210a，210b），其显示具有不同热膨胀系数的金属（208,210），沿相反方向弯曲。 两个双金属片之间的距离用作温度计。

公开(公告)号：EP2381236A1

公开(公告)日：2011-10-26

申请号：EP10160903.0

申请日：2010-04-23

Applicant: FEI COMPANY ,  Maastricht Instruments B.V.

Inventor： Smulders, Karin ,  Wagner, Raymond ,  Van de Water, Jeroen ,  Luecken, Uwe ,  Nijpels, Frank ,  Storms, Marc

IPC: G01N1/42

CPC classification number: G01N1/42 ,  G01N1/2813

Abstract: Apparatus (100) for preparing a cryogenic TEM specimen on a specimen carrier (102), the apparatus comprising a plunger (105), blotters (106 a , 106 b ), a container (108) for holding a cryogenic liquid (110), the plunger moving the specimen carrier to an applicator position for applying a liquid, blotting the specimen carrier, and plunging the specimen carrier in the cryogenic liquid. The apparatus is characterized in that it shows a first acceptor (114) for holding a first storage capsule (112) equipped to store one or more specimen carriers (126-i), the plunger is equipped with a gripper (104) for gripping the specimen carrier; a second acceptor (118) for holding a second storage capsule (116) at a cryogenic temperature to store one or more specimen carriers (128-i) at a cryogenic temperature; and the apparatus is equipped to move the specimen carrier automatically from the first storage capsule via the applicator position and the blotting position to the second storage capsule.

Abstract translation: 用于在试样载体（102）上制备低温TEM样品的装置（100），该装置包括柱塞（105），吸墨纸（106a，106b），用于保持低温液体的容器（108） 柱塞将样品载体移动到施加位置以施加液体，印迹样品载体，并将样品载体插入低温液体中。 该装置的特征在于，其示出了用于保持装备有存储一个或多个样本载体（126-i）的第一储存胶囊（112）的第一受体（114），柱塞配备有夹持器（104） 标本载体 用于在低温下保持第二储存胶囊（116）以在低温下存储一个或多个样本载体（128-i）的第二受体（118） 并且该装置被配备为将样品载体从第一储存胶囊经由施用器位置和吸印位置自动移动到第二储存胶囊。

公开(公告)号：EP1852889A3

公开(公告)日：2007-12-05

申请号：EP07107071.8

申请日：2007-04-27

Applicant: FEI COMPANY

Inventor： Hoeks, Petrus ,  Van de Water, Jeroen

IPC: H01J37/20

CPC classification number: H01J37/20

Abstract: The invention relates to a thermal switch for particle-optical apparatus. In, for example, a cryo-TEM (transmission electron microscope), a sample 34 that is placed at an extremity 20 of a sample holder 7 can be maintained at, for example, the temperature of liquid nitrogen. There is a need to be able to inspect a sample at, for example, room temperature in a simple manner, without heating the microscope as a whole from the cryogenic temperature to room temperature. By using the thermal switch 40, this becomes possible. To this end, the thermal switch changes the thermal path between a cold source 22 in the apparatus and the extremity 20 of the sample holder 7, whereby, in one position, position 46 a , a connection is made from the extremity 20 to the cold source 22, and, in the other position, position 46 b , a connection is made to a portion 44 of the apparatus that is maintained at room temperature.