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    Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus
    2.
    发明公开
    Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus 审中-公开
    在带电粒子光学设备中测量样品载体的温度的方法

    公开(公告)号：EP2458355A2

    公开(公告)日：2012-05-30

    申请号：EP11190235.9

    申请日：2011-11-23

    Applicant: FEI Company

    Inventor： Van den Boom, Stephanus ,  Dona, Pleun ,  Kwakman, Laurens ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen ,  Remigy, Herve-William

    IPC: G01K5/68 ,  G01K11/20

    CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

    Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
    The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
    The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

    Abstract translation: 本发明涉及一种确定带电粒子光学设备中的样品载体的温度的方法，其特征在于该方法包括用带电粒子束观察样品载体，该观察提供关于 样品载体。 本发明基于以下认识：可以使用诸如TEM，STEM，SEM或FIB的带电粒子光学设备观察样品载体的温度相关变化。 这些变化可以是机械变化（例如双金属），晶体学变化（例如钙钛矿）和发光变化（强度或衰减时间）。 在优选实施例中，样品载体显示两个双金属片（210a，210b），其显示具有不同热膨胀系数的金属（208,210），沿相反方向弯曲。 两个双金属片之间的距离用作温度计。

    Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus
    4.
    发明公开
    Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus 审中-公开
    一种用于带电粒子测量样品的温度的光学器件的方法

    公开(公告)号：EP2458354A1

    公开(公告)日：2012-05-30

    申请号：EP10192354.8

    申请日：2010-11-24

    Applicant: FEI COMPANY

    Inventor： Van den Boom, Stepahnus ,  Dona, Pleun ,  Kwakman, Loek ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen

    IPC: G01K5/68

    CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

    Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
    The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
    The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

    Abstract translation: 本发明涉及确定的采矿的方法中的带电粒子光学设备，在DASS模方法，其特征的样品载体的温度包括使所述样品载体与带电粒子束观测，观测给出关于的温度信息 样品载体。 本发明是基于这样的认识，并带电粒子光学设备中，检查作为TEM，STEM，SEM或FIB，可以用来观察样品载体的温度相关的变化。 所述改变可以是机械变化（双金属的E.G.），结晶学变化（钙钛矿的E.G.），和发光的变化（在强度或衰减时间）。 在一个优选实施方案中的样品载体显示了两个双金属（210A，21 0B），显示金属（208，210）具有不同的热膨胀系数在相反方向上弯曲。 两个双金属之间的距离被用作温度计。

    METHOD OF IMAGING A SAMPLE USING AN ELECTRON MICROSCOPE
    6.
    发明公开
    METHOD OF IMAGING A SAMPLE USING AN ELECTRON MICROSCOPE 审中-公开

    公开(公告)号：EP3657528A1

    公开(公告)日：2020-05-27

    申请号：EP18208355.0

    申请日：2018-11-26

    Applicant: FEI Company

    Inventor： Franken, Erik Michiel ,  Schoenmakers, Remco ,  Janssen, Bart Jozef ,  Verheijen, Martin ,  Kohr, Holger ,  Deng, Yuchen ,  Voigt, Andreas

    IPC: H01J37/28 ,  G01N23/046

    Abstract: The invention relates to a method of imaging a sample, said sample mounted on a sample holder in an electron microscope, the electron microscope comprising an electron source for generating a beam of energetic electrons along an optical axis and optical elements for focusing and deflecting the beam so as to irradiate the sample with a beam of electrons. The sample holder is capable of positioning and tilting the sample with respect to the electron beam. The method comprises the step of acquiring a tilt series ts, tm, te of images by irradiating the sample with the beam of electrons, and concurrently changing a position Ps,Pm,Pe of the sample during acquisition of the images, so that each image is acquired at an associated unique tilt angle t and an associated unique position P.

    Method of calibrating a scanning transmission charged-particle microscope
    7.
    发明公开
    Method of calibrating a scanning transmission charged-particle microscope 有权
    Verfahren zur Kalibrierung eines Transmissions-Rasterelektronenmikroskops

    公开(公告)号：EP2966668A1

    公开(公告)日：2016-01-13

    申请号：EP14176529.7

    申请日：2014-07-10

    Applicant: FEI COMPANY

    Inventor： Otten, Max ,  Kok, Els ,  Verheijen, Martin

    IPC: H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2817 ,  H01J2237/2826

    Abstract: A method of calibrating a Scanning Transmission Charged-Particle Microscope comprising:
    - A specimen holder, for holding a specimen;
    - A source, for producing a beam of charged particles;
    - An illuminator, for directing said beam so as to irradiate the specimen;
    - An imaging system, for directing charged particles that traverse the specimen onto a detector;
    - Scanning means, for causing said beam to undergo scanning motion relative to a surface of the specimen,

    which microscope can be operated in:
    - A non-scanning mode, whereby said beam is relatively broad and said detector forms an image without invocation of said scanning means; or
    - A scanning mode, whereby said beam is relatively narrow and said detector accumulates an image as a function of scan position of said beam,

    which method comprises the following steps:
    - Providing a calibration specimen on said specimen holder;
    - In non-scanning mode, using said detector to form a calibration image of the calibration specimen, using a given configuration of said imaging system;
    - Utilizing a known dimension of said calibration specimen and comparing it to a corresponding dimension in said calibration image to calibrate a characteristic dimension of a field of view of said detector;
    - In scanning mode, recording a beam pattern of said beam in the calibrated field of view of said detector, and examining the recorded beam pattern to derive a geometric aspect thereof.

    Abstract translation: 一种校准扫描透射带电粒子显微镜的方法，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 成像系统，用于将穿过样本的带电粒子引导到检测器上; - 扫描装置，用于使所述光束相对于所述样本的表面经历扫描运动，所述显微镜可以在以下操作中： - 非扫描模式，由此所述光束相对较宽，并且所述检测器形成图像而不调用所述 扫描手段; 或 - 扫描模式，由此所述光束相对较窄，并且所述检测器根据所述光束的扫描位置累积图像，该方法包括以下步骤： - 在所述样本保持器上提供校准样本; - 在非扫描模式中，使用所述检测器来形成校准样本的校准图像，使用所述成像系统的给定配置; - 利用所述校准样本的已知尺寸并将其与所述校准图像中的对应尺寸进行比较，以校准所述检测器的视野的特征尺寸; - 在扫描模式中，在所述检测器的校准视场中记录所述光束的光束图案，并且检查所记录的光束图案以导出其几何方面。

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