公开(公告)号：WO2008049134A2

公开(公告)日：2008-04-24

申请号：PCT/US2007/082166

申请日：2007-10-22

Applicant: FEI COMPANY ,  ARJAVAC, Jason ,  ZOU, Pei ,  TASKER, David James ,  OTTEN, Maximus Theodorus ,  DANIEL, Gerhard

Inventor： ARJAVAC, Jason ,  ZOU, Pei ,  TASKER, David James ,  OTTEN, Maximus Theodorus ,  DANIEL, Gerhard

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

Abstract translation: 一种用于S / TEM样品制备和分析的改进方法和装置。 本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。 本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程 并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

公开(公告)号：WO2008049133A2

公开(公告)日：2008-04-24

申请号：PCT/US2007/082163

申请日：2007-10-22

Applicant: FEI COMPANY ,  BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

Abstract translation: 一种用于S / TEM样品制备和分析的改进方法和装置。 本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。 新颖的样品结构和铣削图案的新颖应用允许产生薄至50nm的S / TEM样品，而没有显着的弯曲或翘曲。 本发明的优选实施方案提供了部分或全部自动化TEM样品制备的方法，使TEM样品的创建和分析过程减少劳动密集度，并提高TEM分析的产量和再现性。

公开(公告)号：WO2008051880A3

公开(公告)日：2008-05-02

申请号：PCT/US2007/082030

申请日：2007-10-20

Applicant: FEI COMPANY ,  AGORIO, Enrique ,  HUDSON, James Edgar ,  GERHARD, Daniel ,  TANGUAY, Michael ,  ARJAVAC, Jason

Inventor： AGORIO, Enrique ,  HUDSON, James Edgar ,  GERHARD, Daniel ,  TANGUAY, Michael ,  ARJAVAC, Jason

IPC: G01R1/073 ,  H01L21/66

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

公开(公告)号：EP2095134A2

公开(公告)日：2009-09-02

申请号：EP07863442.5

申请日：2007-10-20

Applicant: FEI Company

Inventor： AGORIO, Enrique ,  HUDSON, James Edgar ,  GERHARD, Daniel ,  TANGUAY, Michael ,  ARJAVAC, Jason

IPC: G01R1/073 ,  H01L21/66

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

公开(公告)号：EP2095134B1

公开(公告)日：2017-02-22

申请号：EP07863442.5

申请日：2007-10-20

Applicant: FEI Company

Inventor： AGORIO, Enrique ,  HUDSON, James Edgar ,  GERHARD, Daniel ,  TANGUAY, Michael ,  ARJAVAC, Jason

IPC: G01N1/32 ,  H01J37/26 ,  H01J37/28 ,  H01J37/31 ,  G01N1/28 ,  G01R31/28 ,  H01J37/20 ,  H01J37/285

CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

公开(公告)号：EP2106555A2

公开(公告)日：2009-10-07

申请号：EP07868540.1

申请日：2007-10-22

Applicant: FEI Company

Inventor： ARJAVAC, Jason ,  ZOU, Pei ,  TASKER, David James ,  OTTEN, Maximus Theodorus ,  DANIEL, Gerhard

IPC: G01R31/305

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：EP2106555B1

公开(公告)日：2015-01-07

申请号：EP07868540.1

申请日：2007-10-22

Applicant: FEI Company

Inventor： ARJAVAC, Jason ,  ZOU, Pei ,  TASKER, David James ,  OTTEN, Maximus Theodorus ,  DANIEL, Gerhard

IPC: G01N1/28 ,  H01J37/26 ,  G01N1/06 ,  G01N1/08 ,  H01J37/305 ,  G01N1/32 ,  G01N23/04

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2104864A2

公开(公告)日：2009-09-30

申请号：EP07868539.3

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

IPC: G01R31/305

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：EP4199034A1

公开(公告)日：2023-06-21

申请号：EP22211532.1

申请日：2022-12-05

Applicant: FEI COMPANY

Inventor： MILLER, Thomas Gary ,  ARJAVAC, Jason ,  ROUTH JR., Brian ,  BIEDRZYCKI, Mark

IPC: H01J37/30 ,  H01J37/304 ,  H01J37/305

Abstract: Methods and apparatus are disclosed for integration of image-based metrology into a milling workflow. A first ion beam milling operation is performed to an edge at a distance from a final target position on a sample. An SEM image of the sample is used to determine a distance between the milled edge and a reference structure on the sample. Based on the determined distance, the ion beam is adjusted to perform a second milling operation to shift the milled edge to the final target position. Extensions to iterative procedures are disclosed. Various geometric configurations and corrections are disclosed. Manufacturing and analytic applications are disclosed in a variety of fields, including read-write head manufacture and TEM sample preparation. Other combinations of imaging and milling tools can be used.

公开(公告)号：EP2104864B1

公开(公告)日：2015-03-04

申请号：EP07868539.3

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

IPC: G01R31/305 ,  G01N1/32 ,  G01N1/28 ,  H01J37/26 ,  H01J37/305 ,  G01N1/06 ,  G01N1/08 ,  G01N23/04

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749