公开(公告)号：WO2004077509A3

公开(公告)日：2004-10-21

申请号：PCT/US2004005020

申请日：2004-02-20

Applicant: IBM ,  KOESTER STEVEN ,  BEYER KLAUS ,  HARGROVE MICHAEL ,  RIM KERN ,  CHAN KEVIN

Inventor： KOESTER STEVEN ,  BEYER KLAUS ,  HARGROVE MICHAEL ,  RIM KERN ,  CHAN KEVIN

IPC: H01L21/762 ,  H01L29/786

CPC classification number: H01L29/7842 ,  H01L21/76224 ,  H01L29/78687

Abstract: A structure, and a method for fabricating the structure, for the isolation of electronic devices is disclosed. The electronic devices are processed in substrates comprising a SiGe based layer underneath a strained Si layer. The isolation structure comprises a trench extending downward from the substrate top surface and penetrating into the SiGe based layer, forming a sidewall in the substrate. An epitaxial Si liner is selectively deposited onto the trench sidewall, and subsequently thermally oxidized. The trench is filled with a trench dielectric, which protrudes above the substrate top surface.

Abstract translation: 公开了用于隔离电子设备的结构和用于制造该结构的方法。 电子器件在包括应变Si层下方的SiGe基础层的衬底中进行处理。 隔离结构包括从衬底顶表面向下延伸并穿透SiGe基层的沟槽，在衬底中形成侧壁。 外延Si衬垫被选择性地沉积到沟槽侧壁上，并且随后被热氧化。 沟槽填充有沟槽电介质，其突出于衬底顶表面之上。

公开(公告)号：DE10310080B4

公开(公告)日：2009-05-07

申请号：DE10310080

申请日：2003-03-07

Applicant: IBM ,  QIMONDA AG

Inventor： CHAN KEVIN ,  KULKARNI SUBHASH ,  MATHAD GANGADHARA ,  RANADE RAIJV M

IPC: H01L21/8242 ,  H01L21/308 ,  H01L21/76 ,  H01L21/762 ,  H01L21/768

公开(公告)号：AT551734T

公开(公告)日：2012-04-15

申请号：AT03721349

申请日：2003-02-19

Applicant: IBM

Inventor： APPENZELLER JOERG ,  AVOURIS PHAEDON ,  CHAN KEVIN ,  COLLINS PHILIP ,  MARTEL RICHARD ,  WONG HON-SUM PHILIP

IPC: H01L51/05 ,  B82Y10/00 ,  H01L51/00 ,  H01L51/30

Abstract: A carbon-nanotube field transistor semiconductor device, comprising: a vertical carbon-nanotube (508) wrapped in a dielectric material (511); a source formed at a first side of the carbon-nanotube; a drain (515) formed on a second side of the carbon-nanotube; a bilayer nitride complex through which a band strap of each of the source and the drain is formed connecting the carbon-nanotube wrapped in the dielectric material to the source and the drain; and a gate (512) formed substantially over a portion of the carbon-nanotube. Further disclosed are methods for forming the following self-aligned carbon-nanotube field effect transistor: A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.

公开(公告)号：DE10310080A1

公开(公告)日：2003-10-02

申请号：DE10310080

申请日：2003-03-07

Applicant: INFINEON TECHNOLOGIES AG ,  IBM

Inventor： CHAN KEVIN ,  KULKARNI SUBHASH ,  MATHAD GANGADHARA ,  RANADE RAIJV M

IPC: H01L21/308 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8242 ,  H01L21/76

Abstract: Formation of at least one deep trench structure comprises providing at least one deep trench having sidewalls that extend to a common bottom wall in a substrate surface, each of the deep trenches having initial dimensions that are wider than targeted dimensions for the deep trenches; and forming an epitaxial silicon film on at least some portions of the sidewalls to reduce the initial dimensions of the deep trenches to the targeted dimensions.

公开(公告)号：CA2317825C

公开(公告)日：2006-02-07

申请号：CA2317825

申请日：2000-09-07

Applicant: IBM CANADA

Inventor： MELHEM WASSIM ,  SPATAFORA VITO ,  SEELEMANN DIRK ALEXANDER ,  CHAN KEVIN ,  STARKEY MICHAEL

IPC: G09B5/02 ,  G09B7/02 ,  G09B19/00

Abstract: The invention pertains to a computer tutorial system wherein software produc t training is provided interactively by guiding the user, for example, through one or more examples or applications that can be created in and/or using the product. More particularly, the invention involves a computer implemented, interactive tutorial system providing onlin e instruction in conjunction with a contemporaneously operating software product to, for example, create such examples or applications and the tutorial system further providing for the creation of such examples or applications in and/or using the product.

公开(公告)号：CA2317825A1

公开(公告)日：2002-03-07

申请号：CA2317825

申请日：2000-09-07

Applicant: IBM CANADA

Inventor： STARKEY MICHAEL ,  SPATAFORA VITO ,  SEELEMANN DIRK ALEXANDER ,  CHAN KEVIN ,  MELHEM WASSIM

IPC: G09B7/02 ,  G09B5/02 ,  G09B19/00 ,  G06F17/60

Abstract: The invention pertains to a computer tutorial system wherein software produc t training is provided interactively by guiding the user, for example, through one or more examples or applications that can be created in and/or using the product. More particularly, the invention involves a computer implemented, interactive tutorial system providing onlin e instruction in conjunction with a contemporaneously operating software product to, for example, create such examples or applications and the tutorial system further providing for the creation of such examples or applications in and/or using the product.