SYSTEM AND METHOD FOR COMPACT MODELING ON TARGET BASE

    公开(公告)号:JP2003208456A

    公开(公告)日:2003-07-25

    申请号:JP2002365608

    申请日:2002-12-17

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a method and structure for a computer model for a device having a performance parameter. SOLUTION: A first bounded range and a second bounded range are included in the performance parameter. The first bounded range has performance parameter fluctuation within a single production process, and the second bounded range has performance parameter fluctuation in different device design. COPYRIGHT: (C)2003,JPO

    CAPACITOR AND FORMING METHOD THEREOF

    公开(公告)号:JP2001223340A

    公开(公告)日:2001-08-17

    申请号:JP2001014867

    申请日:2001-01-23

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide an interconnecting level capacitor structure and a forming method thereof. SOLUTION: The capacitor structure comprises a first insulating layer disposed on an interconnecting level surface of an integrated circuit, first and second conductors which are formed in the first insulating layer and are isolated by a trench delimited by the first insulating layer, a first conductive barrier layer which is disposed on the first and second conductors and connects the first and second conductors, a second insulting layer disposed on the first conductive barrier layer, a second conductive barrier layer disposed on the second insulating layer, and a third conductor which is disposed in the trench and on the second conductive barrier layer. A capacitance is increased by using regions on a top surface, a bottom surface, and a side surface of the capacitor structure. It is possible to obtain an on-cap decoupling capacitor having a larger size without sacrificing a precious silicon space.

    METHOD FOR ADDING DECOUPLING CAPACITANCE DURING DESIGN OF INTEGRATED CIRCUIT

    公开(公告)号:JP2002288253A

    公开(公告)日:2002-10-04

    申请号:JP2002004163

    申请日:2002-01-11

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a method for adding decoupling capacitance which is installed within an integrated circuit between two-dimensional design stages of the integrated circuit. SOLUTION: In the method for adding decoupling capacitance in the integrated circuit design, a step for forming a two-dimensional plan for the integrated circuit provided with relative positions of a multiple number of functional units, a step for superposing a power grid over the two-dimensional plan, a step for dividing the two dimensional plan and the power grid into a multiple number of ranges and for determining support decoupling capacitance value necessary for supporting the voltage of the power grid for each region, a step for determining a specific capacitance value, a step to determine a necessary decoupling capacitance value, based on the support decoupling capacitance value and the specific capacitance value, a step for determining a decoupling condenser region for the necessary decoupling condenser capacitance value and a step for correcting a circuit area within the region, based on the decoupling condenser region are contained.

    CAPACITOR STRUCTURE AND ITS MANUFACTURING METHOD

    公开(公告)号:JP2001313373A

    公开(公告)日:2001-11-09

    申请号:JP2001098235

    申请日:2001-03-30

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a metal capacitor installed on a chip. SOLUTION: Capacitors (60, 126) manufactured on a semiconductor chip have strap/contacts (41A, 119A), which mutually connect bottom plates (41B, 111A) of a capacitor to a chip circuit. In one version, an extension part of a material, constituting a bottom plate of a capacitor forms a strap contact. In the other version, a capacitor (185) comprises a folded bottom plate, which uses an available space and therefore increases its capacitance, a dielectric layer and a top plate. By means of a plurality of manufacturing methods, manufacturing of these capacitors of various versions can be incorporated in a standard dual or single-damascene manufacturing process, including a copper damascene process.

Patent Agency Ranking