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    INTERCONNECTION FOR ACCOMODATING THERMAL EXPANSION FOR LOW ELASTIC MODULUS DIELECTRICS
    3.
    发明申请
    INTERCONNECTION FOR ACCOMODATING THERMAL EXPANSION FOR LOW ELASTIC MODULUS DIELECTRICS 审中-公开
    用于低温弹性模拟电容的热膨胀的互连

    公开(公告)号：WO0201632A3

    公开(公告)日：2003-10-23

    申请号：PCT/US0120354

    申请日：2001-06-27

    Applicant: INFINEON TECHNOLOGIES AG ,  IBM

    Inventor： MATUSIEWICZ GERALD ,  BRASE GABRIELA

    IPC: H01L23/12 ,  H01L23/528 ,  H01L23/522 ,  H01L23/31

    CPC classification number: H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: Damage to interconnect structures including vias and/or device interconnects through insulators having a low modulus of elasticity between materials having different coefficients of thermal expansion (CTEs) by providing bends or jogs in an interconnect which limit the axial length of the interconnect adjacent the via or device contact in accordance with the difference in CTEs. The interconnect thus limits the development of shear forces and serves to relieve them by flexure of the interconnect across portions of the narrow width of the interconnect; preventing concentration of shear forces near the via or device contact. Implementation as a design rule based on limitation of length of a straight segment of an interconnect trace is preferred.

    Abstract translation: 通过在互连中提供弯曲或点动来限制邻近通孔的互连的轴向长度，从而损坏互连结构，包括通孔和/或器件互连通过具有不同热膨胀系数（CTE）的材料之间具有低弹性模量的绝缘体，或 设备接触符合CTE的不同。 因此，互连限制了剪切力的发展，并且用于通过互连件在互连的窄宽度的部分上的挠曲来缓解它们; 防止通孔或器件接触附近的剪切力集中。 作为基于互连迹线的直线段的长度的限制的设计规则的实现是优选的。

    STRUCTURE AND PROGRAMMING OF LASER FUSE
    4.
    发明申请
    STRUCTURE AND PROGRAMMING OF LASER FUSE 审中-公开
    激光熔丝的结构与编程

    公开(公告)号：WO2005048304A3

    公开(公告)日：2005-07-28

    申请号：PCT/US2004036660

    申请日：2004-11-04

    Applicant: IBM ,  BADAMI DINESH A ,  LEE TOM C ,  LI BAOZHEN ,  MATUSIEWICZ GERALD ,  MOTSIFF WILLIAM T ,  MUZZY CHRISTOPHER D ,  WATSON KIMBALL M ,  WYNNE JEAN E

    Inventor： BADAMI DINESH A ,  LEE TOM C ,  LI BAOZHEN ,  MATUSIEWICZ GERALD ,  MOTSIFF WILLIAM T ,  MUZZY CHRISTOPHER D ,  WATSON KIMBALL M ,  WYNNE JEAN E

    IPC: H01L23/525 ,  H01L27/10 ,  H01L23/58 ,  H01L29/00

    CPC classification number: H01L23/5258 ,  H01L23/525 ,  H01L23/5254 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A method and structure for fabricating a laser fuse and a method for programming the laser fuse. The laser fuse includes a first dielectric layer having two vias filled with a first self-passivated electrically conducting material. A fuse link is on top of the first dielectric layer. The fuse link electrically connects the two vias and includes a second material having a characteristic of changing its electrical resistance after being exposed to a laser beam. Two mesas are over the fuse link and directly over the two vias. The two mesas each include a third self-passivated electrically conducting material. The laser fuse is programmed by directing a laser beam to the fuse link. The laser beam is controlled such that, in response to the impact of the laser beam upon the fuse link, the electrical resistance of the fuse link changes but the fuse link is not blown off. Such electrical resistance change is sensed and converted to digital signal.

    Abstract translation: 用于制造激光熔丝的方法和结构以及用于编程激光熔丝的方法。 激光熔丝包括具有填充有第一自钝化导电材料的两个通孔的第一介电层。 熔丝连接在第一电介质层的顶部。 熔断体将两个通孔电连接并且包括具有在暴露于激光束之后改变其电阻的特性的第二材料。 两个台面位于熔丝链上方，直接穿过两个通孔。 两个台面各自包括第三自钝化导电材料。 激光熔丝通过将激光束引导到熔丝链来编程。 控制激光束，使得响应于激光束对熔丝链的影响，熔丝链的电阻改变，但熔丝链不会被吹掉。 这种电阻变化被检测并转换成数字信号。

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