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公开(公告)号：DE112011101378T8
公开(公告)日：2013-05-08
申请号：DE112011101378
申请日：2011-06-10
Applicant: IBM
Inventor： CHAN KEVIN K , DUBE ABHISHEK , HOLT JUDSON R , JOHNSON JEFFREY B , LI JINGHONG , ZHU ZHENGMAO , PARK DAE-GUY
IPC: H01L29/78 , H01L21/336
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