Phase change memory using multiple stacks of PCM materials

    公开(公告)号:GB2608308A

    公开(公告)日:2022-12-28

    申请号:GB202213056

    申请日:2021-01-26

    Applicant: IBM

    Abstract: A method is presented for improved linearity of a phase change memory (PCM) cell structure. The method includes forming a bottom electrode (12) over a substrate (10), constructing a PCM stack (20) including a plurality of PCM layers each having a different crystallization temperature over the bottom electrode (12), and forming a top electrode (32) over the PCM stack (20). The crystallization temperature varies in an ascending order from the bottom electrode (12) to the top electrode (32).

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