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公开(公告)号：DE19840031C2
公开(公告)日：2002-09-19
申请号：DE19840031
申请日：1998-09-02
Applicant: INFINEON TECHNOLOGIES AG
Inventor： VIETZKE DIRK , STECHER MATTHIAS , MOSIG KARSTEN , PERI HERMANN , SCHWETLICK WERNER , MAIR ANDREAS , KOTZ DIETMAR , KROTSCHECK THOMAS , GRILZ REINHOLD
IPC: H01L21/761 , H01L29/10 , H01L29/78
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