公开(公告)号：DE60311125T2

公开(公告)日：2007-10-25

申请号：DE60311125

申请日：2003-07-11

Applicant: INTEL CORP

Inventor： MA QING ,  SHIM DONG

IPC: B81B3/00 ,  H03H9/05 ,  H03H9/02 ,  H03H9/25

Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

公开(公告)号：AU2003256550A1

公开(公告)日：2004-02-02

申请号：AU2003256550

申请日：2003-07-11

Applicant: INTEL CORP A DELAWARE CORP A D

Inventor： MA QING ,  SHIM DONG

IPC: B81B3/00 ,  H03H9/02 ,  H03H9/05 ,  H03H9/25

Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

公开(公告)号：DE60311125D1

公开(公告)日：2007-02-22

申请号：DE60311125

申请日：2003-07-11

Applicant: INTEL CORP

Inventor： MA QING ,  SHIM DONG

IPC: B81B3/00 ,  H03H9/05 ,  H03H9/02 ,  H03H9/25

Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

公开(公告)号：DE602005012385D1

公开(公告)日：2009-03-05

申请号：DE602005012385

申请日：2005-04-13

Applicant: INTEL CORP

Inventor： MA QING ,  WANG LI-PENG ,  SHIM DONG ,  RAO VALLURI

IPC: H03H3/04 ,  H01L41/08 ,  H03H9/205

Abstract: Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.

公开(公告)号：AT421191T

公开(公告)日：2009-01-15

申请号：AT05737419

申请日：2005-04-13

Applicant: INTEL CORP

Inventor： MA QING ,  WANG LI-PENG ,  SHIM DONG ,  RAO VALLURI

IPC: H03H3/04 ,  H01L41/08 ,  H03H9/205

Abstract: Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.