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公开(公告)号:AU2003234794A1
公开(公告)日:2003-11-11
申请号:AU2003234794
申请日:2003-05-12
Applicant: JSR CORP
Inventor: HANAMURA MASAAKI , YOKOYAMA YASUAKI , BESSHO NOBUO
IPC: B24B37/04 , B24B45/00 , C09J11/00 , C09J201/00 , C09J5/00 , C09J7/00 , H01L21/304 , H01L21/301
Abstract: The present invention relates to a method of temporarily and firmly fixing two solids to each other and to a composition used in the method, which is a method of temporarily fixing, comprising temporarily fixing the two solids to each other with a liquid crystal compound or a composition comprising the liquid crystal compound. This method is used for a method of temporarily fixing a pad for chemical mechanical polishing, for example, to polish a wafer for a semiconductor device fixed on a surface of a base plate, when one solid is a pad for chemical mechanical polishing of a wafer for a semiconductor device and the other is a base plate to fix the pad.
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公开(公告)号:DE602004027183D1
公开(公告)日:2010-07-01
申请号:DE602004027183
申请日:2004-03-25
Inventor: YOKOYAMA YASUAKI , YONEKURA ISAMU , SATOH TAKASHI , WAKASAKI TAMAKI , TAKEUCHI YASUMASA , ENDO MASAYUKI
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3.
公开(公告)号:AU2003292754A1
公开(公告)日:2004-08-13
申请号:AU2003292754
申请日:2003-12-24
Applicant: JSR CORP
Inventor: MATSUKI YASUO , YOKOYAMA YASUAKI
Abstract: A composition for forming a silicon.aluminum film, containing a silicon compound and an aluminum compound. The silicon.aluminum film is obtained by forming a coating film of the above composition and treating it with heat and/or light.
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公开(公告)号:AU9593601A
公开(公告)日:2002-04-29
申请号:AU9593601
申请日:2001-10-16
Applicant: JSR CORP
Inventor: SHIHO HIROSHI , KATO HITOSHI , MATSUKI YASUO , EBATA SATOSHI , MARUYAMA YOICHIRO , YOKOYAMA YASUAKI
IPC: C07F15/00 , C07C13/263 , C07C49/92 , C07C69/72 , C07C53/02 , C07C53/08 , C07C53/126 , C07C55/06 , C23C18/08
Abstract: A composition capable of forming a metal ruthenium film and a ruthenium oxide film by a simple application/baking process, a process for forming a metal ruthenium film and a ruthenium oxide film from the composition, a metal ruthenium film and a ruthenium oxide film formed by the process, and electrodes formed of the films.A solution composition comprising a specific ruthenium complex. The coating film of this solution composition is heated in an atmosphere containing no oxygen or an atmosphere containing oxygen to form a metal ruthenium film or a ruthenium oxide film, respectively, and electrodes formed of the films.
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公开(公告)号:DE69327189T2
公开(公告)日:2000-06-21
申请号:DE69327189
申请日:1993-03-25
Applicant: JSR CORP
Inventor: TAJIMA YUSUKE , BESSHO NOBUO , TAKINISHI FUMITAKA , YOKOYAMA YASUAKI , MASUKO HIDEAKI
Abstract: The present invention provides a pigment-dispersed color-filter composition containing a binder polymer such as an alkali-soluble block copolymer; a radiation-sensitive compound; and a pigment. The pigment-dispersed color-filter composition which further contains an organic medium, or an organic medium and a carboxylic acid is also provided.
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6.
公开(公告)号:AU2003302411A1
公开(公告)日:2004-06-18
申请号:AU2003302411
申请日:2003-11-13
Applicant: JSR CORP
Inventor: YASUDA KYOUYU , YOKOYAMA YASUAKI , BESSHO NOBUO
Abstract: It is an object of the present invention to provide a novel photo-curing composition which can be cured by light of a wide wavelength region including ultraviolet light or visible light, has such high sensitivity that it can be sufficiently cured by exposure to a small amount of light, can favorably form a fine pattern when used as a resist and provides a cured product having excellent heat resistance and insulating properties, and a negative photoresist composition using the photo-curing composition. It is another object of the present invention to provide a process for highly accurately and easily producing a polyimide thin film used for a medical instrument, and a medical instrument having the polyimide thin film. The photo-curing composition of the present invention comprises (A) a carbon cluster and/or its derivative, having a photosensitizing function, (B) a compound having plural heterocyclic rings in a molecule, and if necessary, (C) a photo-insensitive resin.
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公开(公告)号:DE69325480T2
公开(公告)日:2000-03-30
申请号:DE69325480
申请日:1993-07-23
Applicant: JSR CORP
Inventor: SANO KIMIYASU , ENDO MASAYUKI , SHIMADA ATSUFUMI , YOKOYAMA YASUAKI , BESSHO NOBUO
IPC: C08G81/00 , C08F2/50 , C08F220/04 , C08F220/32 , C08F222/04 , H05K3/28 , C08F291/10
Abstract: An epoxy group-containing thermosetting resin composition comprising (A) a copolymer obtained from (a) at least one member selected from an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, (b) an epoxy group-containing unsaturated compound, (c) a monoolefin unsaturated compound, and (d) a conjugated diolefin unsaturated compound, and (B) an organic solvent for dissolving the above copolymer. There is also provided epoxy-group containing radiation sensitive resin composition which contains a component (A) obtained from (a), (b) and (c) and optionally (d), (C) a polymerizable compound having at least one ethylenically unsaturated double bond, and (D) a photopolymerization initiator. These epoxy-group containing thermosetting resin compositions are excellent in storage stability.
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公开(公告)号:DE69327189D1
公开(公告)日:2000-01-13
申请号:DE69327189
申请日:1993-03-25
Applicant: JSR CORP
Inventor: TAJIMA YUSUKE , BESSHO NOBUO , TAKINISHI FUMITAKA , YOKOYAMA YASUAKI , MASUKO HIDEAKI
Abstract: The present invention provides a pigment-dispersed color-filter composition containing a binder polymer such as an alkali-soluble block copolymer; a radiation-sensitive compound; and a pigment. The pigment-dispersed color-filter composition which further contains an organic medium, or an organic medium and a carboxylic acid is also provided.
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公开(公告)号:EP1522567A4
公开(公告)日:2005-11-16
申请号:EP03728056
申请日:2003-05-12
Applicant: JSR CORP
Inventor: YOKOYAMA YASUAKI , BESSHO NOBUO , HANAMURA MASAAKI
IPC: B24B37/04 , B24B45/00 , C09J11/00 , C09J5/00 , C09J7/00 , C09J201/00 , H01L21/301 , H01L21/304
CPC classification number: B24B37/042 , B24B37/30 , H01L21/6835 , H01L2221/68327 , H01L2221/6834 , Y10T428/1059
Abstract: The present invention relates to a method of temporarily and firmly fixing two solids to each other and to a composition used in the method, which is a method of temporarily fixing, comprising temporarily fixing the two solids to each other with a liquid crystal compound or a composition comprising the liquid crystal compound. This method is used for a method of temporarily fixing a pad for chemical mechanical polishing, for example, to polish a wafer for a semiconductor device fixed on a surface of a base plate, when one solid is a pad for chemical mechanical polishing of a wafer for a semiconductor device and the other is a base plate to fix the pad.
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公开(公告)号:JP2004303783A
公开(公告)日:2004-10-28
申请号:JP2003091789
申请日:2003-03-28
Applicant: Jsr Corp , Jsr株式会社 , Kokusai Kiban Zairyo Kenkyusho:Kk , Sharp Corp , シャープ株式会社 , 株式会社国際基盤材料研究所
Inventor: YOKOYAMA YASUAKI , YONEKURA ISAMU , SATO TAKASHI , WAKASAKI KANKI , ENDO MASAYUKI , TAKEUCHI YASUMASA
CPC classification number: H01L21/288 , C23C18/02 , C23C18/06 , C23C18/08 , C23C18/14 , Y10T428/24917
Abstract: PROBLEM TO BE SOLVED: To provide a method for forming a film using a conductive film forming composition in which wiring or an electrode used suitably in an electronic device can be formed inexpensively. SOLUTION: In the method for forming wiring or an electrode, (A) a complex of an amine compound and a hydrogenated aluminium compound, (B) a compound or a complex containing a titanium compound, and (C) a composition containing metal particles are applied to a substrate and then subjected to heat and/or optical treatment. COPYRIGHT: (C)2005,JPO&NCIPI
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