公开(公告)号：WO2012018674A3

公开(公告)日：2012-05-18

申请号：PCT/US2011045784

申请日：2011-07-28

Applicant: KLA TENCOR CORP ,  MANASSEN AMMON ,  KANDEL DANIEL ,  BARUCH MOSHE ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  COHEN GUY ,  ROTEM EFRAIM ,  BACHAR OHAD ,  NEGRI DARIA ,  SAPIENS NOAM

Inventor： MANASSEN AMMON ,  KANDEL DANIEL ,  BARUCH MOSHE ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  COHEN GUY ,  ROTEM EFRAIM ,  BACHAR OHAD ,  NEGRI DARIA ,  SAPIENS NOAM

IPC: H01L21/027

CPC classification number: G03F7/70633 ,  G01N21/55 ,  G03F7/70616

Abstract: The present invention includes an illumination source, at least one illumination symmetrization module (ISM) configured to symmetrize at least a portion of light emanating from the illumination source, a first beam splitter configured to direct a first portion of light processed by the ISM along an object path to a surface of one or more specimens and a second portion of light processed by the ISM along a reference path, and a detector disposed along a primary optical axis, wherein the detector is configured to collect a portion of light reflected from the surface of the one or more specimens.

Abstract translation: 本发明包括照明源，至少一个照明对称化模块（ISM），被配置为对来自照明源发出的光的至少一部分进行对称;第一分束器，被配置为将由ISM处理的光的第一部分沿着 一个或多个样本的表面的物体路径和沿着基准路径由ISM处理的光的第二部分以及沿着主光轴布置的检测器，其中检测器被配置为收集从表面反射的光的一部分 的一个或多个标本。

公开(公告)号：EP2745313A4

公开(公告)日：2014-12-24

申请号：EP12823553

申请日：2012-07-30

Applicant: KLA TENCOR CORP

Inventor： MANASSEN AMNON ,  KANDEL DANIEL ,  BARUCH MOSHE ,  LEVINSKI VLADIMIR ,  SAPIENS NOAM ,  SELIGSON JOEL L ,  HILL ANDY ,  BACHAR OHAD ,  NEGRI DARIA ,  ZAHARAN OFER

IPC: H01L21/66 ,  G03F7/20

CPC classification number: G03F7/70633