公开(公告)号：EP2890930A4

公开(公告)日：2016-03-09

申请号：EP13832549

申请日：2013-08-28

Applicant: KLA TENCOR CORP

Inventor： WANG JINCHENG ,  CHIMMALGI ANANT ,  PATIL RAJEEV ,  KIM ERIK ,  BRUNNER RUDOLF ,  GIANG QUANG ,  WILSON LAUREN ,  GROSS KENNETH P ,  BEZEL ILYA ,  LASFARGUES CEDRIC ,  SCOTT DANIEL ,  VORA YOUNUS ,  DERSTINE MATTHEW

IPC: F21V29/503 ,  F21V19/00 ,  F21V29/60

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 一种流体输入歧管喷射配给流体围绕灯泡的主体冷却到低于阈值的灯泡。 注入的流体因此沿所述灯泡的表面更均匀地分布热量，以减少热应力。 所述流体输入歧管可以包括一个或多个翼型件以沿着灯泡的表面的基本层流流动，或者它可包括定向成产生基本上层流流动的流体喷射喷嘴的复数。 的输出部分可以被配置成通过允许注入的流体，以吸收来自灯泡热后容易逃脱或通过施加负压，以积极绘制注入的流体沿着灯泡和远离的表面以便沿着灯泡的表面的流体流动。