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    DISCRETE POLARIZATION SCATTEROMETRY
    3.
    发明申请
    DISCRETE POLARIZATION SCATTEROMETRY 审中-公开
    离散极化分析

    公开(公告)号：WO2011159725A3

    公开(公告)日：2012-04-26

    申请号：PCT/US2011040389

    申请日：2011-06-14

    Applicant: KLA TENCOR CORP ,  HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

    Inventor： HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

    IPC: H01L21/027 ,  H01L21/66

    CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

    Abstract: Systems and methods for discrete polarization scatterometry are provided. One embodiment relates to an optical subsystem of a scatterometer. The optical subsystem includes one or more light sources configured to produce light having different polarizations. The optical subsystem also includes a polarizing beam splitter configured to separate the light into two different light beams having orthogonal and mutually exclusive polarizations. The optical subsystem further includes one or more second optical elements configured to control which one of the two different light beams illuminates the wafer during measurements. The optical subsystem also includes a detection subsystem configured to separately detect two different scattered light beams resulting from illumination of the wafer. The two different scattered light beams have orthogonal and mutually exclusive polarizations. All optical surfaces of the optical subsystem used for the measurements are stationary during the measurements.

    Abstract translation: 提供了离散极化散射法的系统和方法。 一个实施例涉及一种散射仪的光学子系统。 光学子系统包括被配置为产生具有不同偏振的光的一个或多个光源。 光学子系统还包括偏振分束器，其被配置为将光分离成具有正交和相互排斥的极化的两个不同光束。 光学子系统还包括一个或多个第二光学元件，其被配置为在测量期间控制两个不同光束中的哪一个照射晶片。 光学子系统还包括被配置为分别检测由晶片的照明产生的两个不同散射光束的检测子系统。 两个不同的散射光束具有正交和相互排斥的偏振。 用于测量的光学子系统的所有光学表面在测量期间是静止的。

    ILLUMINATION CONTROL
    5.
    发明申请
    ILLUMINATION CONTROL 审中-公开
    照明控制

    公开(公告)号：WO2013002988A3

    公开(公告)日：2013-07-11

    申请号：PCT/US2012041273

    申请日：2012-06-07

    Applicant: KLA TENCOR CORP ,  MANASSEN AMNON ,  SELIGSON JOEL ,  SAPIENS NOAM

    Inventor： MANASSEN AMNON ,  SELIGSON JOEL ,  SAPIENS NOAM

    IPC: H01L21/027

    CPC classification number: G01J1/4257 ,  G02B21/0016 ,  G02B21/082 ,  G02B21/365 ,  G02B26/0833 ,  G03F7/70633

    Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.

    Abstract translation: 光学系统可以包括物镜，照明源，具有被配置为将照明引导到物镜上的照明光学器件的照明系统以及分别位于光瞳共轭平面和场共轭平面处的至少两个动态光学阵列装置 照明光学器件。 动态光学阵列装置被配置为控制从照明系统耦合到物镜的照明的一个或多个特性。

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