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公开(公告)号：US09961326B2
公开(公告)日：2018-05-01
申请号：US13728014
申请日：2012-12-27
Applicant: KLA-Tencor Corporation
Inventor： Scott Young , Andy Hill
CPC classification number: H04N13/239 , G02B21/22 , G02B21/364 , G02B27/0075 , G02B27/22
Abstract: The disclosure is directed to providing high resolution stereoscopy with extended depth of focus. Wave front coding in optical paths going to a first detector and at least a second detector may be implemented to affect an intermediate set of images. The intermediate set of images may be filtered (i.e. decoded) to produce a filtered set of images with selected resolution and depth of focus properties. A first filtered image and a second filtered image may be substantially simultaneously presented to respective first and second eyes of an observer to further generate an illusion of enhanced depth (i.e. 3D perception).
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公开(公告)号：US20170200260A1
公开(公告)日：2017-07-13
申请号：US15402169
申请日：2017-01-09
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Scott Young , Mark Roulo , Jing Zhang , Laurent Karsenti , Mohan Mahadevan , Bjorn Brauer
CPC classification number: G06K9/6256 , G06K9/4628 , G06K9/6271 , G06K2209/19 , G06T7/0004 , G06T2207/20081 , G06T2207/20084 , G06T2207/30148
Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.
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公开(公告)号：US11580375B2
公开(公告)日：2023-02-14
申请号：US15394790
申请日：2016-12-29
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Laurent Karsenti , Scott Young , Mohan Mahadevan , Jing Zhang , Brian Duffy , Li He , Huajun Ying , Hung Nien , Sankar Venkataraman
Abstract: Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for training a machine learning based model includes acquiring information for non-nominal instances of specimen(s) on which a process is performed. The machine learning based model is configured for performing simulation(s) for the specimens. The machine learning based model is trained with only information for nominal instances of additional specimen(s). The method also includes re-training the machine learning based model with the information for the non-nominal instances of the specimen(s) thereby performing transfer learning of the information for the non-nominal instances of the specimen(s) to the machine learning based model.
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公开(公告)号：US09165742B1
公开(公告)日：2015-10-20
申请号：US14627940
申请日：2015-02-20
Applicant: KLA-Tencor Corporation
Inventor： Richard Simmons , Douglas Masnaghetti , Mark McCord , Fred E Stanke , Scott Young , Christopher Sears
CPC classification number: H01J37/06 , H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/061
Abstract: Embodiments of the present disclosure are directed to an electron beam imaging/inspection apparatus having an electron source device to direct flood electrons on a sample immediately before image acquisition or inspection. The apparatus comprises a first device configured to charge a sample in a first mode, wherein the first device includes an electron source configured to provide a flood beam of charged particles to a first area of the sample. The apparatus also comprises a second device configured to generate a primary beam of electrons and characterize an interaction between the primary beam and a second area of the sample within the first area in a second mode. The apparatus is configured to switch from the first mode to the second mode less than 1 second.
Abstract translation: 本公开的实施例涉及一种具有电子源装置的电子束成像/检查装置，用于在图像采集或检查之前立即将样品引导到样品上。 该装置包括被配置为以第一模式对样本进行充电的第一装置，其中第一装置包括电子源，该电子源被配置为将带电粒子的泛光束提供到样品的第一区域。 该装置还包括被配置为产生主电子束的第二装置，并且在第二模式中表征主光束和第一区域内的样品的第二区域之间的相互作用。 该装置被配置为在第一模式下切换到第二模式小于1秒。
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Patent Agency Ranking
公开(公告)号：US10360477B2
公开(公告)日：2019-07-23
申请号：US15402169
申请日：2017-01-09
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Scott Young , Mark Roulo , Jing Zhang , Laurent Karsenti , Mohan Mahadevan , Bjorn Brauer
Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.
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公开(公告)号：US09916965B2
公开(公告)日：2018-03-13
申请号：US15394792
申请日：2016-12-29
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Grace Hsiu-Ling Chen , Keith Wells , Wayne McMillan , Jing Zhang , Scott Young , Brian Duffy
CPC classification number: H01J37/222 , G01N21/9501 , G01N23/2251 , G01N2201/12 , G01N2223/304 , G01N2223/401 , G01N2223/418 , G01N2223/6116 , G01N2223/646 , G03F7/7065 , H01J37/06 , H01J37/226 , H01J37/28 , H01J2237/24475 , H01J2237/24495 , H01J2237/2817 , H01L22/20
Abstract: Hybrid inspectors are provided. One system includes computer subsystem(s) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.
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公开(公告)号：US20170194126A1
公开(公告)日：2017-07-06
申请号：US15394792
申请日：2016-12-29
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Grace Hsiu-Ling Chen , Keith Wells , Wayne McMillan , Jing Zhang , Scott Young , Brian Duffy
IPC: H01J37/22 , G01N23/225 , G01N21/95 , H01J37/06 , H01J37/28
CPC classification number: H01J37/222 , G01N21/9501 , G01N23/2251 , G01N2201/12 , G01N2223/304 , G01N2223/401 , G01N2223/418 , G01N2223/6116 , G01N2223/646 , G03F7/7065 , H01J37/06 , H01J37/226 , H01J37/28 , H01J2237/24475 , H01J2237/24495 , H01J2237/2817 , H01L22/20
Abstract: Hybrid inspectors are provided. One system includes computer subsystems) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.
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公开(公告)号：US20170193400A1
公开(公告)日：2017-07-06
申请号：US15394790
申请日：2016-12-29
Applicant: KLA-Tencor Corporation
Inventor： Kris Bhaskar , Laurent Karsenti , Scott Young , Mohan Mahadevan , Jing Zhang , Brian Duffy , Li He , Huajun Ying , Hung Nien , Sankar Venkataraman
Abstract: Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for training a machine learning based model includes acquiring information for non-nominal instances of specimen(s) on which a process is performed. The machine learning based model is configured for performing simulation(s) for the specimens. The machine learning based model is trained with only information for nominal instances of additional specimen(s). The method also includes re-training the machine learning based model with the information for the non-nominal instances of the specimen(s) thereby performing transfer learning of the information for the non-nominal instances of the specimen(s) to the machine learning based model.
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公开(公告)号：US20130176402A1
公开(公告)日：2013-07-11
申请号：US13728014
申请日：2012-12-27
Applicant: KLA-Tencor Corporation
Inventor： Scott Young , Andy Hill
IPC: H04N13/02
CPC classification number: H04N13/239 , G02B21/22 , G02B21/364 , G02B27/0075 , G02B27/22
Abstract: The disclosure is directed to providing high resolution stereoscopy with extended depth of focus. Wave front coding in optical paths going to a first detector and at least a second detector may be implemented to affect an intermediate set of images. The intermediate set of images may be filtered (i.e. decoded) to produce a filtered set of images with selected resolution and depth of focus properties. A first filtered image and a second filtered image may be substantially simultaneously presented to respective first and second eyes of an observer to further generate an illusion of enhanced depth (i.e. 3D perception).
Abstract translation: 本公开旨在提供具有延长的焦点深度的高分辨率立体镜。 可以实现到第一检测器和至少第二检测器的光路中的波前编码以影响中间图像组。 可以对中间图像组进行滤波（即解码）以产生具有所选分辨率和焦深特性的滤波图像组。 第一滤波图像和第二滤波图像可以基本上同时呈现给观察者的相应第一和第二眼睛，以进一步产生增强深度（即3D感知）的错觉。
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