ION SOURCE, AND MASS ANALYSIS APPARATUS INCLUDING SAME
    1.
    发明申请
    ION SOURCE, AND MASS ANALYSIS APPARATUS INCLUDING SAME 有权
    离子源和大量分析仪器,包括相同的

    公开(公告)号:US20160225600A1

    公开(公告)日:2016-08-04

    申请号:US14442283

    申请日:2013-08-20

    CPC classification number: H01J49/147 H01J49/067 H01J49/16

    Abstract: According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.

    Abstract translation: 根据本发明的一个实施例,离子源包括:阳极管,其中通过一侧流动的气体被离子化并排出到另一侧,并且在其外周上形成狭缝; 向狭缝发射热电子以使气体电离的灯丝; 以及布置在灯丝和狭缝之间并具有至少一个热电子可以通过的孔的扩散防止体,以减少流入阳极管的热电子的扩散。

    MONOCHROMATOR AND CHARGED PARTICLE APPARATUS INCLUDING THE SAME
    3.
    发明申请
    MONOCHROMATOR AND CHARGED PARTICLE APPARATUS INCLUDING THE SAME 有权
    单色器和充电粒子装置,包括它们

    公开(公告)号:US20150371811A1

    公开(公告)日:2015-12-24

    申请号:US14696569

    申请日:2015-04-27

    Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

    Abstract translation: 本文公开了一种单色仪和包括该单色仪的带电粒子束装置。 单色仪可以包括第一静电透镜,其被配置为具有由入射在第一静电透镜上的发射体放电的带电粒子束,折射带电粒子束的射线,并且包括多个电极和与该第一静电透镜间隔开的第二静电透镜 第一静电透镜以特定间隔被配置为具有与第一静电透镜的中心轴线相同设置的中心轴,由入射在第二静电透镜上的第一静电透镜输出的带电粒子束折射带电的光线 粒子束,并且包括多个电极。 因此,具有即使在通过单色仪之后,带电粒子束也具有优异的特性的优点。

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