公开(公告)号：AU2002362248A1

公开(公告)日：2003-03-24

申请号：AU2002362248

申请日：2002-07-30

Applicant: MICELL TECHNOLOGIES INC

Inventor： COLE MICHAEL E ,  WORM STEVE L

IPC: H01L21/00 ,  B08B3/02

Abstract: A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.

公开(公告)号：AU7594100A

公开(公告)日：2001-04-30

申请号：AU7594100

申请日：2000-09-20

Applicant: MICELL TECHNOLOGIES INC

Inventor： MCCLAIN JAMES B ,  COLE MICHAEL E ,  BRAINARD DAVID E ,  WORM STEVE L

IPC: B08B7/00 ,  D06F43/00

Abstract: Cleaning apparatus having multiple wash tanks for washing articles in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution are provided. Cleaning apparatus having multiple wash tanks of the present invention may provide improved thermodynamic efficiency by allowing carbon dioxide vapor to be transferred between wash tanks rather than condensed. Cleaning apparatus having multiple wash tanks of the present invention may have a lower capital cost than multiple cleaning systems having single wash tanks. Cleaning apparatus having multiple wash tanks of the present invention include a first wash tank for contacting a first article with liquid carbon dioxide cleaning solution, and a second wash tank for contacting a second article with liquid carbon dioxide cleaning solution. The second wash tank is in fluid communication with the first wash tank. Methods of utilizing such cleaning apparatus are also provided. Coating apparatus having multiple coating tanks and methods of utilizing such coating apparatus are also provided.

公开(公告)号：AU2002317593A1

公开(公告)日：2003-03-24

申请号：AU2002317593

申请日：2002-07-30

Applicant: MICELL TECHNOLOGIES INC

Inventor： COLE MICHAEL E ,  BRAINARD DAVID E ,  DEYOUNG JAMES P ,  WORM STEVE L ,  MCCLAIN JAMES P

IPC: H01L21/027 ,  B08B7/00 ,  B81C1/00 ,  C23G5/00 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

Abstract: An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO2 fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO2 from the process fluid. The distilling system is operative to re-introduce the separated CO2 into the chamber or a further chamber.

公开(公告)号：AU7705800A

公开(公告)日：2001-04-30

申请号：AU7705800

申请日：2000-09-20

Applicant: MICELL TECHNOLOGIES INC ,  JAMES B MCCLAIN

Inventor： MCCLAIN JAMES B ,  BRAINARD DAVID E ,  COLE MICHAEL E ,  WORM STEVE L

IPC: D06F43/00 ,  D06F43/08

Abstract: A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.

公开(公告)号：AU1154602A

公开(公告)日：2002-04-22

申请号：AU1154602

申请日：2001-10-10

Applicant: MICELL TECHNOLOGIES INC

Inventor： WORM STEVE L ,  DEYOUNG JAMES P ,  MCCLAIN JAMES B ,  BRAINARD DAVID E

IPC: A23L27/10 ,  D06F43/00 ,  D06L1/08 ,  F17C1/00 ,  F17C5/00 ,  F17C7/00

Abstract: A method of utilizing a divided pressure vessel in a processing system employing a carbon dioxide based solvent includes transferring a first carbon dioxide based treating solution from a first liquid chamber in a divided pressure vessel having a plurality of liquid chambers to a processing vessel, returning the first treating solution from the processing vessel to the divided pressure vessel, transferring a second carbon dioxide based treating solution having a composition different from the first treating solution from a second liquid chamber in the divided pressure vessel to a processing vessel, and returning the second treating solution from the processing vessel to the divided pressure vessel. A divided pressure vessel may allow multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel while maintaining the different chemical compositions of the multiple solvent baths. Thus, such divided pressure vessels may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.

公开(公告)号：CA2385673A1

公开(公告)日：2001-04-05

申请号：CA2385673

申请日：2000-09-20

Applicant: MICELL TECHNOLOGIES INC

Inventor： COLE MICHAEL E ,  BRAINARD DAVID E ,  MCCLAIN JAMES B ,  WORM STEVE L

IPC: D06F43/00 ,  D06F43/08

Abstract: A method for conserving carbon dioxide vapor in a carbon dioxide dry cleanin g system employing a liquid carbon dioxide cleaning solution to clean articles , where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also b e employed for conserving carbon dioxide vapor in a carbon dioxide dry cleanin g system employing a liquid carbon dioxide cleaning solution to clean articles , where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxid e in a collecting tank are also provided.

公开(公告)号：WO0231253A3

公开(公告)日：2002-08-01

申请号：PCT/US0131507

申请日：2001-10-10

Applicant: MICELL TECHNOLOGIES INC ,  WORM STEVE L ,  DEYOUNG JAMES P ,  MCCLAIN JAMES B ,  BRAINARD DAVID E

Inventor： WORM STEVE L ,  DEYOUNG JAMES P ,  MCCLAIN JAMES B ,  BRAINARD DAVID E

IPC: A23L27/10 ,  D06F43/00 ,  D06L1/08 ,  F17C1/00 ,  F17C5/00 ,  F17C7/00

CPC classification number: D06L1/08 ,  A23L27/11 ,  D06F43/00 ,  D06F43/081 ,  F17C1/00 ,  F17C1/005 ,  F17C5/00 ,  F17C7/00 ,  F17C2201/0109 ,  F17C2201/0171 ,  F17C2201/032 ,  F17C2201/035 ,  F17C2201/056 ,  F17C2203/0643 ,  F17C2205/0347 ,  F17C2205/0397 ,  F17C2221/013 ,  F17C2221/014 ,  F17C2221/017 ,  F17C2221/033 ,  F17C2221/035 ,  F17C2227/0157 ,  F17C2227/0383 ,  F17C2250/0408 ,  F17C2265/012 ,  F17C2270/02 ,  F17C2270/0518

Abstract: Processing systems employing one or more divided pressure vessels (653) are described. These systems may allow for multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel (653) while maintaining the different chemical compositions of the multiple solvent baths. Thus, such systems employing one or more divided pressure vessels (653) may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.

Abstract translation: 描述了采用一个或多个分压的压力容器（653）的处理系统。 这些系统可以允许具有不同化学组成的多个溶剂浴在单个压力容器（653）中储存和/或加工，同时保持多个溶剂浴的不同化学组成。 因此，采用一个或多个分压的压力容器（653）的这种系统可以提供具有多个溶剂浴的具有二氧化碳的系统的改进的操作效率，同时减少可能与这种系统相关联的资本成本。

公开(公告)号：WO03023830A3

公开(公告)日：2003-08-28

申请号：PCT/US0224061

申请日：2002-07-30

Applicant: MICELL TECHNOLOGIES INC ,  WORM STEVE L ,  COLE MICHAEL E

Inventor： WORM STEVE L ,  COLE MICHAEL E

IPC: H01L21/00 ,  B08B3/02

CPC classification number: H01L21/67051

Abstract: A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.

Abstract translation: 用于与衬底和工艺流体流一起使用的处理室组件包括容器和喷射构件。 容器限定一个室。 喷雾构件包括形成在其中的至少一个喷雾口，其适于将工艺流体流分配到腔室中的基底上。 喷雾构件可操作以响应于过程流体通过至少一个喷雾口流出喷射构件而相对于容器围绕旋转轴线旋转。

公开(公告)号：WO03023829A2

公开(公告)日：2003-03-20

申请号：PCT/US0224026

申请日：2002-07-30

Applicant: MICELL TECHNOLOGIES INC ,  WORM STEVE L ,  MCCLAIN JAMES P

Inventor： WORM STEVE L ,  MCCLAIN JAMES P

IPC: H01L21/00

CPC classification number: H01L21/67126

Abstract: A pressure chamber assembly for retaining a fluid includes first and second relatively separable casings defining an enclosed chamber and a fluid leak path extending from the chamber to an exterior region. An inner seal member is disposed along the leak path to restrict flow of fluid from the chamber to the exterior region. An outer seal member is disposed along the leak path between the inner seal member and the exterior region to restrict flow of fluid from the chamber to the exterior region. The inner seal member is a cup seal.

Abstract translation: 用于保持流体的压力室组件包括限定封闭室的第一和第二相对可分离壳体以及从室延伸到外部区域的流体泄漏路径。 内部密封构件沿着泄漏路径设置以限制流体从腔室到外部区域的流动。 外部密封构件沿内部密封构件与外部区域之间的泄漏路径设置，以限制流体从腔室流向外部区域。 内密封件​​是杯形密封件。