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公开(公告)号：AU7594100A
公开(公告)日：2001-04-30
申请号：AU7594100
申请日：2000-09-20
Applicant: MICELL TECHNOLOGIES INC
Inventor： MCCLAIN JAMES B , COLE MICHAEL E , BRAINARD DAVID E , WORM STEVE L
Abstract: Cleaning apparatus having multiple wash tanks for washing articles in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution are provided. Cleaning apparatus having multiple wash tanks of the present invention may provide improved thermodynamic efficiency by allowing carbon dioxide vapor to be transferred between wash tanks rather than condensed. Cleaning apparatus having multiple wash tanks of the present invention may have a lower capital cost than multiple cleaning systems having single wash tanks. Cleaning apparatus having multiple wash tanks of the present invention include a first wash tank for contacting a first article with liquid carbon dioxide cleaning solution, and a second wash tank for contacting a second article with liquid carbon dioxide cleaning solution. The second wash tank is in fluid communication with the first wash tank. Methods of utilizing such cleaning apparatus are also provided. Coating apparatus having multiple coating tanks and methods of utilizing such coating apparatus are also provided.
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公开(公告)号：AU2003294557A8
公开(公告)日：2004-08-30
申请号：AU2003294557
申请日：2003-12-02
Applicant: MICELL TECHNOLOGIES INC
Inventor： TAYLOR DOUG , WAGNER MARK I , MCCLAIN JAMES B , GROSS STEPHEN M , BRAINARD DAVID E , DEYOUNG JAMES P
IPC: B05D1/18 , H01L21/00 , H01L21/02 , H01L21/285 , H01L21/288 , B05D1/00
Abstract: A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.
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3.发明专利
公开(公告)号：AU1154602A
公开(公告)日：2002-04-22
申请号：AU1154602
申请日：2001-10-10
Applicant: MICELL TECHNOLOGIES INC
Inventor： WORM STEVE L , DEYOUNG JAMES P , MCCLAIN JAMES B , BRAINARD DAVID E
Abstract: A method of utilizing a divided pressure vessel in a processing system employing a carbon dioxide based solvent includes transferring a first carbon dioxide based treating solution from a first liquid chamber in a divided pressure vessel having a plurality of liquid chambers to a processing vessel, returning the first treating solution from the processing vessel to the divided pressure vessel, transferring a second carbon dioxide based treating solution having a composition different from the first treating solution from a second liquid chamber in the divided pressure vessel to a processing vessel, and returning the second treating solution from the processing vessel to the divided pressure vessel. A divided pressure vessel may allow multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel while maintaining the different chemical compositions of the multiple solvent baths. Thus, such divided pressure vessels may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.
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公开(公告)号：CA2385673A1
公开(公告)日：2001-04-05
申请号：CA2385673
申请日：2000-09-20
Applicant: MICELL TECHNOLOGIES INC
Inventor： COLE MICHAEL E , BRAINARD DAVID E , MCCLAIN JAMES B , WORM STEVE L
Abstract: A method for conserving carbon dioxide vapor in a carbon dioxide dry cleanin g system employing a liquid carbon dioxide cleaning solution to clean articles , where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also b e employed for conserving carbon dioxide vapor in a carbon dioxide dry cleanin g system employing a liquid carbon dioxide cleaning solution to clean articles , where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxid e in a collecting tank are also provided.
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公开(公告)号：AU2003294557A1
公开(公告)日：2004-08-30
申请号：AU2003294557
申请日：2003-12-02
Applicant: MICELL TECHNOLOGIES INC
Inventor： TAYLOR DOUG , WAGNER MARK I , BRAINARD DAVID E , DEYOUNG JAMES P , MCCLAIN JAMES B , GROSS STEPHEN M
IPC: B05D1/18 , H01L21/00 , H01L21/02 , H01L21/285 , H01L21/288
Abstract: A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.
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Patent Agency Ranking
公开(公告)号：AU2002317593A1
公开(公告)日：2003-03-24
申请号：AU2002317593
申请日：2002-07-30
Applicant: MICELL TECHNOLOGIES INC
Inventor： COLE MICHAEL E , BRAINARD DAVID E , DEYOUNG JAMES P , WORM STEVE L , MCCLAIN JAMES P
IPC: H01L21/027 , B08B7/00 , B81C1/00 , C23G5/00 , H01L21/00 , H01L21/304 , H01L21/306
Abstract: An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO2 fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO2 from the process fluid. The distilling system is operative to re-introduce the separated CO2 into the chamber or a further chamber.
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公开(公告)号：AU7705800A
公开(公告)日：2001-04-30
申请号：AU7705800
申请日：2000-09-20
Applicant: MICELL TECHNOLOGIES INC , JAMES B MCCLAIN
Inventor： MCCLAIN JAMES B , BRAINARD DAVID E , COLE MICHAEL E , WORM STEVE L
Abstract: A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
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8.发明申请DEVICE AND PROCESS FOR DRY-CLEANING PROCESS USING CARBON DIOXIDE AND A DIVIDED PRESSURE VESSEL 审中-公开使用二氧化碳和分压压力容器进行干燥清洗工艺的装置和方法
公开(公告)号：WO0231253A3
公开(公告)日：2002-08-01
申请号：PCT/US0131507
申请日：2001-10-10
Applicant: MICELL TECHNOLOGIES INC , WORM STEVE L , DEYOUNG JAMES P , MCCLAIN JAMES B , BRAINARD DAVID E
Inventor： WORM STEVE L , DEYOUNG JAMES P , MCCLAIN JAMES B , BRAINARD DAVID E
CPC classification number: D06L1/08 , A23L27/11 , D06F43/00 , D06F43/081 , F17C1/00 , F17C1/005 , F17C5/00 , F17C7/00 , F17C2201/0109 , F17C2201/0171 , F17C2201/032 , F17C2201/035 , F17C2201/056 , F17C2203/0643 , F17C2205/0347 , F17C2205/0397 , F17C2221/013 , F17C2221/014 , F17C2221/017 , F17C2221/033 , F17C2221/035 , F17C2227/0157 , F17C2227/0383 , F17C2250/0408 , F17C2265/012 , F17C2270/02 , F17C2270/0518
Abstract: Processing systems employing one or more divided pressure vessels (653) are described. These systems may allow for multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel (653) while maintaining the different chemical compositions of the multiple solvent baths. Thus, such systems employing one or more divided pressure vessels (653) may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.
Abstract translation: 描述了采用一个或多个分压的压力容器（653）的处理系统。 这些系统可以允许具有不同化学组成的多个溶剂浴在单个压力容器（653）中储存和/或加工，同时保持多个溶剂浴的不同化学组成。 因此，采用一个或多个分压的压力容器（653）的这种系统可以提供具有多个溶剂浴的具有二氧化碳的系统的改进的操作效率，同时减少可能与这种系统相关联的资本成本。
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公开(公告)号：WO2004070071A3
公开(公告)日：2004-11-11
申请号：PCT/US0338324
申请日：2003-12-02
Applicant: MICELL TECHNOLOGIES INC , DEYOUNG JAMES P , MCCLAIN JAMES B , GROSS STEPHEN M , TAYLOR DOUG , WAGNER MARK I , BRAINARD DAVID E
Inventor： DEYOUNG JAMES P , MCCLAIN JAMES B , GROSS STEPHEN M , TAYLOR DOUG , WAGNER MARK I , BRAINARD DAVID E
IPC: B05D1/18 , H01L21/00 , H01L21/02 , H01L21/285 , H01L21/288 , B05D1/00
CPC classification number: H01L21/283 , B05D1/18 , B05D2401/90 , H01L21/28556 , H01L21/288 , H01L21/67028 , H01L28/65
Abstract: A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.
Abstract translation: 一种涂布基材的方法包括以下步骤：（a）在封闭容器中提供基材，基材具有表面部分; （b）用第一超临界流体至少部分地填充封闭容器，使得所述第一超临界流体接触表面部分，第一超临界流体携带或含有涂层组分; 然后（c）将单独的压缩气体气氛添加到反应容器中，使得在第一超临界流体和单独的压缩气体气氛之间形成边界，所述单独的压缩气体气氛的密度小于所述第一超临界流体的密度; 然后（d）通过继续将所述分开的压缩气体气氛加入所述容器，使所述边界移过所述表面部分，并将涂层组分的薄膜沉积在所述微电子基底上，从所述容器中置换所述第一超临界流体。
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公开(公告)号：EP1368136A4
公开(公告)日：2005-10-12
申请号：EP02724947
申请日：2002-02-14
Applicant: MICELL TECHNOLOGIES INC
Inventor： DEYOUNG JAMES P , GROSS STEPHEN M , MCCLAIN JAMES B , COLE MICHAEL E , BRAINARD DAVID E , DESIMONE JOSEPH M
IPC: G03F7/32 , B08B7/00 , H01L21/027 , H01L21/304 , H01L21/306 , B08B3/00 , F26B3/00 , G03F7/42 , H01L21/00
CPC classification number: B08B7/0021 , H01L21/02063
Abstract: A method of cleaning and removing water, entrained solutes and particulate matter during a manufacturing process from a microelectronic device comprises the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified carbon dioxide cleaning composition, the cleaning composition comprising carbon dioxide and, optionally but preferably, a cleaning adjunct; (c) immersing the surface portion in the densified carbon dioxide drying composition; and then (d) removing the cleaning composition from the surface portion.
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