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公开(公告)号:AU2002249829A1
公开(公告)日:2002-08-12
申请号:AU2002249829
申请日:2001-12-27
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: TOMOV TRIFON , LUTEN HENRY A III , OLJACA MIODRAG , NEUMULLER TRAVIS , DANIELSON DOUG , WITBROD FRANK , NEUMAN GEORGE A , HUNT ANDREW T , FORTUNATO FRED
IPC: C23C16/44 , C23C16/453 , C23C16/455 , B05B1/24
Abstract: Apparatus is described for rapidly coating a large area, or for rapidly producing a powder. In one embodiment, a liquid having a coating chemical is pumped from a liquid reservoir to a distribution manifold. From the distribution manifold, the liquid is carried under pressure to a geometric array, e.g., linear, of atomization nozzles. Flow equalization means are provided for equalizing the flow of the liquid delivered to each nozzle, and, preferably, means are provided for equalizing the temperature of the liquid delivered to each nozzle. The liquid, upon exiting the nozzles with the attendant pressure drop atomizes. The atomized liquid coats a substrate either in non-reacted or reacted form, or forms a powder. In a preferred embodiment, a solution of precursor chemical is reacted in a geometric array of flames produced at the nozzles, and a coating material produced in the flame coats the substrate, or a powder is formed. In another embodiment, vaporized precursor and vaporized are fed to a burner chamber having a linear exit slit. The vapor exiting the slit is burned, and material produced in a flame reaction are deposited on a substrate, or the powder formed is collected.
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公开(公告)号:WO02061163A2
公开(公告)日:2002-08-08
申请号:PCT/US0149559
申请日:2001-12-27
Applicant: MICROCOATING TECHNOLOGIES INC , OLJACA MIODRAG , TOMOV TRIFON , NEUMAN GEORGE A , DANIELSON DOUG , HUNT ANDREW T , NEUMULLER TRAVIS , FORTUNATO FRED , LUTEN HENRY A III , WITBROD FRANK
Inventor: OLJACA MIODRAG , TOMOV TRIFON , NEUMAN GEORGE A , DANIELSON DOUG , HUNT ANDREW T , NEUMULLER TRAVIS , FORTUNATO FRED , LUTEN HENRY A III , WITBROD FRANK
IPC: C23C16/44 , C23C16/453 , C23C16/455 , C23C
CPC classification number: C23C16/45595 , B05B1/14 , B05B7/066 , B05B7/201 , C23C16/453
Abstract: A combustion chemical vapor deposition apparatus (100) having a manifold (116) into which a liquid (211) is pumped into by pump (213) through flow equilization tubes (206). The liquid (211) is sprayed through an array of spray nozzles (104). Combustible gas is provided through nozzles (114) and oxygen is supplied through orifices (106). The manifold is heated by heating element (202).
Abstract translation: 一种燃烧化学气相沉积设备(100),具有歧管(116),液体(211)通过流动均衡管(206)被泵(213)泵入其中。 液体(211)通过一系列喷嘴(104)喷射。 通过喷嘴(114)提供可燃气体,并通过孔(106)供应氧气。 歧管由加热元件(202)加热。
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