公开(公告)号：WO2013066669A2

公开(公告)日：2013-05-10

申请号：PCT/US2012/061456

申请日：2012-10-23

Applicant: NANOGRAM CORPORATION ,  LIU, Guojun ,  CHIRUVOLU, Shivkumar ,  LI, Weidong ,  SRINIVASAN, Uma

Inventor： LIU, Guojun ,  CHIRUVOLU, Shivkumar ,  LI, Weidong ,  SRINIVASAN, Uma

CPC classification number: H01L29/04 ,  H01L21/02104 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02601 ,  H01L21/0262 ,  H01L21/02628 ,  H01L21/2225 ,  H01L21/2257 ,  H01L21/67115 ,  H01L31/028 ,  H01L31/035218 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Silicon nanoparticle inks provide a basis for the formation of desirable materials. Specifically, composites have been formed in thin layers comprising silicon nanoparticles embedded in an amorphous silicon matrix, which can be formed at relatively low temperatures. The composite material can be heated to form a nanocrystalline material having crystals that are non-rod shaped. The nanocrystalline material can have desirable electrical conductive properties, and the materials can be formed with a high dopant level. Also, nanocrystalline silicon pellets can be formed from silicon nanoparticles deposited form an ink in which the pellets can be relatively dense although less dense than bulk silicon. The pellets can be formed from the application of pressure and heat to a silicon nanoparticle layer.

Abstract translation: 硅纳米颗粒油墨为形成所需材料提供了基础。 具体地说，复合材料已经形成在包含可以在较低温度下形成的非晶硅基质中的硅纳米颗粒的薄层。 可以将复合材料加热以形成具有非棒状晶体的纳米晶体材料。 纳米晶体材料可以具有期望的导电性能，并且可以以高掺杂剂水平形成材料。 此外，纳米晶硅颗粒可以由沉积成油墨的硅纳米颗粒形成，其中颗粒可以相对致密，尽管比体硅密度小。 颗粒可以由压力和热量施加到硅纳米颗粒层上形成。

公开(公告)号：WO2012106137A2

公开(公告)日：2012-08-09

申请号：PCT/US2012/022215

申请日：2012-01-23

Applicant: NANOGRAM CORPORATION ,  LIU, Guojun ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar

Inventor： LIU, Guojun ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar

IPC: H01L31/042 ,  H01L31/0216 ,  H01L31/18

CPC classification number: H01L21/2252 ,  B82Y30/00 ,  H01L21/2225 ,  H01L21/228 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

Abstract: The use of doped silicon nanoparticle inks and other liquid dopant sources can provide suitable dopant sources for driving dopant elements into a crystalline silicon substrate using a thermal process if a suitable cap is provided. Suitable caps include, for example, a capping slab, a cover that may or may not rest on the surface of the substrate and a cover layer. Desirable dopant profiled can be achieved. The doped nanoparticles can be delivered using a silicon ink. The residual silicon ink can be removed after the dopant drive-in or at least partially densified into a silicon material that is incorporated into the product device. The silicon doping is suitable for the introduction of dopants into crystalline silicon for the formation of solar cells.

Abstract translation: 使用掺杂的硅纳米颗粒油墨和其它液体掺杂剂源可以提供合适的掺杂剂源，以便如果提供合适的盖，则使用热处理将掺杂剂元素驱动到晶体硅衬底中。 合适的帽包括例如盖板，可以或可以不搁置在基材表​​面上的盖和覆盖层。 可以实现期望的掺杂剂。 可以使用硅油墨递送掺杂的纳米颗粒。 在掺杂剂驱入或至少部分致密化成掺入产品装置的硅材料之后，可以除去残留的硅油墨。 硅掺杂适用于将掺杂剂引入结晶硅以形成太阳能电池。

公开(公告)号：WO2012006071A2

公开(公告)日：2012-01-12

申请号：PCT/US2011/042142

申请日：2011-06-28

Applicant: NANOGRAM CORPORATION ,  CHIRUVOLU, Shivkumar ,  ALTMAN, Igor ,  FREY, Bernard, M. ,  LI, Weidong ,  LIU, Guojun ,  LYNCH, Robert, B. ,  PENGRA-LEUNG, Gina, Elizabeth ,  SRINIVASAN, Uma

Inventor： CHIRUVOLU, Shivkumar ,  ALTMAN, Igor ,  FREY, Bernard, M. ,  LI, Weidong ,  LIU, Guojun ,  LYNCH, Robert, B. ,  PENGRA-LEUNG, Gina, Elizabeth ,  SRINIVASAN, Uma

IPC: B01J13/00 ,  C01B33/02 ,  C01G17/00 ,  C09D11/00 ,  B01J19/08

CPC classification number: C09D11/38 ,  B01D21/262 ,  B01J19/121 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0875 ,  B82Y30/00 ,  C01B33/02 ,  C08K3/08 ,  C08K3/36 ,  C08K9/02 ,  C09D5/24 ,  C09D7/67 ,  C09D7/68 ,  C09D7/80 ,  C09D11/037 ,  C09D11/101 ,  C09D11/322 ,  C09D11/36 ,  C09D11/52 ,  H01L21/02532 ,  H01L21/02573 ,  H01L21/02579 ,  H01L21/02581 ,  H01L21/02601 ,  H01L21/02628 ,  H01L23/4828 ,  H01L23/53276 ,  H01L31/00 ,  H01L31/02363 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/0747 ,  H01L31/182 ,  H01L31/1864 ,  H01L2924/0002 ,  Y02E10/52 ,  Y02E10/546 ,  Y02E10/548 ,  Y02P70/521 ,  H01L2924/00

Abstract: Laser pyrolysis reactor designs and corresponding reactant inlet nozzles are described to provide desirable particle quenching that is particularly suitable for the synthesis of elemental silicon particles. In particular, the nozzles can have a design to encourage nucleation and quenching with inert gas based on a significant flow of inert gas surrounding the reactant precursor flow and with a large inert entrainnient flow effectively surrounding the reactant precursor and quench gas flows. Improved silicon nanoparticle inks are described that has silicon nanoparticles without any surface modification with organic compounds. The silicon ink properties can be engineered for particular printing applications, such as inkjet printing, gravure printing or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon nanoparticles.

Abstract translation: 描述了激光热解反应器设计和相应的反应物入口喷嘴，以提供特别适合于合成元素硅颗粒的理想的颗粒淬火。 特别地，喷嘴可以具有这样的设计，以鼓励基于围绕反应物前体流的大量惰性气体的惰性气体的成核和淬火以及有效围绕反应物前体和骤冷气体流的大的惰性夹带流。 描述了改进的硅纳米颗粒油墨，其具有不含有机化合物的任何表面改性的硅纳米颗粒。 硅油墨性能可以针对特定的印刷应用进行设计，例如喷墨印刷，凹版印刷或丝网印刷。 描述适当的处理方法以提供油墨设计的灵活性，而不对表面改性硅纳米颗粒。

公开(公告)号：WO2013109399A1

公开(公告)日：2013-07-25

申请号：PCT/US2012/071951

申请日：2012-12-28

Applicant: NANOGRAM CORPORATION

Inventor： LI, Weidong ,  PENGRA-LEUNG, Gina, Elizabeth ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar ,  SOEDA, Masaya ,  LIU, Guojun

IPC: C09D11/00 ,  C09D11/10 ,  H05K1/02

CPC classification number: H01L21/02381 ,  B82Y30/00 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02601 ,  H01L21/02628

Abstract: Improved silicon/germanium nanoparticle inks are described that have silicon/ germanium nanoparticles well distributed within a stable dispersion. In particular the inks are formulated with a centrifugation step to remove contaminants as well as less well dispersed portions of the dispersion. A sonication step can be used after the centrifugation, which is observed to result in a synergistic improvement to the quality of some of the inks. The silicon/germanium ink properties can be engineered for particular deposition applications, such as spin coating or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon/germanium nanoparticles. The silicon/germanium nanoparticles are well suited for forming semiconductor components, such as components for thin film transistors or solar cell contacts.

Abstract translation: 描述了改进的硅/锗纳米颗粒油墨，其具有良好分布在稳定分散体内的硅/锗纳米颗粒。 特别地，油墨通过离心步骤配制以除去分散体中的污染物以及较不良好分散的部分。 在离心之后可以使用超声处理步骤，这被观察到导致对一些油墨的质量的协同改进。 可以为特定的沉积应用（例如旋涂或丝网印刷）设计硅/锗油墨性质。 描述适当的处理方法以提供油墨设计的灵活性，而不对硅/锗纳米颗粒进行表面改性。 硅/锗纳米颗粒非常适合于形成诸如用于薄膜晶体管或太阳能电池触点的部件的半导体部件。

公开(公告)号：WO2011035306A2

公开(公告)日：2011-03-24

申请号：PCT/US2010/049661

申请日：2010-09-21

Applicant: NANOGRAM CORPORATION ,  LIU, Guojun ,  MORRIS, Clifford, M. ,  ALTMAN, Igor ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar

Inventor： LIU, Guojun ,  MORRIS, Clifford, M. ,  ALTMAN, Igor ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar

IPC: H01L31/042 ,  H01L31/0216

CPC classification number: H01L31/068 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/02601 ,  H01L21/02628 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/075 ,  H01L31/076 ,  H01L31/182 ,  H01L31/202 ,  Y02E10/546 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

Abstract: High quality silicon inks are used to form polycrystalline layers within thin film solar cells having a p-n junction. The particles deposited with the inks can be sintered to form the silicon film, which can be intrinsic films or doped films. The silicon inks can have a z- average secondary particle size of no more than about 250 nm as determined by dynamic light scattering on an ink sample diluted to 0.4 weight percent if initially having a greater concentration. In some embodiments, an intrinsic layer can be a composite of an amorphous silicon portion and a crystalline silicon portion.

Abstract translation: 高质量硅油墨用于在具有p-n结的薄膜太阳能电池中形成多晶层。 沉积有油墨的颗粒可以烧结形成硅膜，其可以是本征膜或掺杂膜。 硅油墨可以具有不超过约250nm的z-平均二次粒径，如果初始浓度更高时，稀释至0.4重量％的油墨样品上的动态光散射测定。 在一些实施例中，本征层可以是非晶硅部分和晶体硅部分的复合物。

公开(公告)号：EP2774174A2

公开(公告)日：2014-09-10

申请号：EP12846610.9

申请日：2012-10-23

Applicant: Nanogram Corporation ,  Liu, Guojun ,  Chiruvolu, Shivkumar ,  Li, Weidong ,  Srinivasan, Uma

Inventor： LIU, Guojun ,  CHIRUVOLU, Shivkumar ,  LI, Weidong ,  SRINIVASAN, Uma

IPC: H01L21/20 ,  H01L21/205

CPC classification number: H01L29/04 ,  H01L21/02104 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02601 ,  H01L21/0262 ,  H01L21/02628 ,  H01L21/2225 ,  H01L21/2257 ,  H01L21/67115 ,  H01L31/028 ,  H01L31/035218 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Silicon nanoparticle inks provide a basis for the formation of desirable materials. Specifically, composites have been formed in thin layers comprising silicon nanoparticles embedded in an amorphous silicon matrix, which can be formed at relatively low temperatures. The composite material can be heated to form a nanocrystalline material having crystals that are non-rod shaped. The nanocrystalline material can have desirable electrical conductive properties, and the materials can be formed with a high dopant level. Also, nanocrystalline silicon pellets can be formed from silicon nanoparticles deposited form an ink in which the pellets can be relatively dense although less dense than bulk silicon. The pellets can be formed from the application of pressure and heat to a silicon nanoparticle layer.

公开(公告)号：EP2671261A2

公开(公告)日：2013-12-11

申请号：EP12742405.9

申请日：2012-01-23

Applicant: Nanogram Corporation

Inventor： LIU, Guojun ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar

IPC: H01L31/042 ,  H01L31/0216 ,  H01L31/18

CPC classification number: H01L21/2252 ,  B82Y30/00 ,  H01L21/2225 ,  H01L21/228 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

Abstract: The use of doped silicon nanoparticle inks and other liquid dopant sources can provide suitable dopant sources for driving dopant elements into a crystalline silicon substrate using a thermal process if a suitable cap is provided. Suitable caps include, for example, a capping slab, a cover that may or may not rest on the surface of the substrate and a cover layer. Desirable dopant profiled can be achieved. The doped nanoparticles can be delivered using a silicon ink. The residual silicon ink can be removed after the dopant drive-in or at least partially densified into a silicon material that is incorporated into the product device. The silicon doping is suitable for the introduction of dopants into crystalline silicon for the formation of solar cells.

公开(公告)号：EP2588227A2

公开(公告)日：2013-05-08

申请号：EP11804119.3

申请日：2011-06-28

Applicant: Nanogram Corporation

Inventor： CHIRUVOLU, Shivkumar ,  ALTMAN, Igor ,  FREY, Bernard, M. ,  LI, Weidong ,  LIU, Guojun ,  LYNCH, Robert, B. ,  PENGRA-LEUNG, Gina, Elizabeth ,  SRINIVASAN, Uma

IPC: B01J13/00 ,  C01B33/02 ,  C01G17/00 ,  C09D11/00 ,  B01J19/08

CPC classification number: C09D11/38 ,  B01D21/262 ,  B01J19/121 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0875 ,  B82Y30/00 ,  C01B33/02 ,  C08K3/08 ,  C08K3/36 ,  C08K9/02 ,  C09D5/24 ,  C09D7/67 ,  C09D7/68 ,  C09D7/80 ,  C09D11/037 ,  C09D11/101 ,  C09D11/322 ,  C09D11/36 ,  C09D11/52 ,  H01L21/02532 ,  H01L21/02573 ,  H01L21/02579 ,  H01L21/02581 ,  H01L21/02601 ,  H01L21/02628 ,  H01L23/4828 ,  H01L23/53276 ,  H01L31/00 ,  H01L31/02363 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/0747 ,  H01L31/182 ,  H01L31/1864 ,  H01L2924/0002 ,  Y02E10/52 ,  Y02E10/546 ,  Y02E10/548 ,  Y02P70/521 ,  H01L2924/00

Abstract: Laser pyrolysis reactor designs and corresponding reactant inlet nozzles are described to provide desirable particle quenching that is particularly suitable for the synthesis of elemental silicon particles. In particular, the nozzles can have a design to encourage nucleation and quenching with inert gas based on a significant flow of inert gas surrounding the reactant precursor flow and with a large inert entrainment flow effectively surrounding the reactant precursor and quench gas flows. Improved silicon nanoparticle inks are described that has silicon nanoparticles without any surface modification with organic compounds. The silicon ink properties can be engineered for particular printing applications, such as inkjet printing, gravure printing or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon nanoparticles.

公开(公告)号：EP3097975A1

公开(公告)日：2016-11-30

申请号：EP16179437.5

申请日：2011-06-28

Applicant: Nanogram Corporation

Inventor： CHIRUVOLU, Shivkumar ,  ALTMAN, Igor ,  FREY, Bernard M. ,  LI, Weidong ,  LIU, Guojun ,  LYNCH, Robert B. ,  PENGRA-LEUNG, Gina Elizabeth ,  SRINIVASAN, Uma

IPC: B01J13/00 ,  C01B33/02 ,  C01G17/00 ,  C09D11/00 ,  B01J19/08 ,  H01L31/00 ,  C09D11/037 ,  C09D11/322

CPC classification number: C09D11/38 ,  B01D21/262 ,  B01J19/121 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0875 ,  B82Y30/00 ,  C01B33/02 ,  C08K3/08 ,  C08K3/36 ,  C08K9/02 ,  C09D5/24 ,  C09D7/67 ,  C09D7/68 ,  C09D7/80 ,  C09D11/037 ,  C09D11/101 ,  C09D11/322 ,  C09D11/36 ,  C09D11/52 ,  H01L21/02532 ,  H01L21/02573 ,  H01L21/02579 ,  H01L21/02581 ,  H01L21/02601 ,  H01L21/02628 ,  H01L23/4828 ,  H01L23/53276 ,  H01L31/00 ,  H01L31/02363 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/0747 ,  H01L31/182 ,  H01L31/1864 ,  H01L2924/0002 ,  Y02E10/52 ,  Y02E10/546 ,  Y02E10/548 ,  Y02P70/521 ,  H01L2924/00

Abstract: Laser pyrolysis reactor designs and corresponding reactant inlet nozzles are described to provide desirable particle quenching that is particularly suitable for the synthesis of elemental silicon particles. In particular, the nozzles can have a design to encourage nucleation and quenching with inert gas based on a significant flow of inert gas surrounding the reactant precursor flow and with a large inert entrainment flow effectively surrounding the reactant precursor and quench gas flows. Improved silicon nanoparticle inks are described that has silicon nanoparticles without any surface modification with organic compounds. The silicon ink properties can be engineered for particular printing applications, such as inkjet printing, gravure printing or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon nanoparticles.

Abstract translation: 激光热解的反应器设计和反应物对应的入口喷嘴的描述，以提供所期望的颗粒淬火做特别适用于单质硅颗粒的合成。 特别地，喷嘴可以有一个设计来鼓励成核和淬火与基于围绕所述反应物前体流量的惰性气体的流量显著并用有效围绕所述反应物前体的大的惰性夹带流动的惰性气体和骤冷气体流动。 改进的硅纳米颗粒油墨记载那样具有硅纳米粒子，而不与有机化合物的任何表面改性。 硅油墨性能可被改造为特殊印刷应用，颜色：如喷墨印刷，照相凹版印刷或丝网印刷。 适当的处理方法被描述而不表面改性的硅纳米粒子，以提供墨水的设计灵活性。

公开(公告)号：EP2804912A1

公开(公告)日：2014-11-26

申请号：EP12865642.8

申请日：2012-12-28

Applicant: Nanogram Corporation

Inventor： LI, Weidong ,  PENGRA-LEUNG, Gina, Elizabeth ,  SRINIVASAN, Uma ,  CHIRUVOLU, Shivkumar ,  SOEDA, Masaya ,  LIU, Guojun

IPC: C09D11/00 ,  C09D11/10 ,  H05K1/02

CPC classification number: H01L21/02381 ,  B82Y30/00 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02601 ,  H01L21/02628

Abstract: Improved silicon/germanium nanoparticle inks are described that have silicon/ germanium nanoparticles well distributed within a stable dispersion. In particular the inks are formulated with a centrifugation step to remove contaminants as well as less well dispersed portions of the dispersion. A sonication step can be used after the centrifugation, which is observed to result in a synergistic improvement to the quality of some of the inks. The silicon/germanium ink properties can be engineered for particular deposition applications, such as spin coating or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon/germanium nanoparticles. The silicon/germanium nanoparticles are well suited for forming semiconductor components, such as components for thin film transistors or solar cell contacts.