DRIVING METHOD FOR AUXILIARY MACHINERY FOR GAS TURBINE ENGINE AND DEVICE THEREOF

    公开(公告)号:JPH0719068A

    公开(公告)日:1995-01-20

    申请号:JP16488093

    申请日:1993-07-02

    Abstract: PURPOSE:To actuate and cool auxiliary machinery efficiently, and heighten comprehensive efficiency of an engine by driving an auxiliary turbine in rotation by taking compressed air of a compressor outside of an engine body, and actuating the auxiliary machinery for the engine by the auxiliary turbine. CONSTITUTION:When an engine body 20 is operated, respective low pressure air and high pressure compressed air are bled from respective low pressure and high pressure compressors. Then, an air directional control valve 22 is switched according to the number of revolutions of the engine body 20, and respective low pressure and high pressure bleed air pipelines 21A and 21B are selected. Selected bleed air is supplied to an air regulating means 23, and here, an air quantity to be transferred to an auxiliary turbine 24 is regulated according to specifications of respective auxiliary machinery. Afterwards, the auxiliary turbine 24 is driven in rotation by the bleed air, and the respective auxiliary machinery, for example, a generator 27, a lubricating oil pump 28, a fuel pump 29 and the like are actuated. On the other hand, air whose temperature is lowered by being used for driving in rotation is discharged to an air discharge pipe 24b, and is used to cool a heat exchanger 25 or the engine body 20.

    DEFECT MEASURING METHOD BY SIZE INSPECTION DEVICE FOR MASK OR WAFER

    公开(公告)号:JPH06129843A

    公开(公告)日:1994-05-13

    申请号:JP30752192

    申请日:1992-10-21

    Inventor: ENDO MAKOTO

    Abstract: PURPOSE:To save labor by retrieving a defect position automatically when measurement of a defect size, etc., is carried out by a size inspection device for a mask or a wafer. CONSTITUTION:When a defect size is inspected, first a defect is detected automatically by a defect inspection device 110, and the position information of the defect is outputted. An external computer 114 inputs the position information and converts it into the coordinate system position information for a size inspection device 112 so as to be outputted. The size inspection device 112 inputs the converted position information so as to retrieve the defect position automatically, and measures the defect size, etc. As the defect position can be retrieved automatically, labor and time can be saved consequently.

    APPARATUS FOR MEASURING POSTURE OF WORK

    公开(公告)号:JPH01165905A

    公开(公告)日:1989-06-29

    申请号:JP32448787

    申请日:1987-12-22

    Abstract: PURPOSE:To measure not only the height of a nozzle to a work but also the posture thereof, by measuring the heights of four points around a processing point by laser beam to discriminate a processing direction and operating the inclination of a processing surface on the basis of the height measuring results of three front points excepting the rear point. CONSTITUTION:Sensor heads 1, 2 are provided at symmetric positions so as to interpose a nozzle 3 between and two measuring points can be measured by the respective heads 1, 2 and, by this method, four points around a laser processing point can be measured. The signals from said heads 1, 2 are processed by a head controller 4 to be sent to a controller for controlling a laser processing machine. In a processing state, the rear with respect to an advance direction from the processing point O is inferior to the state of a processed surface and data for the posture of a work is hard to obtain and, even if said data is obtained, it is not accurate. Therefore, the advance direction of processing is discriminated and the posture of the work is measured on the basis of three front and both lateral points receiving no effect of processing.

    WATCHDOG TIMER
    4.
    发明专利

    公开(公告)号:JPH06222961A

    公开(公告)日:1994-08-12

    申请号:JP865993

    申请日:1993-01-21

    Inventor: ENDO MAKOTO

    Abstract: PURPOSE:To provide the watchdog time(WDT) which can detect both of the case when being triggered before a set value and the case when the set value elapses after being triggered as abnormality. CONSTITUTION:When a trigger signal TRIG showing the execution start of a program is inputted, counting is started from a count value CNT '0' and a counter 2 outputting a count value CNT at each time point outputs an abnormality signal OUT when the trigger signal TRIG is inputted while the count value CNT is less than a set value T1 and when the count value CNT reaches a set value T2.

    METHOD FOR ADJUSTING ALIGNMENT OF SUBSTRATE

    公开(公告)号:JP2000028485A

    公开(公告)日:2000-01-28

    申请号:JP19292598

    申请日:1998-07-08

    Abstract: PROBLEM TO BE SOLVED: To provide a method for adjusting alignment capable of accurately setting a substrate at an inspecting device even when there is dust on the substrate. SOLUTION: In this method, a substrate such as a color filter 2 is set at an inspecting device, and the substrate is moved relatively to a CCD line sensor. Then from image information of the CCD line sensor, the alignment of the substrate is adjusted for inspecting defects in the substrate. In this case, three groups of each of the edge locations 30 and 33 of two points separated at a predetermined interval from each other of the reference side 1 of the substrate along an edge 14 are detected by the above-mentioned CCD line sensor, and the median value of the angle of inclination obtained from the acquired data on the three groups is selected as the most provable value.

    SERIAL DATA RECEPTION CIRCUIT
    6.
    发明专利

    公开(公告)号:JPH06224972A

    公开(公告)日:1994-08-12

    申请号:JP1286893

    申请日:1993-01-28

    Inventor: ENDO MAKOTO

    Abstract: PURPOSE:To receive data with a clock pulse having a comparatively low frequency and to convert the received data into parallel data. CONSTITUTION:A clock generating circuit 10 generates a clock signal whose frequency is twice the serial data transmission frequency, a data reception section 1 detects serial data in a timing by the clock signal and converts the data into parallel data, which are outputted. On the other hand, a clock signal whose phase is delayed by 180 deg. with respect to the clock signal is generated by an inverter 11, a data reception section 2 detects the serial data in a timing by the clock signal and converts the data into parallel data. Then a data selection section 3 discriminates which of both the reception data by both reception sections are more proper and the parallel data outputted from the selected side are finally outputted.

    POWER START CONTROL CIRCUIT
    8.
    发明专利

    公开(公告)号:JPH11187644A

    公开(公告)日:1999-07-09

    申请号:JP34913997

    申请日:1997-12-18

    Abstract: PROBLEM TO BE SOLVED: To provide a power start control circuit, which starts the supply of power to load when output of a generator comes to a specified value but continues to supply power, even if the output drops under this specified value. SOLUTION: In a power start control circuit 5 which controls the output of a converter power source 3, which converts and outputs the output of the generator 1 fluctuating by the number of revolutions to load 4, the power start control circuit 5 starts the output to the load 4 from the converter power source 3, when it comes to the first voltage where the output of the generator 1 becomes stable, and breaks the output to the load 4 from the converter power source 3, when the output of the generator 1 drops to the second voltage smaller than the first voltage.

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