公开(公告)号：US3659097A

公开(公告)日：1972-04-25

申请号：US3659097D

申请日：1971-02-16

Applicant: NAT RES DEV

Inventor： BASSETT RICHARD ,  MULVEY THOMAS

IPC: H01J29/66 ,  H01J37/02 ,  H01J37/141 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/02 ,  H01J29/66 ,  H01J37/141 ,  H01J37/252 ,  H01J2237/002 ,  H01J2237/142

Abstract: Apparatus having a generator of a beam of charged particles and magnetic focusing means in which a beam of charged particles is brought to a focus between the source and the focusing means so that radiation from a target placed at the focus can be received by a radiation detector within a substantial solid angle, bounded by said magnetic focusing means and the beam of charged particles. Preferably the focusing means is an electrically conducting coil of substantially flat or shallow conical form having a conical half-angle of not less than 75*.

Abstract translation: 具有带电粒子束的发生器和磁聚焦装置的装置，其中带电粒子束被带到源和聚焦装置之间的焦点，使得放置在焦点处的来自靶的辐射可以被辐射检测器 在大致立体角内，由所述磁性聚焦装置和带电粒子束限定。

公开(公告)号：US3707628A

公开(公告)日：1972-12-26

申请号：US3707628D

申请日：1971-03-22

Applicant: NAT RES DEV

Inventor： BASSETT RICHARD ,  MULVEY THOMAS

IPC: H01J37/141 ,  H01J37/26 ,  G01N23/22

CPC classification number: H01J37/141

Abstract: A magnetic lens, for focusing a beam of charged particles, includes a coil at least part of which, at an end thereof, tapers conically with a half-angle between 20* and 85*. The coil may comprise a plurality of conductors laid concurrently, and cooling means may be provided in contact with the inner surface. Desirably, the coil is shrouded, at least in part, with material of high magnetic permeability. Radiation such as X-rays, from a target in focus beyond the tapering end of the coil, may be detected over a large solid angle.

Abstract translation: 用于聚焦带电粒子束的磁性透镜包括线圈，其至少一部分在其端部以20度和85度之间的半角锥形锥形地成锥形。 线圈可以包括同时放置的多个导体，并且冷却装置可以设置成与内表面接触。 理想地，线圈至少部分地用高导磁率的材料覆盖。 可以在大的立体角上检测来自聚焦超过线圈的锥形端的目标的X射线的辐射。

公开(公告)号：DE1806891A1

公开(公告)日：1969-06-19

申请号：DE1806891

申请日：1968-11-04

Applicant: NAT RES DEV

Inventor： BASSETT RICHARD ,  MULVEY THOMAS

IPC: H01J37/141 ,  H01J29/66

公开(公告)号：DE1764835A1

公开(公告)日：1971-11-04

申请号：DE1764835

申请日：1968-08-16

Applicant: NAT RES DEV

Inventor： BASSETT RICHARD ,  MULVEY THOMAS

IPC: H01J37/141 ,  H01J37/14

Abstract: A magnetic lens, for focusing a beam of charged particles, includes a coil at least part of which, at an end thereof, tapers conically with a half-angle between 20 DEG and 85 DEG . The coil may comprise a plurality of conductors laid concurrently, and cooling means may be provided in contact with the inner surface. Desirably, the coil is shrouded, at least in part, with material of high magnetic permeability. Radiation such as X-rays, from a target in focus beyond the tapering end of the coil, may be detected over a large solid angle.

公开(公告)号：GB1253652A

公开(公告)日：1971-11-17

申请号：GB5014867

申请日：1967-11-03

Applicant: NAT RES DEV

Inventor： MULVEY THOMAS ,  BASSETT RICHARD

IPC: H01J37/141

Abstract: 1,253,652. Electron beam apparatus. NATIONAL RESEARCH DEVELOPMENT CORP. 4 Nov., 1968 [3 Nov., 1967], No. 50148/67. Heading H1D. A magnetic lens for focusing a beam of charged particles 12 on to a target 16 comprising an electrically conducting circular wire coil 13 is positioned around the beam axis behind the target 16 with respect to the beam by a distance W, from the target position axially to a plane containing the inner diameter of the nearest face of the coil to the source 11, which is less than the mean between the inner and outer diameters (= R 1 + R 2 ) of the coil. Preferably the difference between the inner and outer radii (R 2 -R 1 ) is at least twice the axial thickness T of the coil and R 2 is at least twice and preferably three times R 1 . Also R 2 is preferably not less than 5T. The coil may have a layer 20 of material of high magnetic permeability applied to the side remote from source 11 with, as shown in Fig. 4, a removable central insert 21. The high permeability layer may extend around the edges and front face of the coil, and cooling ducts for the coil may be incorporated in these layers, Fig. 3 (not shown). Alternatively, as shown in Fig. 4, the coil may be formed as a series of alternately axially offset concentric sections 30 with the passages therebetween being used as duets for a cooling fluid, e.g. transformer oil. The coil may be concave towards the source 11, Fig. 2 (not shown). Electrical connection to the inner radius of the coil may be made by using a number of symmetrically distributed connections (23) to a copper foil screen (22) interposed between layer 20 and the coil, Fig. 5 (not shown). As it is employed behind the target the lens may conveniently be housed outside the vacuum envelope, thus facilitating easier cooling in cryogenic apparatus enabling the lens to be operated in a superconducting state. The lens may be used in an electron beam cutting or welding apparatus, in transmission or scanning electron microscopes and in electron probe X- ray microanalysis apparatus.