Verfahren zum Herstellen eines Dünnfilmtransistors und Dünnfilmtransistor

    公开(公告)号:DE112016000485T5

    公开(公告)日:2017-11-02

    申请号:DE112016000485

    申请日:2016-03-02

    Abstract: Es werden ein Verfahren zum Herstellen eines Dünnfilmtransistors und ein Dünnfilmtransistor angegeben, das/der eine Verschlechterung und Variation der Leistung verhindert. Ein Verfahren zum Herstellen eines Dünnfilmtransistors (1B) umfasst: das Bilden einer Oxidhalbleiterschicht 3 auf einer ersten Hauptfläche eines Substrats 2; das Bilden einer ersten leitenden Schicht auf der Oxidhalbleiterschicht 3, während eine zweite leitende Schicht auf einer zweiten Hauptfläche des Substrats 2 gebildet wird; das kollektive Bilden von Maskenschichten auf der ersten leitenden Schicht und der zweiten leitenden Schicht; und das kollektive Inkontaktbringen der ersten leitenden Schicht und der zweiten leitenden Schicht mit Ätzflüssigkeit, so dass Teilbereiche der ersten leitenden Schicht und der zweiten leitenden Schicht entfernt werden, um eine Source-Elektrode 6 und eine Drain-Elektrode 7 auf der Oxidhalbleiterschicht 3 zu bilden, während eine Gate-Elektrode 5 auf der zweiten Hauptfläche des Substrats 2 gebildet wird.

    NARROW FRAME TOUCH INPUT SHEET, MANUFACTURING METHOD OF SAME, AND CONDUCTIVE SHEET USED IN NARROW FRAME TOUCH INPUT SHEET

    公开(公告)号:CA2772040A1

    公开(公告)日:2011-03-17

    申请号:CA2772040

    申请日:2010-09-08

    Abstract: Provided are a narrow frame touch input sheet, manufacturing method of same, and conductive sheet used in the narrow frame touch input sheet that are suitable for a capacitive touch sensor of a narrow frame for which a conductive transparent film pattern has two layers. A conductive sheet is used which is provided with one or a plurality of layered transparent base sheets; and a conductive transparent film, a light-excluding conductive film for electrode use, and a first resist layer which are formed to be sequentially layered on the top surface and the rearmost surface thereof. Both sides of the first resist layer are exposed simultaneously, and after development, the conductive transparent film and the light-excluding conductive film for electrode use are simultaneously etched, the first resist layer is stripped away, then a second resist layer is formed as a coating over external bounding edge portions of both sides, and only the light-excluding conductive film for electrode use of the central window portion is etched. A circuit pattern of the conductive transparent film is thereby formed by being exposed.

    Verfahren zum Herstellen eines Dünnfilmtransistors und Dünnfilmtransistor

    公开(公告)号:DE112016000497T5

    公开(公告)日:2017-11-02

    申请号:DE112016000497

    申请日:2016-03-02

    Abstract: Es werden ein Verfahren zum Herstellen eines Dünnfilmtransistors und ein Dünnfilmtransistor angegeben, das/der eine Verschlechterung und Variation der Leistung verhindert. Ein Verfahren zum Herstellen eines Dünnfilmtransistors (1B) umfasst: das Bilden einer organischen Halbleiterschicht 3 auf einer ersten Hauptfläche eines Substrats 2; das Bilden einer ersten leitenden Schicht auf der organischen Halbleiterschicht 3, während eine zweite Halbleiterschicht auf einer zweiten Hauptfläche des Substrats gebildet wird; das kollektive Bilden von Maskenschichten auf der ersten leitenden Schicht und der zweiten leitenden Schicht; und das Inkontaktbringen der ersten leitenden Schicht und der zweiten leitenden Schicht mit Ätzflüssigkeit, so dass Teilbereiche der ersten leitenden Schicht und der zweiten leitenden Schicht entfernt werden, um eine Source-Elektrode 6 und eine Drain-Elektrode 7 auf der organischen Halbleiterschicht 3 zu bilden, während eine Gate-Elektrode 5 auf der zweiten Hauptfläche des Substrats 2 gebildet wird.

    NARROW FRAME TOUCH INPUT SHEET, MANUFACTURING METHOD OF THE SAME, AND CONDUCTIVE SHEET USED IN NARROW FRAME TOUCH INPUT SHEET

    公开(公告)号:CA2772040C

    公开(公告)日:2015-11-10

    申请号:CA2772040

    申请日:2010-09-08

    Abstract: Provided are a narrow frame touch input sheet, manufacturing method of the same, and conductive sheet used in the narrow frame touch input sheet, which are suitable for a capacitive touch sensor having a narrow frame and two layers of transparent conductive film. patterns. The method uses the conductive sheet including one or more transparent base sheets stacked into a layer, transparent conductive films, light-excluding conductive electrode films, and first resist layers, which are layered sequentially on the uppermost and lowermost surfaces thereof. The first resist layers are exposed simultaneously on the both surfaces, and after development, the transparent conductive films and the light-excluding conductive electrode films are simultaneously etched, the first resist layers are stripped away, then second resist layers are formed as coating on the both surfaces in an outer edge portion, so that the light-excluding conductive electrode films are etched only in the central window portions. Thus, circuit patterns of the transparent conductive films are exposed.

    NARROW FRAME TOUCH INPUT SHEET, MANUFACTURING METHOD OF SAME, AND CONDUCTIVE SHEET USED IN NARROW FRAME TOUCH INPUT SHEET
    5.
    发明公开
    NARROW FRAME TOUCH INPUT SHEET, MANUFACTURING METHOD OF SAME, AND CONDUCTIVE SHEET USED IN NARROW FRAME TOUCH INPUT SHEET 有权
    有窄框接触的输入胶片,工艺用于生产和结合用于导电膜的窄边框触摸输入FILM

    公开(公告)号:EP2477097A4

    公开(公告)日:2015-12-30

    申请号:EP10815368

    申请日:2010-09-08

    CPC classification number: G06F3/044 G06F2203/04103

    Abstract: Provided are a narrow frame touch input sheet, manufacturing method of the same, and conductive sheet used in the narrow frame touch input sheet, which are suitable for a capacitive touch sensor having a narrow frame and two layers of transparent conductive film patterns. The method uses the conductive sheet including one or more transparent base sheets stacked into a layer, transparent conductive films, light-excluding conductive electrode films, and first resist layers, which are layered sequentially on the uppermost and lowermost surfaces thereof. The first resist layers are exposed simultaneously on the both surfaces, and after development, the transparent conductive films and the light-excluding conductive electrode films are simultaneously etched, the first resist layers are stripped away, then second resist layers are formed as coating on the both surfaces in an outer edge portion, so that the light-excluding conductive electrode films are etched only in the central window portions. Thus, circuit patterns of the transparent conductive films are exposed.

    Narrow frame touch input sheet and manufacturing method thereof
    7.
    发明专利
    Narrow frame touch input sheet and manufacturing method thereof 有权
    NARROW框架触摸输入板及其制造方法

    公开(公告)号:JP2011060146A

    公开(公告)日:2011-03-24

    申请号:JP2009211002

    申请日:2009-09-11

    Abstract: PROBLEM TO BE SOLVED: To provide a narrow frame touch input sheet in which a narrow frame transparent conductive film pattern is suitable to a two-layer capacitance type touch sensor, a laminated narrow frame touch input sheet and a method for manufacturing a narrow frame touch input sheet. SOLUTION: The narrow frame touch input sheet and its manufacturing method are formed by a method which simultaneously etches a transparent conductive film and a light shielding conductive film for electrode, forms an elongated routing circuit pattern in which the transparent conductive film and the light shielding conductive film for electrode are sequentially laminated in the same pattern at the outer frame edge without a positional deviation, then, in a covered state forms a second resist layer on the elongated routing circuit pattern, and etches only a light shielding conductive film layer for electrode on which the second resist layer is not formed to thereby expose and form a circuit pattern of a transparent conductive film at a central window. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 解决的问题:为了提供一种窄框式触摸输入板,其中窄框透明导电膜图案适用于双层电容式触摸传感器,层叠窄框触摸输入板及其制造方法 窄框触摸输入表。 解决方案:窄框触摸输入板及其制造方法通过同时蚀刻透明导电膜和用于电极的遮光导电膜的方法形成细长的布线电路图案,其中透明导电膜和 用于电极的遮光导电膜在外框边缘以相同的图案依次层叠而没有位置偏移,然后在被覆状态下,在细长的布线电路图案上形成第二抗蚀剂层,并仅蚀刻遮光导电膜层 对于不形成第二抗蚀剂层的电极,从而在中心窗处露出并形成透明导电膜的电路图案。 版权所有(C)2011,JPO&INPIT

    Method for manufacturing narrow picture frame touch input sheet
    8.
    发明专利
    Method for manufacturing narrow picture frame touch input sheet 有权
    制造图像框架触摸输入板的方法

    公开(公告)号:JP2012113844A

    公开(公告)日:2012-06-14

    申请号:JP2010259570

    申请日:2010-11-19

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a narrow picture frame touch input sheet with an excellent rust-prevention property.SOLUTION: A conductive sheet, on which a transparent conductive film 3, a shading conductive film 1, and a first resist layer are sequentially laminated and formed on both faces of a transparent substrate sheet, is used. After both faces of the first resist layer are exposed at the same time, and developed, the transparent conductive film 3 and the shading conductive film 1 are etched at the same time. After the first resist layer is exfoliated, a rust inhibitor is applied on the exposed shading conductive film 1 and a patterned second resist layer is laminated. Only the shading conductive film 1 at a central window part and a terminal part is etched, so as to expose the transparent conductive film 3. Furthermore, at a boundary between the central window part and the terminal part, an exposed end face of the shading conductive film 1 is side-etched, so that the second resist layer has a pent-roof structure. Finally, the second resist layer with the pent-roof structure is softened by thermal processing, so that the exposed end face of the remaining shading conductive film 1 is coated, and the second resist layer is not exfoliated and is remained as a rustproof layer under this condition.

    Abstract translation: 解决的问题:提供一种具有优异的防锈性的制造窄画框触摸输入片的方法。 解决方案:使用其上透明导电膜3,遮光导电膜1和第一抗蚀剂层依次层压并形成在透明基片的两面上的导电片。 在同时曝光第一抗蚀剂层的两面之后,同时对透明导电膜3和遮光导电膜1进行蚀刻。 在第一抗蚀剂层被剥离之后,在曝光的遮光导电膜1上施加防锈剂,层压图案化的第二抗蚀剂层。 蚀刻仅在中心窗部分和端子部分的遮光导电膜1,以便露出透明导电膜3.此外,在中心窗部分和端子部分之间的边界处,阴影的暴露端面 导电膜1被侧蚀刻,使得第二抗蚀剂层具有顶盖结构。 最后,通过热加工使具有顶顶结构的第二抗蚀剂层软化,使得剩余的遮光导电膜1的暴露端面被涂覆,并且第二抗蚀剂层不被剥离并保留为防锈层 这个条件。 版权所有(C)2012,JPO&INPIT

    Narrow frame touch input sheet with protection film, laminate narrow frame touch input sheet with protection film and method for manufacturing them
    9.
    发明专利
    Narrow frame touch input sheet with protection film, laminate narrow frame touch input sheet with protection film and method for manufacturing them 有权
    带保护膜的窄框触摸输入板,带保护膜的层压板框架触摸输入板及其制造方法

    公开(公告)号:JP2011065394A

    公开(公告)日:2011-03-31

    申请号:JP2009215088

    申请日:2009-09-16

    Abstract: PROBLEM TO BE SOLVED: To provide a narrow frame touch input sheet with a protection film and a laminate narrow frame touch input sheet with a protection film which are suitable for a capacitance type touch sensor with a narrow frame and a two-layered transparent conductive film pattern and a method for manufacturing them.
    SOLUTION: A transparent conductive film, a light shielding conductive film for electrode, and a first resist layer are successively formed on the both faces of a base sheet, and the first resist layer is simultaneously exposed and developed on the both faces, and the transparent conducive film and the light shielding conductive film for an electrode are simultaneously etched, and the first resist layer is peeled, so that a thin wire leading circuit pattern in which the transparent conductive film and the light shielding conductive film for an electrode are laminated can be formed at the external frame sections of the both faces of the base sheet, and after that the both face thin wire leading circuit pattern is coated with a second resist layer, and only the light shielding conductive film for an electrode on which the second resist layer is not formed is etched so that the circuit pattern of the transparent conductive film can be formed, so as to be exposed at each of the both face central window portions, and the light transmitting protection film is laminated.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有保护膜的窄框触摸输入板和具有保护膜的层叠窄框触摸输入板,其适用于具有窄框架和双层的电容式触摸传感器 透明导电膜图案及其制造方法。 解决方案:在基片的两面上依次形成透明导电膜,电极用遮光导电膜和第一抗蚀剂层,并且在两面上同时曝光和显影第一抗蚀剂层, 同时蚀刻用于电极的透明导电膜和遮光导电膜,并且第一抗蚀剂层被剥离,使得其中透明导电膜和用于电极的遮光导电膜的细线引线电路图案是 可以在基片的两面的外框部形成层压体,然后,将两面面细线引线电路图案涂覆有第二抗蚀剂层,仅涂覆有电极的遮光导电膜 蚀刻不形成第二抗蚀剂层,从而可以形成透明导电膜的电路图案,以便在两面中的每一个处露出 中央窗口部分和透光保护膜层压。 版权所有(C)2011,JPO&INPIT

    MANUFACTURE OF PRINTED CIRCUIT BOARD HAVING PRINTED COIL, PRINTED COIL SHEET, AND PRINTED COIL CHIP

    公开(公告)号:JPH11243016A

    公开(公告)日:1999-09-07

    申请号:JP6054598

    申请日:1998-02-25

    Abstract: PROBLEM TO BE SOLVED: To provide a thin transformer. SOLUTION: A board 1 is provided with a linear hole group 3 constituted of three parallel adjacent linear holes 2, and a printed coil pair 6 constituted of two discontinuous printed coils 5 in which conductive pattern layers 4 are formed spirally on the both faces and side faces of parts interposed between each linear hole 2 of the linear hole group 3 as axes with another circuit, and a loop-shaped magnetic body 7, whose both ends are connected through the two printed coils 5 of the printed coil pair 6, is provided inside the board 1, and the number of turns of the two printed coils 5 of the printed coil pair 6 is made different in this printed circuit board.

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