公开(公告)号：US09097625B2

公开(公告)日：2015-08-04

申请号：US13864362

申请日：2013-04-17

Applicant: Omniprobe, Inc.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: C23C16/00 ,  G01N1/28 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  H01J37/02

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：US20150318141A1

公开(公告)日：2015-11-05

申请号：US14797389

申请日：2015-07-13

Applicant: Omniprobe, Inc.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: H01J37/08

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 来自储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：US20160189929A1

公开(公告)日：2016-06-30

申请号：US14926648

申请日：2015-10-29

Applicant: Omniprobe, Inc.

Inventor： Matt Hammer ,  Michael Dawson ,  Cheryl Hartfield

IPC: H01J37/305 ,  H01J37/285

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.

Abstract translation: 公开了一种用于在诸如FIB-SEM的能量束仪器中从工件提取的样品的背面研磨的TEM样品制备方法。 该方法包括使保持提取的样品的纳米操纵器探针尖端旋转根据装置的几何形状计算的角度; 移动仪器台以将TEM格栅定位在固定夹具中，使得TEM网格的平面基本上平行于TEM样品的所需平面; 将提取的样品连接到TEM网格; 并且使台架相对于台架保持固定姿态，同时使台架倾斜角度，使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品置于适当位置，以允许背面研磨以制备用于TEM观察的变薄的横截面样品。

公开(公告)号：US20140014742A1

公开(公告)日：2014-01-16

申请号：US13864362

申请日：2013-04-17

Applicant: OMNIPROBE, INC.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: G01N1/28

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 来自储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。