THERMAL CHEMICAL VAPOR DEPOSITION COATING
    1.
    发明申请
    THERMAL CHEMICAL VAPOR DEPOSITION COATING 审中-公开
    热化学蒸气沉积涂料

    公开(公告)号:WO2017040623A1

    公开(公告)日:2017-03-09

    申请号:PCT/US2016/049647

    申请日:2016-08-31

    Applicant: SILCOTEK CORP.

    CPC classification number: C23C16/24 C23C16/45523

    Abstract: Thermal chemical vapor deposition coated articles and thermal chemical vapor deposition processes are disclosed. The thermal chemical vapor deposition coated article includes a substrate and a coating on the substrate, the coating having multiple layers and being positioned on regions of the thermal chemical vapor deposition coated article that are unable to be concurrently coated through line-of-sight techniques. The coating has a concentration of particulate from gas phase nucleation, per 100 square micrometers, of fewer than 6 particles having a dimension of greater than 0.5 micrometers. The thermal chemical vapor deposition process includes introducing a multiple aliquot of a silicon-containing precursor to the enclosed vessel with intermediate gaseous soaking to produce the coated article.

    Abstract translation: 公开了热化学气相沉积涂覆制品和热化学气相沉积工艺。 热化学气相沉积涂覆制品包括基材和基材上的涂层,涂层具有多层并且位于不能通过视线技术同时涂覆的热化学气相沉积涂覆制品的区域上。 该涂层具有每100平方微米气相成核的少于6个尺寸大于0.5微米的颗粒的颗粒浓度。 热化学气相沉积工艺包括使用中间气体浸泡将含有硅的前体的多重等分试样引入封闭的容器中以产生涂覆制品。

    COLD THERMAL CHEMICAL VAPOR DEPOSITION
    4.
    发明申请

    公开(公告)号:WO2021076471A1

    公开(公告)日:2021-04-22

    申请号:PCT/US2020/055322

    申请日:2020-10-13

    Applicant: SILCOTEK CORP.

    Abstract: Cold thermal chemical vapor deposition coatings, articles, and processes are disclosed. Specifically, a cold thermal chemical vapor deposition process includes positioning an article, heating a precursor gas to at least a decomposition temperature of the precursor gas to produce a deposition gas, introducing the deposition gas to a coating vessel, and depositing a coating from the deposition gas onto the article within the coating vessel. The article remains at a temperature below the decomposition temperature throughout the introducing and depositing of the deposition gas. The coating on the article has a gradient formed by the depositing of the coating having no flow for a period of time. The coated article includes a thermally-sensitive substrate (the thermally-sensitive substrate capable of being modified by a temperature of 300 degrees Celsius) and a coating the thermally-sensitive substrate.

    THERMAL CHEMICAL VAPOR DEPOSITION SPLIT-FUNCTIONALIZATION PROCESS, PRODUCT AND COATING
    7.
    发明公开
    THERMAL CHEMICAL VAPOR DEPOSITION SPLIT-FUNCTIONALIZATION PROCESS, PRODUCT AND COATING 审中-公开
    热化学气相沉积分裂功能化工艺,产品和涂层

    公开(公告)号:EP3165633A1

    公开(公告)日:2017-05-10

    申请号:EP16196501.7

    申请日:2016-10-31

    Applicant: Silcotek Corp.

    Abstract: Thermal chemical vapor deposition split-functionalizing processes, coatings, and products are disclosed. The thermal chemical vapor deposition split-functionalizing process includes positioning an article within an enclosed chamber, functionalizing the article within a first temperature range for a first period of time, and then further functionalizing the article within a second temperature range for a second period of time. The thermal chemical vapor deposition split-functionalized product includes a functionalization formed by functionalizing within a first temperature range for a first period of time and a further functionalization formed by further functionalizing within a second temperature range for a second period of time.

    Abstract translation: 公开了热化学气相沉积分裂功能化工艺,涂层和产品。 热化学气相沉积分裂官能化方法包括将制品放置在封闭室内,在第一温度范围内使制品功能化第一段时间,然后在第二温度范围内进一步功能化制品第二段时间 。 热化学气相沉积分裂官能化产品包括通过在第一温度范围内官能化第一时间段和通过在第二温度范围内进一步官能化第二时间段形成的另一官能化形成的官能化。

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