公开(公告)号：EP1450428A3

公开(公告)日：2009-03-25

申请号：EP04250284.9

申请日：2004-01-20

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

Inventor： Lo Priore, Stefano ,  Palmieri, Michele ,  Mastromatteo, Ubaldo c/o STMicroelectronics

IPC: H01M8/02 ,  H01M8/10 ,  H01M8/14 ,  H01M4/86 ,  H01M4/88

CPC classification number: H01M8/241 ,  H01M4/8626 ,  H01M8/0247 ,  H01M8/1007 ,  H01M8/2404 ,  Y02P70/56

Abstract: A microfuel cell includes a substrate and a plurality of spaced-apart PEM dividers extending outwardly to define anodic and cathodic microfluidic channels. An anodic catalyst/electrode lines at least a portion of the anodic microfluidic channels, and a cathodic catalyst/electrode lines at least a portion of the cathodic microfluidic channels. Each anodic and cathodic catalyst/electrode may extend beneath an adjacent portion of a PEM divider in some embodiments. Alternately, the microfuel cell may include a plurality of stacked substrates, in which a first substrate has first microfluidic fuel cell reactant channels. A PEM layer may be adjacent the first surface of the first substrate, an anodic catalyst/electrode layer may be adjacent one side of the PEM layer, and a cathodic catalyst/electrode layer may be adjacent an opposite side of the PEM layer. An adhesive layer may secure the first substrate to an adjacent substrate defining at least a second microfluidic fuel cell reactant channel.

公开(公告)号：EP0893825A1

公开(公告)日：1999-01-27

申请号：EP97830383.2

申请日：1997-07-23

Applicant: STMicroelectronics S.r.l.

Inventor： Locati, Vanda ,  Wurthwein, Arturo ,  Villa, Monica ,  Clemente, Gino ,  Lo Priore, Stefano

IPC: H01L21/768 ,  H01L21/3105

CPC classification number: H01L21/31053 ,  H01L21/76224 ,  H01L21/76819

Abstract: A planarization method for improving the planarity of electronic devices integrated on a semiconductor substrate (1), which devices comprise a plurality of active elements formed with gate regions (2) which stand proud of the substrate (1) surface and define trench regions (3) therebetween. The method provides for the deposition, within said trench regions (3), of a dielectric stack structure comprising a first layer (4) of undoped oxide, a second layer (5) of oxide deposited over said first layer (4), and a third layer (6) of capping oxide. Also provided are two planarizing substeps consisting of a chemio-mechanical clearing substep followed by a dry etch-back substep to expose the top surfaces of said gate regions (2).

Abstract translation: 一种用于改善集成在半导体衬底（1）上的电子器件的平面度的平面化方法，该器件包括形成有栅极区域（2）的多个有源元件，所述栅极区域（2）以衬底（1）表面为傲，并且限定沟槽区域 ）。 该方法提供在所述沟槽区域（3）内沉积包括未掺杂氧化物的第一层（4），沉积在所述第一层（4）上的氧化物的第二层（5））的介电堆叠结构，以及 第三层（6）覆盖氧化物。 还提供了两个平坦化子步骤，其由化学机械清除子步骤，随后是干蚀刻子步骤，以暴露所述栅极区域（2）的顶表面。

公开(公告)号：EP1450428A2

公开(公告)日：2004-08-25

申请号：EP04250284.9

申请日：2004-01-20

Applicant: STMicroelectronics, Inc.

Inventor： Lo Priore, Stefano ,  Palmieri, Michele ,  Mastromatteo, Ubaldo c/o STMicroelectronics

IPC: H01M8/02 ,  H01M8/10 ,  H01M8/14 ,  H01M4/86 ,  H01M4/88

CPC classification number: H01M8/241 ,  H01M4/8626 ,  H01M8/0247 ,  H01M8/1007 ,  H01M8/2404 ,  Y02P70/56

Abstract: A microfuel cell includes a substrate and a plurality of spaced-apart PEM dividers extending outwardly to define anodic and cathodic microfluidic channels. An anodic catalyst/electrode lines at least a portion of the anodic microfluidic channels, and a cathodic catalyst/electrode lines at least a portion of the cathodic microfluidic channels. Each anodic and cathodic catalyst/electrode may extend beneath an adjacent portion of a PEM divider in some embodiments. Alternately, the microfuel cell may include a plurality of stacked substrates, in which a first substrate has first microfluidic fuel cell reactant channels. A PEM layer may be adjacent the first surface of the first substrate, an anodic catalyst/electrode layer may be adjacent one side of the PEM layer, and a cathodic catalyst/electrode layer may be adjacent an opposite side of the PEM layer. An adhesive layer may secure the first substrate to an adjacent substrate defining at least a second microfluidic fuel cell reactant channel.

Abstract translation: 微电极单元包括衬底和向外延伸以限定阳极和阴极微流体通道的多个间隔开的PEM分配器。 阳极催化剂/电极排列至少一部分阳极微流体通道，阴极催化剂/电极排列至少一部分阴极微流体通道。 在一些实施例中，每个阳极和阴极催化剂/电极可以在PEM分配器的相邻部分的下方延伸。 或者，微细脂肪细胞可以包括多个堆叠的基底，其中第一基底具有第一微流体燃料电池反应物通道。 PEM层可以与第一衬底的第一表面相邻，阳极催化剂/电极层可以邻近PEM层的一侧，阴极催化剂/电极层可以邻近PEM层的相对侧。 粘合剂层可以将第一基底固定到限定至少第二微流体燃料电池反应物通道的相邻基底。

公开(公告)号：EP1324395A3

公开(公告)日：2007-08-01

申请号：EP02258606.9

申请日：2002-12-13

Applicant: STMicroelectronics, Inc.

Inventor： Santoruvo, Gaetano ,  Lo Priore, Stefano

IPC: H01L29/78 ,  H01L27/02

CPC classification number: H05B3/28 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00873 ,  B01L3/5027 ,  B01L7/52 ,  B41J2/14129 ,  B41J2202/13 ,  H01L23/345 ,  H01L27/1203 ,  H01L29/0657 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An integrated heater formed as a field effect transistor in a semiconductor substrate, with the transistor having source and drain regions (14,15) with a channel region (20) extending there between to conduct current. The channel region has a resistance when conducting current to generate heat above a selected threshold. A dielectric layer is disposed on the channel region and a gate electrode (26) is disposed on the dielectric layer to control the current of the channel region. A thermally insulating barrier may be formed in the semiconductor material extending about the transistor. The object to be heated is positioned to receive the heat generated by the resistance of the channel region; the object may be a fluid chamber.

公开(公告)号：EP1450428B1

公开(公告)日：2011-03-16

申请号：EP04250284.9

申请日：2004-01-20

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics Srl

Inventor： Lo Priore, Stefano ,  Palmieri, Michele ,  Mastromatteo, Ubaldo c/o STMicroelectronics

IPC: H01M8/02 ,  H01M8/10 ,  H01M8/14 ,  H01M4/86 ,  H01M4/88

CPC classification number: H01M8/241 ,  H01M4/8626 ,  H01M8/0247 ,  H01M8/1007 ,  H01M8/2404 ,  Y02P70/56

Abstract: A microfuel cell includes a substrate and a plurality of spaced-apart PEM dividers extending outwardly to define anodic and cathodic microfluidic channels. An anodic catalyst/electrode lines at least a portion of the anodic microfluidic channels, and a cathodic catalyst/electrode lines at least a portion of the cathodic microfluidic channels. Each anodic and cathodic catalyst/electrode may extend beneath an adjacent portion of a PEM divider in some embodiments. Alternately, the microfuel cell may include a plurality of stacked substrates, in which a first substrate has first microfluidic fuel cell reactant channels. A PEM layer may be adjacent the first surface of the first substrate, an anodic catalyst/electrode layer may be adjacent one side of the PEM layer, and a cathodic catalyst/electrode layer may be adjacent an opposite side of the PEM layer. An adhesive layer may secure the first substrate to an adjacent substrate defining at least a second microfluidic fuel cell reactant channel.

公开(公告)号：EP1324395A2

公开(公告)日：2003-07-02

申请号：EP02258606.9

申请日：2002-12-13

Applicant: STMicroelectronics, Inc.

Inventor： Santoruvo, Gaetano ,  Lo Priore, Stefano

IPC: H01L29/78 ,  H01L27/02

CPC classification number: H05B3/28 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00873 ,  B01L3/5027 ,  B01L7/52 ,  B41J2/14129 ,  B41J2202/13 ,  H01L23/345 ,  H01L27/1203 ,  H01L29/0657 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An integrated heater formed as a field effect transistor in a semiconductor substrate, with the transistor having source and drain regions (14,15) with a channel region (20) extending there between to conduct current. The channel region has a resistance when conducting current to generate heat above a selected threshold. A dielectric layer is disposed on the channel region and a gate electrode (26) is disposed on the dielectric layer to control the current of the channel region. A thermally insulating barrier may be formed in the semiconductor material extending about the transistor. The object to be heated is positioned to receive the heat generated by the resistance of the channel region; the object may be a fluid chamber.

Abstract translation: 在半导体衬底中形成为场效应晶体管的集成加热器，其中晶体管具有源极和漏极区域（14,15），沟道区域（20）在其间延伸以传导电流。 当导通电流以产生高于所选阈值的热量时，沟道区域具有电阻。 电介质层设置在沟道区上，并且在电介质层上设置栅电极（26）以控制沟道区的电流。 可以在围绕晶体管延伸的半导体材料中形成隔热屏障。 被加热物被定位成接收由通道区域的电阻产生的热量; 物体可以是流体室。