Abstract:
Method of manufacturing an integrated circuit comprising a memory operating at high voltage and logic circuitry operating at a lower voltage than the memory: formation of a first layer of gate oxide (3) with a first thickness on first and second portions of a semiconductor substrate (1) which are intended, respectively, for first transistors operating at high voltage and for second transistors operating at the lower voltage, and formation of a second layer of gate oxide (5) with a second thickness on third portions for cells of the memory; deposition of a first polysilicon layer to define gate electrodes (8,9) for first transistors and floating gate electrodes (7) for the memory cells; deposition of an interpolysilicon dielectric layer (18) so as to leave the interpolysilicon dielectric layer on the gate electrodes (8,9) of first transistors and on the floating gate electrodes (7); formation, on the second portions (1), of a third gate oxide layer (24) with a third thickness less than the first thickness of the first gate oxide layer (3); deposition of a second polysilicon layer (25) to define gate structures (29) of the memory cells, and gate electrodes (26,27) of second transistors and polysilicon covers (80,90) for the gate electrodes (8,9) of first transistors.
Abstract:
A lateral DMOS transistor having a drain region (13, 14) which comprises a high-concentration portion (14) with which the drain electrode (D) is in contact and a low-concentration portion (13) which is delimited by the channel region. In addition to the conventional source, drain, body and gate electrodes, the transistor has an additional electrode (25) in contact with a point of the low-concentration portion of the drain region (13, 14) which is close to the channel. The additional electrode permits a direct measurement of the electric field in the gate dielectric and thus provides information which can be used both for characterizing the transistor and selecting its dimensions and for activating devices for protecting the transistor and/or other components of an integrated circuit containing the transistor.
Abstract:
The body regions for the n-channel and p-channel LV transistors, for the n-channel HV transistors, and for the EPROM cells are formed on a silicon substrate; a thermal oxide layer (12) is formed and a layer of polycrystalline silicon (13) is formed thereon; the latter layer is selectively removed to form the floating gate electrodes (13a) of the cells and the gate electrodes (13b) of the HV transistors; the source and drain regions (14) of the cells, the source and drain regions (22) of the n-channel HV transistors, the body regions (24) and the source and drain regions of the p-channel HV transistors are formed; an ONO composite layer (15) is formed; the silicon of the areas of the LV transistors is exposed; a thermal oxide layer (16) is formed on the exposed areas; a second polycrystalline silicon layer (17) is deposited and is then removed selectively to form the gate electrodes of the LV transistors (17c) and the control gate electrodes (17a) of the cells, and the source and drain regions of the LV transistors are formed. By virtue of the use of a material (ONO) which is impermeable to the oxygen atoms of the subsequent thermal oxidation and because the body regions (24) of the p-channel HV transistors and the source and drain regions of all of the HV transistors are produced by separate implantations, components of very good quality are produced with few more masks than a conventional LV method.
Abstract:
The active areas and the body regions for the LV MOS transistors, for the HV MOS transistors and for the EPROM cells are formed on a silicon substrate, a layer of thermal oxide is formed, and a layer of polycrystalline silicon is formed on it, the last-mentioned layer is removed selectively to form the floating gate electrodes (13a) of the cells, the source and drain regions of the cells are formed, the silicon of the areas of the HV MOS transistors is exposed, a layer of HTO oxide is formed and nitrided, the silicon of the areas of the LV MOS transistors is exposed, a layer of thermal oxide (16) is formed on the exposed areas, a second layer of polycrystalline silicon is deposited and is then removed selectively to form the gate electrodes of the LV and HV MOS transistors (17c, 17b) and the control gate electrodes (17a) of the cells, and the source and drain regions of the LV and HV MOS transistors are formed. Owing to the simultaneous formation of the gate dielectric of the HV MOS transistors and the intermediate dielectric of the cells, and the use of a material (nitrided HTO oxide) which is impermeable to the oxygen atoms of the subsequent thermal oxidation, the number of the operations in the process is smaller than in the prior art process.
Abstract:
The active areas and the body regions for the LV MOS transistors, for the HV MOS transistors and for the EPROM cells are formed on a silicon substrate, a layer of thermal oxide (12) is formed and a layer of polycrystalline silicon (13) is formed on it, the last-mentioned layer is removed selectively to form the floating gate electrodes (13a) of the cells, the source and drain regions (14) of the cells are formed, a composite ONO layer (15) is formed, the silicon of the areas of the LV MOS transistors is exposed, a layer of thermal oxide (16) is formed on the exposed areas, a second layer of polycrystalline silicon (17) is deposited and is then removed selectively to form the gate electrodes of the LV and HV MOS transistors (17c, 17b) and the control gate electrodes (17a) of the cells, and the source and drain regions of the LV and HV MOS transistors are formed. Owing to the simultaneous formation of part of the gate dielectric of the HV MOS transistors and the intermediate dielectric of the cells, and the use of a material (ONO) which is impermeable to the oxygen atoms of the subsequent thermal oxidation, the number of the operations in the process is smaller than in the prior art process.