PHOTOSENSITIVE CERAMIC COMPOSITION
    5.
    发明专利

    公开(公告)号:JP2003202662A

    公开(公告)日:2003-07-18

    申请号:JP2002317366

    申请日:2002-10-31

    Abstract: PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition that ensures high transmittance and straight traveling property of light for exposure because it is necessary to form via holes having a high aspect ratio and high definition by photolithography so as to obtain satisfactory characteristics in a high-frequency domain. SOLUTION: The photosensitive ceramic composition comprises inorganic powder and a photosensitive organic component as essential components, wherein at least part of the surface of the inorganic powder is formed with a portion consisting of an inorganic material lower in refractive index than the inner layer portion of the inorganic powder. COPYRIGHT: (C)2003,JPO

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