公开(公告)号：JPH0855887A

公开(公告)日：1996-02-27

申请号：JP18829794

申请日：1994-08-10

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI ,  TSUCHIYA TAKEO ,  MORI MIKI ,  SUZUKI HIROKATSU ,  KOSUGE HIDEO

IPC: G01B15/00 ,  G01T1/29 ,  G03C5/00 ,  H01L21/66 ,  H05K3/00 ,  H05K3/46

Abstract: PURPOSE:To provide a laminograph for accurately focusing a desired surface of a specimen. CONSTITUTION:A substrate 14 which is a specimen is laid out successively differently between an X-ray tube 11 and a detector 13, X rays from the X-ray tube 11 through the substrate 14 are detected by the detector 13 for scanning the substrate 14, the output of the detector 13 is successively collected by a data collection device 20 during scanning, a plurality of transmission images of the specimen with different transmission directions are collected, and the plurality of collected transmission images are summed to find an average while being shifted mutually by an image processing device 21, thus creating a transmission image where one focusing surface of the substrate 14 is focused. Then, the position of the focusing surface which is the surface of the substrate 14 is measured by a distance measuring instrument 23 and the amount of deviation is calculated based on the position of the measured focusing surface.

公开(公告)号：JPH07243833A

公开(公告)日：1995-09-19

申请号：JP3505494

申请日：1994-03-04

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI ,  NISHIDE AKIHIKO

IPC: G01B11/02 ,  G01B15/00 ,  G06T1/00 ,  G06T7/00

Abstract: PURPOSE:To realize highly accurate dimensional measurement by obtaining a calibration parameter depending on the measuring method in a measurement execution menu on the basis of actual measured values after the profile of a reference object is measured in advance for its dimension, and by calculating its dimension with the aid of the parameters when an object to be measured is subject to measurement for the profile at first. CONSTITUTION:The image of a reference object whose dimension is measured beforehand is extracted from an image memory 3 and it is displayed on an image area 9A of a display part 4. Two points are inputted on the image with a mouse 7 to set a measuring line, and the profile of light and dense values on a line segment is displayed by a CPU 1. Next, a menu is selected to obtain a calibration parameter depending upon a dimensional measurement method and the parameter is registered in a magnetic disk 11. Further, another menu is selected to start the dimensional measurement and dimensionally measure the profile of an object to be measured at first. At this time, since the calibration parameter registered in the disk 11 is utilized for measurement, the highly accurate measurement result almost equivalent to actual measured values can be obtained.

公开(公告)号：JPH07151709A

公开(公告)日：1995-06-16

申请号：JP30000693

申请日：1993-11-30

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  UYAMA KIICHIRO

IPC: G01N23/04

Abstract: PURPOSE:To provide a perspective device for line sensors capable of responding to both movable matter and non-movable matter in an inspected body and various inspected body with an easy mechanism. CONSTITUTION:Provided are a radiation generation means 1 for irradiating radiation to an inspected body P, a detection means 2 for detecting radiation having penetrated the inspected body P with one-dimensional space resolution, a support for holding this detection means 2 or the inspected body P by switching, a scanning means 3 for scanning this support in one-dimensional direction and approximately perpendicular directions, a data aquisition means 5 for collecting signal data obtained through the detection means 2 during scanning the scanning means 3 and an image forming means 9 for forming the penetration image of the inspected body P based on the data obtained.

公开(公告)号：JPH06218844A

公开(公告)日：1994-08-09

申请号：JP1249293

申请日：1993-01-28

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  UYAMA KIICHIRO

IPC: B29D30/00 ,  B60C19/00 ,  B60C25/00 ,  G01N23/18

Abstract: PURPOSE:To obtain the tomographic image of the whole of a tire using a general commercial wheel and to miniaturize a CT device for a tire. CONSTITUTION:A CT device for a tire has a tire holding means holding a tire 1 to be inspected by the hub part of a wheel 2, a radiation source emitting radiation to the tomographic surface of the tire 1 to be inspected on one side thereof, the detection means provided on the other side of the tire 1 to be inspected to detect the radiation transmitted through the tomographic surface of the tire to be inspected and a scanning means 3 laterally moving and/or rotating the tire to be inspected in the direction almost parallel to the tomographic surface.

公开(公告)号：JPH05172763A

公开(公告)日：1993-07-09

申请号：JP33746091

申请日：1991-12-20

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI

IPC: G01B15/04 ,  G01N23/04 ,  G06T1/00 ,  H05K3/46

Abstract: PURPOSE:To obtain a tomographic equipment capable of obtaining a tomographic image of high image quality. CONSTITUTION:A turntable 8 having a subject 9 placed thereon, the traverse frame 10 operated through a traverse mechanism 11 and the up-and-down movable frame 5 driven through an up-and-down motion mechanism 6 are controlled by a mechanism control unit 12 and the subject 9 is set in many-arrangement with respect to X-ray fan beam 3. The output data of a detector 4 in this arrangement of the subject 9 are collected by a data collecting device 14 and the collected output data are combined by a reconstitution device 15 to perform processing adding and averaging the data related to the transmission paths passing one point of one focal surface at different angles with respect to all of points and the tomographic image focused on one focal point of the subject 9 is formed.

公开(公告)号：JPH05157708A

公开(公告)日：1993-06-25

申请号：JP32576991

申请日：1991-12-10

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI

IPC: G01N23/04 ,  G03C5/16 ,  H04N5/32 ,  H05K3/46

Abstract: PURPOSE:To obtain a lamino graph where focusing can be made only to a focusing surface without using a focusing scanning type X-rays tube and a sectional image can be obtained only by a simple image addition processing. CONSTITUTION:X rays from an X-rays tube 1 are discharged toward a specimen 3 while allowing the specimen 3 and an X-rays detector 4 to revolve around a revolution axis 13 in synchronization and X rays which are transmitted through the specimen 3 are detected by the X-rays detector 4. A transmission image of the detected specimen 3 is added by an image addition device 9 and is displayed on an image display device 10.

公开(公告)号：JPS63243851A

公开(公告)日：1988-10-11

申请号：JP7842987

申请日：1987-03-31

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  MATSUURA SHIGEO ,  TANIMOTO YOSHITETSU ,  FUJII MASAJI ,  SHOJI TAKAO

IPC: A61B6/03 ,  G01N23/04

Abstract: PURPOSE:To obtain a tomographic image in a short time without placing any load on a body to be inspected by projecting fan-shaped radial rays from the periphery of the specific section of the body to be inspected and moving a radiation detection part in the direction where many detectors are arranged successively every time the body to be inspected makes one turn. CONSTITUTION:The fan-shaped radial rays from a radiation source 1 are projected on the specific section of the body to be inspected and detected by the radiation detection part 3 consisting of the many detectors successively opposite to the radiation source 1 to reconstitute the tomographic image of the specific section according to the obtained projection data. Then a detection part horizontal fine moving mechanism part 37 moves the radiation detection part 3 in a plane containing the specific section and a turntable 21 rotates the body to be inspected around an axis perpendicular to the specific section. A fast arithmetic part 7 interpolates a defective part in said projection data obtained by the radiation detection part 3 due to a gap between detectors by using projection data obtained after the radiation detection part 3 is moved.

公开(公告)号：JPS6274334A

公开(公告)日：1987-04-06

申请号：JP21552585

申请日：1985-09-28

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI

IPC: A61B6/03 ,  G01N23/04

公开(公告)号：JPS61155844A

公开(公告)日：1986-07-15

申请号：JP27479984

申请日：1984-12-28

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  NAKAMURA SHIGEO

IPC: A61B6/03 ,  G01N23/04

Abstract: PURPOSE:To detect a singular part where variation in radiation transmissivity is very small by generating emphasis data by adding the fine variation for an object body having the singular part and then constituting an image. CONSTITUTION:For example, a metallic pipe 55 is irradiated with X rays 23 from the X-ray source 21 of a CT scanner in a fan-beam shape and the X-rays are transmitted. The X rays are detected by an X-ray detector 27 constituted by arranging X-ray detecting elements of plural channels. When the peeling 61 of the metallic pipe 55 is detected, the X-ray transmitted through the internal wall where the peeling 61 occurs are detected by the detecting element of a channel RT and the transmission distance of the X rays in the metallic pipe 55 is long, so its transmission level is low. Fine variation in radiation transmissivity is added to data on the area where the transmissivity is low to generate emphasis data. An image is constituted on the basis of the data to detect peeling correctly. Thus, the radiation transmissivity of the singular part is emphasized, so fine variation is picked up with high resolution.

公开(公告)号：JPS5960345A

公开(公告)日：1984-04-06

申请号：JP17138382

申请日：1982-09-30

Applicant: Toshiba Corp

Inventor： FUJII MASAJI

IPC: G01N23/04 ,  G01B15/00 ,  G01N23/16

CPC classification number: G01N23/16

Abstract: PURPOSE:To make an automatic decision on a defective through simple constitution by using an X-ray line sensor and leading out a signal at right angles to the movement direction of a body to be inspected, removing a perspective picture data part of small area by an area measuring instrument, and comparing the last data with the current data and making the decision on the defective. CONSTITUTION:The X-ray line sensor 16 judges the arrival of the body 15 to be checked and its perspective picture data is sent to a rear stage. A memory control part 24 writes the perspective picture data in memories 25a and 25b. A subtracter 26 calculates the difference between the perspective data and the last perspective picture data stored in the memories 25a and 25b. The difference signal is supplied to the area measuring instrument 28 to remove a small-area part and only data on parts having specific area or greater are sent out to a defective decision unit 29. The defective decision unit 29 makes a logically difficult decision on a defective by the arrival signal of the checked body 15 from a level decision device 22 and the output signal of the area measuring instrument 28.

Abstract translation: 目的：通过使用X射线线传感器，通过简单的结构自动判定有缺陷的信号，并引出与被检体的移动方向成直角的信号，通过以下方式移除小区域的透视图数据部分 区域测量仪器，并将最后的数据与当前数据进行比较，并作出有缺陷的决定。 构成：X射线线传感器16判断要检查的身体15的到达，其透视图数据被发送到后级。 存储器控制部分24将透视图数据写入存储器25a和25b。 减法器26计算透视数据和存储在存储器25a和25b中的最后透视图数据之间的差。 差分信号被提供给区域测量仪器28以去除小区域部分，并且仅将具有特定面积或更大的部分的数据发送到缺陷判定单元29.缺陷判定单元29对逻辑上难以做出的判定 来自电平判定装置22的检查体15的到达信号和区域测量仪28的输出信号有缺陷。