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    INCREASING INFORMATION RESULTING FROM APODIZATION
    1.
    发明申请
    INCREASING INFORMATION RESULTING FROM APODIZATION 有权

    公开(公告)号：US20250155847A1

    公开(公告)日：2025-05-15

    申请号：US18510047

    申请日：2023-11-15

    Applicant: FEI Company

    Inventor： Konstantin Balashov ,  Alan S. Bahm

    IPC: G03H1/16 ,  G02B27/58

    Abstract: Embodiments herein relate to apodization of a hologram. A system can comprise a memory that stores, and a processor that executes, computer executable components. The computer executable components can comprise an obtaining component that obtains a signal of an energy-based initial hologram, an expansion component that expands the initial hologram at a boundary of the initial hologram, resulting in an expanded hologram having an expanded portion at the boundary, and a filter application component that, based on the expanded hologram, applies an apodization filter to overlap the expanded portion of the expanded hologram.

    METHODS AND SYSTEMS OF ELECTRON DIFFRACTION
    2.
    发明申请
    METHODS AND SYSTEMS OF ELECTRON DIFFRACTION 有权

    公开(公告)号：US20250112022A1

    公开(公告)日：2025-04-03

    申请号：US18900341

    申请日：2024-09-27

    Applicant: FEI Company

    Inventor： Jakub HOLZER ,  Chris STEPHENS ,  Tomáš VYSTAVEL ,  Branislav STRAKA

    IPC: H01J37/244

    Abstract: A method of producing an electron diffraction pattern comprises of directing an electron beam to be incident upon a sample and detecting, by a particle detector with an array of pixels, electrons scattered from the sample. The detecting comprises, for each detected electron at a pixel, measuring an energy value that is proportional to the energy of the detected electron. The measured energy value of each detected electron and an identifier of the pixel that detected the electron are sent to a processing device. An energy-weighted contribution value from each measured energy value is calculated by the processing device using an energy-dependent function. The energy-dependent function produces energy-weighted contribution values that vary with electron energy. An energy-weighted electron diffraction pattern is then generated using pixel positions associated with each pixel identifier, and the energy-weighted contribution values.

    ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME
    3.
    发明申请
    ABERRATION CORRECTION SYSTEMS AND CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE SAME 有权

    公开(公告)号：US20250112018A1

    公开(公告)日：2025-04-03

    申请号：US18478966

    申请日：2023-09-29

    Applicant: FEI Company

    Inventor： Alexander Henstra

    IPC: H01J37/153 ,  H01J37/147 ,  H01J37/28

    Abstract: Aberration correction systems and charged particle microscope systems including the same. An apparatus can include a plurality of electrostatic multipole elements configured to at least partially correct an axial chromatic aberration of the charged particle beam. The apparatus additionally includes a deflector assembly with a corrector electrostatic prism. The corrector electrostatic prism can include a first corrector prism electrode and a second corrector prism electrode that define an electrode gap therebetween and a deflector optical axis extends within the electrode gap. The plurality of electrostatic multipole elements can include a first hexapole-generating element, a second hexapole-generating element, a third hexapole-generating element, and/or a fourth hexapole-generating element. In some examples, the second hexapole-generating element is positioned proximate to a midpoint of the deflector optical axis. In some examples, each of the second hexapole-generating element and the third hexapole-generating element is positioned at least partially within the corrector electrostatic prism.

    CRYOGENIC CLEANING DEVICE
    4.
    发明申请
    CRYOGENIC CLEANING DEVICE 有权

    公开(公告)号：US20250108317A1

    公开(公告)日：2025-04-03

    申请号：US18480458

    申请日：2023-10-03

    Applicant: FEI Company

    Inventor： Jan Lásko ,  Libor Novák ,  Kamil Bencko

    IPC: B01D8/00 ,  F04B37/08

    Abstract: Cryogenic cleaning devices comprise a body and an attachment element for attaching the body to a vacuum chamber to provide a fluid path between the body and the vacuum chamber. A surface is configured to accumulate gas molecules received into the body via the fluid path by condensing and/or adsorbing the gas molecules on the surface when cooled and a single-stage refrigeration system is configured to cool the surface. A pump is configured to pump out the accumulated gas molecules during baking of and a valve is moveable between a first position in which the fluid path is open to allow the gas molecules to be evacuated from the vacuum chamber into the body, and a second position in which the fluid path is closed to prevent the gas molecules from being received into the body.

    Lamella End-Pointing Via Graph-Weighted Neural Networks
    5.
    发明申请
    Lamella End-Pointing Via Graph-Weighted Neural Networks 有权

    公开(公告)号：US20250104410A1

    公开(公告)日：2025-03-27

    申请号：US18611256

    申请日：2024-03-20

    Applicant: FEI Company

    Inventor： Zoltán Orémuš ,  Jamie Dee GRAVELL ,  Jakub STREJCEK

    IPC: G06V10/82 ,  G06F30/12 ,  G06V10/764 ,  G06V10/774 ,  G06V20/69 ,  G06V20/70

    Abstract: Systems or techniques are provided for facilitating lamella end-pointing via graph-weighted neural networks. In various embodiments, a system can access an image captured by a scientific instrument, wherein the image depicts a cutface of a lamella. In various aspects, the system can generate, via execution of a graph-weighted neural network, a classification label for the cutface, wherein the classification label can indicate to which one of a plurality of defined classes the cutface belongs. In various instances, the system can, in response to the classification label indicating that the cutface does not belong to a target class of the plurality of defined classes, instruct the scientific instrument to incrementally mill the cutface of the lamella.

    System and method for accelerated convergence of iterative tomographic reconstruction
    7.
    发明授权
    System and method for accelerated convergence of iterative tomographic reconstruction 有权

    公开(公告)号：US12260473B2

    公开(公告)日：2025-03-25

    申请号：US17958110

    申请日：2022-09-30

    Applicant: FEI Company

    Inventor： Glenn Myers ,  Andrew Kingston ,  Adrian Sheppard ,  Shane Latham ,  Trond Varslot

    IPC: G06V10/00 ,  G06T11/00

    Abstract: Methods and systems for generation and use of an accelerated tomographic reconstruction preconditioner (ATRP) for accelerated iterative tomographic reconstruction are disclosed. An example method for generating an ATRP for accelerated iterative tomographic reconstruction includes accessing data for a tomography investigation of a sample and determining a trajectory of the tomography investigation of a sample. At least one toy model sample depicting a feature characteristic of the sample are accessed and at least one candidate preconditioner is selected. A first performance of each of the at least one candidate preconditioner on the one or more toy samples is determined, where the candidate preconditioners are then updated to create updated candidate preconditioners. A second performance of each of the updated candidate preconditioners on the one or more toy samples is determined determining. An ATRP is then generated based on at least the first performance and the second performance.

    SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS
    8.
    发明申请
    SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS 有权

    公开(公告)号：US20250095953A1

    公开(公告)日：2025-03-20

    申请号：US18970226

    申请日：2024-12-05

    Applicant: FEI COMPANY

    Inventor： Adam STOKES ,  Cliff BUGGE ,  Brandon VAN LEER ,  Valerie BROGDEN ,  Chengge JIAO ,  Letian LI ,  David DONNET

    IPC: H01J37/20 ,  H01J37/244 ,  H01J37/28

    Abstract: Methods and systems for performing sample lift-out and creating attachments for highly reactive materials within charged particle microscopy systems are disclosed herein. Methods include creating attachments between a sample manipulator and a sample within a charged particle system and translating a sample manipulator so that the sample manipulator is proximate to a sample such that a portion of the sample manipulator proximate to the sample is composed of a high sputter yield material. The methods and systems include milling, with a charged particle beam, the high sputter yield material such that portions of the high sputter yield material are removed from the sample manipulator without milling away material from the sample such that at least some of the removed high sputter yield material redeposits to form an attachment between the sample manipulator and the sample without milling material away from the sample.

    Transmission charged particle microscope with an electron energy loss spectroscopy detector
    9.
    发明授权
    Transmission charged particle microscope with an electron energy loss spectroscopy detector 有权

    公开(公告)号：US12255045B2

    公开(公告)日：2025-03-18

    申请号：US18629633

    申请日：2024-04-08

    Applicant: FEI Company

    Inventor： Peter Christiaan Tiemeijer

    IPC: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/20 ,  H01J37/26

    Abstract: The invention relates to a transmission charged particle microscope comprising a charged particle beam source for emitting a charged particle beam, a sample holder for holding a sample, an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample, and a control unit for controlling operations of the transmission charged particle microscope. As defined herein, the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield a first magnification whilst keeping said diffraction pattern substantially in focus. Said at least two modes comprise a first mode having first settings of a final projector lens of a projecting system; and a second mode having second settings of said final projector lens.

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