公开(公告)号：US11981558B2

公开(公告)日：2024-05-14

申请号：US17240782

申请日：2021-04-26

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Marco Ferrera ,  Carlo Luigi Prelini

IPC: H04R7/04 ,  B81B3/00 ,  B81C1/00 ,  F16K31/00 ,  H04R1/02 ,  H04R3/00 ,  H04R7/18 ,  H04R19/02

CPC classification number: B81B3/007 ,  B81C1/00658 ,  F16K31/005 ,  H04R1/02 ,  H04R3/00 ,  H04R7/04 ,  H04R7/18 ,  H04R19/02 ,  B81B2201/0257 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0338 ,  B81B2203/04 ,  B81B2207/03 ,  H04R2201/003

Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

公开(公告)号：US11642818B2

公开(公告)日：2023-05-09

申请号：US16241684

申请日：2019-01-07

Applicant: NIKON CORPORATION

Inventor： Naoya Ishizawa ,  Taro Ueno ,  Masaaki Tanabe

IPC: B29C39/04 ,  B29C39/26 ,  B01J19/00 ,  G01N37/00 ,  B01L3/00 ,  B81C99/00

CPC classification number: B29C39/04 ,  B01J19/00 ,  B01L3/502738 ,  B29C39/26 ,  B81C99/0085 ,  G01N37/00 ,  B01L3/502707 ,  B01L2200/0689 ,  B01L2300/0887 ,  B01L2400/049 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/0672 ,  B81B2201/054 ,  B81C2201/034

Abstract: A method of manufacturing a fluidic device includes molding either one of the base member and the valve part with a first mold; and molding the other one of the base member and the valve part with a second mold with respect to the molded base member or the molded valve part.

公开(公告)号：US09505608B2

公开(公告)日：2016-11-29

申请号：US14713332

申请日：2015-05-15

Applicant: DunAn Microstaq, Inc.

Inventor： Parthiban Arunasalam ,  Chen Yang ,  E. Nelson Fuller ,  Joe A. Ojeda, Sr. ,  Gengxun Kara Gurley

IPC: F16K11/065 ,  B81B7/00 ,  F16K99/00

CPC classification number: B81B7/0061 ,  B81B2201/054 ,  B81B2203/0307 ,  B81B2203/0315 ,  F16K99/0011 ,  F16K99/0028 ,  F16K99/0044 ,  F16K2099/008

Abstract: A microvalve includes a displaceable member having an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. Each of the actuator ribs has a first portion and a second portion, the first portions each having an end connected to the central spine, the second portions each having an end connected to the central spine. A channel is formed in the plate. A plurality of elongated openings is formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges. One of the elongated openings separates each rib in the second portion of ribs from an adjacent rib or the plate. The channel and a longitudinally extending side edge of one of the elongated openings separate the second portion of the actuator ribs from the plate and define an electrical isolation region.

Abstract translation: 微型阀包括具有细长臂部分的可移动构件，通过中心脊连接到细长臂部分的多个致动器肋和铰链部分。 每个致动器肋具有第一部分和第二部分，第一部分各自具有连接到中心脊的端部，第二部分各自具有连接到中心脊部的端部。 在板中形成通道。 多个细长开口形成在板中并限定致动器肋，每个细长开口具有纵向延伸的侧边缘。 一个细长的开口将肋的第二部分中的每个肋与相邻的肋或板分开。 一个细长开口的通道和纵向延伸的侧边缘将致动器肋的第二部分与板分隔开并限定电隔离区。

公开(公告)号：US09492321B2

公开(公告)日：2016-11-15

申请号：US14618102

申请日：2015-02-10

Applicant: NOVARTIS AG

Inventor： Nicholas Max Gunn ,  Andrew David Johnson

IPC: A61F9/007 ,  F16K99/00 ,  A61F9/00

CPC classification number: A61F9/00781 ,  A61F9/0017 ,  A61F2250/0003 ,  A61M2205/0244 ,  A61M2210/0612 ,  B81B2201/054 ,  B81B2203/0127 ,  F16K99/0015 ,  F16K99/0057 ,  F16K2099/0088 ,  Y10T137/7895

Abstract: A microfluidic valve for implantation in an eye of a patient is disclosed. The valve may include a chamber formed between a substrate and a flexible membrane. The valve may also include a boss disposed in the chamber and having a top edge in selective contact with the flexible membrane. The top edge includes a relief portion and a non-relief portion, with the relief portion being structurally arranged so that a pressure required to separate the membrane from the relief portion is less than a pressure required to separate the membrane from the non-relief portion. The valve also may include an inlet extending through the boss and the substrate through which fluid enters the chamber and an outlet configured to allow fluid to exit the chamber. Methods for priming a microfluidic valve are also disclosed.

Abstract translation: 公开了一种用于植入患者眼睛的微流体阀。 阀可以包括形成在基底和柔性膜之间的腔室。 阀还可以包括设置在腔室中并具有与柔性膜选择性接触的顶边缘的凸台。 顶部边缘包括一个浮雕部分和一个非浮雕部分，其中该浮雕部分在结构上被布置成使得隔离该浮雕部分所需的压力小于将膜与该非浮雕部分分开所需的压力 。 阀还可以包括延伸穿过凸台和基底的入口，流体通过该基底进入腔室，以及出口，其构造成允许流体离开腔室。 还公开了引发微流控阀的方法。

公开(公告)号：US09409167B2

公开(公告)日：2016-08-09

申请号：US13808853

申请日：2011-04-25

Applicant: Florian Laouenan ,  Inigo Aranburu ,  Maria Agirregabiria ,  Jorge Elizalde ,  Javier Berganzo ,  Jesus Ruano ,  Luis J. Fernandez ,  Aitor Ezkerra

Inventor： Florian Laouenan ,  Inigo Aranburu ,  Maria Agirregabiria ,  Jorge Elizalde ,  Javier Berganzo ,  Jesus Ruano ,  Luis J. Fernandez ,  Aitor Ezkerra

IPC: B29C65/02 ,  B29C65/76 ,  B32B37/10 ,  B32B38/10 ,  C09J5/02 ,  C08J5/00 ,  B01L3/00 ,  B29C65/00 ,  B81C3/00 ,  F16K99/00 ,  B29L31/00

CPC classification number: B01L3/5027 ,  B29C65/76 ,  B29C66/028 ,  B29C66/112 ,  B29C66/114 ,  B29C66/53461 ,  B29C66/71 ,  B29C66/73117 ,  B29C66/7352 ,  B29C66/73921 ,  B29L2031/756 ,  B81B2201/054 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0015 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  B29K2023/38

Abstract: Fabrication method of microfluidic devices consisting of a sheet (1) which is 200 micrometer thick or less and a rigid part (3), both made of thermoplastic polymeric material includes degasification of a polymeric sheet of thermoplastic material (1), an auxiliary rigid part (2), and a polymeric rigid part of thermoplastic material (3). A temporary bonding procedure, of the degassed thermoplastic polymeric sheet (1) to a degassed auxiliary rigid part (2), is conducted producing a sheet-auxiliary part set (4). A permanent bonding procedure bonds the thermoplastic polymeric sheet (1) of the sheet-auxiliary part set (4) obtained in the previous temporary bonding stage, to the thermoplastic polymeric rigid part (3) which was initially degassed. The auxiliary rigid part (2) of the thermoplastic polymeric sheet (1) permanently bonded to the thermoplastic rigid part (3), is detached to produce a final part which is completely polymeric (5).

Abstract translation: 由热塑性聚合材料制成的由200微米厚或更小的片材（1）和刚性部分（3）组成的微流体装置的制造方法包括热塑性材料（1）的聚合物片脱模，辅助刚性部分 （2）和热塑性材料（3）的聚合物刚性部分。 进行脱气的热塑性聚合物片材（1）到脱气的辅助刚性部件（2）的临时粘结程序，产生片材辅助部件组件（4）。 永久性粘合方法将先前临时粘合阶段中获得的片材 - 辅助部件组（4）的热塑性聚合物片材（1）与最初脱气的热塑性聚合物刚性部件（3）结合。 永久地结合到热塑性刚性部分（3）上的热塑性聚合物片材（1）的辅助刚性部分（2）被分离以产生完全聚合的最终部件（5）。

公开(公告)号：US20150183633A1

公开(公告)日：2015-07-02

申请号：US14503252

申请日：2014-09-30

Applicant: California Institute of Technology

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

IPC: B81B3/00

CPC classification number: B32B3/00 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B81B3/0032 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6874 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/2224 ,  Y10T137/87716 ,  Y10T137/87804 ,  Y10T137/87812 ,  Y10T137/87893 ,  Y10T156/10 ,  Y10T156/1002 ,  Y10T156/1064 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

公开(公告)号：US20150057594A1

公开(公告)日：2015-02-26

申请号：US13975320

申请日：2013-08-24

Applicant: ALCON RESEARCH, LTD.

Inventor： Nicholas Max Gunn ,  Andrew David Johnson

IPC: A61F9/007

CPC classification number: A61F9/00781 ,  A61F9/0017 ,  A61F2250/0003 ,  A61M2205/0244 ,  A61M2210/0612 ,  B81B2201/054 ,  B81B2203/0127 ,  F16K99/0015 ,  F16K99/0057 ,  F16K2099/0088 ,  Y10T137/7895

Abstract: A microfluidic valve for implantation in an eye of a patient is disclosed. The valve may include a chamber formed between a substrate and a flexible membrane. The valve may also include a boss disposed in the chamber and having a top edge in selective contact with the flexible membrane. The top edge includes a relief portion and a non-relief portion, with the relief portion being structurally arranged so that a pressure required to separate the membrane from the relief portion is less than a pressure required to separate the membrane from the non-relief portion. The valve also may include an inlet extending through the boss and the substrate through which fluid enters the chamber and an outlet configured to allow fluid to exit the chamber. Methods for priming a microfluidic valve are also disclosed.

公开(公告)号：US20140322489A1

公开(公告)日：2014-10-30

申请号：US14218872

申请日：2014-03-18

Applicant: California Institute of Technology

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

IPC: F16K13/00

CPC classification number: B29C51/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B33Y80/00 ,  B81B5/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2201/034 ,  C12Q1/6874 ,  F04B43/043 ,  F15C1/06 ,  F15C5/00 ,  F16K11/20 ,  F16K13/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2224 ,  Y10T137/87249 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

公开(公告)号：US08846183B2

公开(公告)日：2014-09-30

申请号：US13278061

申请日：2011-10-20

Applicant: Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

IPC: B32B3/00 ,  F16C1/06 ,  F16K1/00 ,  F16K7/00 ,  F16K31/145 ,  B29C65/00 ,  B29C45/14 ,  B01L3/00 ,  C12Q1/68 ,  B81C1/00 ,  F04B43/04 ,  F15C5/00 ,  B01L9/00 ,  F16K99/00 ,  B32B37/10 ,  B01L7/00

CPC classification number: B32B3/00 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B81B3/0032 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6874 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/2224 ,  Y10T137/87716 ,  Y10T137/87804 ,  Y10T137/87812 ,  Y10T137/87893 ,  Y10T156/10 ,  Y10T156/1002 ,  Y10T156/1064 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：US20140065653A1

公开(公告)日：2014-03-06

申请号：US13679328

申请日：2012-11-16

Applicant: California Institute of Technology

Inventor： Sebastian J. Maerkl ,  Todd A. Thorsen ,  Xiaoyan Bao ,  Stephen R. Quake ,  Vincent Studer

IPC: C12Q1/28

CPC classification number: C12Q1/28 ,  B01L3/5025 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/0214 ,  B81B2201/054 ,  B81B2201/07 ,  B81C1/00119 ,  F15C5/00 ,  F16K11/20 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T137/0318 ,  Y10T137/0329 ,  Y10T137/2224 ,  Y10T137/85938 ,  Y10T137/87249

Abstract: High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

Abstract translation: 高密度微流控芯片包含具有数千个微机械阀门和数百个单独可寻址腔室的管道网络。 这些流体装置类似于使用大规模集成（LSI）制造的电子集成电路。 这些网络的一个组件是流体多路复用器，它是二进制阀模式的组合阵列，通过允许使用最少数量的输入的复杂流体操纵来指数地增加网络的处理能力。 这些集成的微流体网络可用于构建各种高度复杂的微流体装置，例如比较器阵列的微流体模拟装置和类似于电子随机存取存储器的微流体存储器存储装置。