公开(公告)号：US11658000B2

公开(公告)日：2023-05-23

申请号：US16916720

申请日：2020-06-30

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Tomohiro Haruta ,  Yuta Ikeda ,  Tomohisa Fukuda

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2002 ,  H01J2237/2007

Abstract: There is provided a sample support capable of easily placing a sample into position. The sample support is used such that a sample floating on the surface of water is scooped and held. The sample support has: a first region on which the sample is to be placed; and a second region of higher wettability than the first region.

公开(公告)号：US20190080882A1

公开(公告)日：2019-03-14

申请号：US16185519

申请日：2018-11-09

Applicant: Protochips, Inc.

Inventor： Franklin Stampley Walden, II ,  John Damiano, JR. ,  Daniel Stephen Gardiner ,  David P. Nackashi ,  William Bradford Carpenter

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003

Abstract: A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.

公开(公告)号：US09958362B1

公开(公告)日：2018-05-01

申请号：US15263949

申请日：2016-09-13

Applicant: The Florida State University Research Foundation, Inc.

Inventor： Michael G. Roper ,  Nikita Mukhitov ,  Scott Stagg ,  John Spear

IPC: G01N1/30 ,  G01N1/31 ,  H01J37/20

CPC classification number: G01N1/312 ,  G01N1/30 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2602

Abstract: A sample preparation device for electron microscopy (EM) that is configured to eliminate user-to-user variations and environment contaminations, which are often present in the conventional method of sample preparation. The device not only provides a means for evenly and reproducibly delivering a fluid or sample to an EM grid, but also provides a means for sealing the EM grid in an air-tight chamber and delivering air-sensitive samples to the EM grid. The platform may comprise readily fabricated glass chips with features integrated to preserve the integrity of the sample grid and to facilitate its extraction. The methods may eliminate the element of user dependent variability and thus improve the throughput, reproducibility and translation of these methods.

公开(公告)号：US09915926B2

公开(公告)日：2018-03-13

申请号：US14816332

申请日：2015-08-03

Applicant: PROTOCHIPS, INC.

Inventor： Daniel S. Gardiner ,  John Damiano, Jr. ,  David P. Nackashi ,  William Bradford Carpenter ,  James Rivenbark ,  Mark Uebel ,  Michael Zapata, III ,  Rebecca Thomas ,  Franklin Stampley Walden, II

IPC: G05D7/00 ,  G05B9/02 ,  H01J37/20 ,  G05D7/06 ,  G01M3/32 ,  H01J37/18

CPC classification number: G05B9/02 ,  G01M3/3272 ,  G05D7/0635 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2802

Abstract: System and method for safely controlling the containment of gas within a manifold system and the delivery of gas to a sample holder for an electron microscope for imaging and analysis.

公开(公告)号：US20180003567A1

公开(公告)日：2018-01-04

申请号：US15198701

申请日：2016-06-30

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Klaus Petry ,  Jason M. Schaller ,  Ala Moradian ,  Morgan D. Evans

IPC: G01K5/48 ,  H05B3/00 ,  G01B11/00 ,  H01J37/317 ,  H05B1/02

CPC classification number: G01K5/486 ,  G01B11/00 ,  H01J37/3171 ,  H01J37/3178 ,  H01J37/32715 ,  H01J2237/2002 ,  H01J2237/20221 ,  H05B1/0233 ,  H05B3/0047

Abstract: An improved system and method of measuring the temperature of a workpiece being processed is disclosed. The temperature measurement system determines a temperature of a workpiece by measuring the amount of expansion in the workpiece due to thermal expansion. The amount of expansion may be measured using a number of different techniques. In certain embodiments, a light source and a light sensor are disposed on opposite sides of the workpiece. The total intensity of the signal received by the light sensor may be indicative of the dimension of the workpiece. In another embodiment, an optical micrometer may be used. In another embodiment, a light sensor may be used in conjunction with a separate device that measures the position of the workpiece.

公开(公告)号：US20170370814A1

公开(公告)日：2017-12-28

申请号：US15543326

申请日：2016-01-14

Applicant: Leica Mikrosysteme GmbH

Inventor： Leander GAECHTER ,  Günther BOCK ,  Thomas PFEIFER

IPC: G01N1/42 ,  G01L19/00 ,  G01K13/00

CPC classification number: G01N1/42 ,  G01K13/006 ,  G01L19/00 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2004 ,  H01J2237/204

Abstract: The invention relates to a sample transfer device (10) for reception of a sample, having a transfer rod (4) that is configured for reception of a sample holder, the sample holder to be arranged in a chamber (1) of the sample transfer device (10) for the purpose of transferring the sample to a processing unit or analytical unit (200), at least one measurement device (3, 8) for measuring a physical variable being arranged inside the sample transfer device (10).

公开(公告)号：US09842724B2

公开(公告)日：2017-12-12

申请号：US15012599

申请日：2016-02-01

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/28 ,  G03F1/62 ,  G03F1/86

CPC classification number: H01J37/28 ,  G03F1/62 ,  G03F1/86 ,  H01J37/244 ,  H01J2237/2002 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2817

Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

公开(公告)号：US09789461B2

公开(公告)日：2017-10-17

申请号：US15472985

申请日：2017-03-29

Applicant: XYLECO, INC.

Inventor： Marshall Medoff ,  Thomas Craig Masterman ,  Robert Paradis

IPC: A61L11/00 ,  B01D39/18 ,  G21K5/10 ,  B01J19/08 ,  D21B1/02 ,  B65G27/04 ,  H01J37/20

CPC classification number: G21F3/00 ,  A61L2/087 ,  B01J19/082 ,  B01J19/085 ,  B01J19/12 ,  B01J19/123 ,  B01J19/125 ,  B01J19/22 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0879 ,  B01J2219/12 ,  B01J2219/1203 ,  B65G27/04 ,  C08H8/00 ,  C10B19/00 ,  C10B53/02 ,  C10G1/02 ,  C10G32/04 ,  C10L5/403 ,  C10L5/442 ,  C10L5/445 ,  C10L5/46 ,  C10L2200/0469 ,  C10L2290/24 ,  C10L2290/28 ,  C10L2290/36 ,  C10L2290/52 ,  C13K1/02 ,  C13K13/002 ,  D21B1/02 ,  G21K5/04 ,  G21K5/10 ,  H01J5/18 ,  H01J33/04 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/2002 ,  H01J2237/202 ,  Y02E50/10 ,  Y02E50/14 ,  Y02E50/16 ,  Y02E50/30 ,  Y02E50/32 ,  Y02P20/145

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, while cooling equipment and the biomass to prevent overheating and possible distortion and/or degradation. The biomass is conveyed by a conveyor, which conveys the biomass under an electron beam from an electron beam accelerator. The conveyor can be cooled with cooling fluid. The conveyor can also vibrate to facilitate exposure to the electron beam. The conveyor can be configured as a trough that can be optionally cooled.

公开(公告)号：US20170140845A1

公开(公告)日：2017-05-18

申请号：US15298139

申请日：2016-10-19

Applicant: XYLECO, INC.

Inventor： Marshall Medoff ,  Thomas Craig Masterman ,  Robert Paradis

IPC: G21F3/00 ,  H01J37/20 ,  H01J37/317 ,  C08H8/00 ,  C13K13/00 ,  C13K1/02 ,  B01J19/08 ,  B01J19/12 ,  C10G1/02 ,  C10L5/44 ,  C10L5/40 ,  C10L5/46 ,  C10B53/02 ,  C10B19/00 ,  A61L2/08

CPC classification number: G21F3/00 ,  A61L2/087 ,  B01J19/082 ,  B01J19/085 ,  B01J19/12 ,  B01J19/123 ,  B01J19/125 ,  B01J19/22 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0879 ,  B01J2219/12 ,  B01J2219/1203 ,  B65G27/04 ,  C08H8/00 ,  C10B19/00 ,  C10B53/02 ,  C10G1/02 ,  C10G32/04 ,  C10L5/403 ,  C10L5/442 ,  C10L5/445 ,  C10L5/46 ,  C10L2200/0469 ,  C10L2290/24 ,  C10L2290/28 ,  C10L2290/36 ,  C10L2290/52 ,  C13K1/02 ,  C13K13/002 ,  D21B1/02 ,  G21K5/04 ,  G21K5/10 ,  H01J5/18 ,  H01J33/04 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/2002 ,  H01J2237/202 ,  Y02E50/10 ,  Y02E50/14 ,  Y02E50/16 ,  Y02E50/30 ,  Y02E50/32 ,  Y02P20/145

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, in a vault in which the equipment is protected from radiation and hazardous gases by equipment enclosures. The equipment enclosures may be purged with gas.

公开(公告)号：US09601306B2

公开(公告)日：2017-03-21

申请号：US14641478

申请日：2015-03-09

Applicant: Hitachi, Ltd.

Inventor： Naruo Watanabe ,  Yoshio Takahashi

IPC: H01J37/20 ,  H01J37/26 ,  G01L1/22

CPC classification number: H01J37/20 ,  G01L1/2262 ,  H01J37/261 ,  H01J2237/15 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/24578 ,  H01J2237/24585 ,  H01J2237/2602

Abstract: A sample micromotion mechanism adapted to minimize an influence of a disturbance and adjust a sample drift rapidly and with high accuracy, and designed so as to be a compact, easy-to-place sample micromotion mechanism of a side-entry type that suppresses the occurrence of the sample drift and generates/displays high-resolution monitoring images and precisely drawn patterns. A charged particle device employing the sample micromotion mechanism operates followed by deformation which causes a strain. A strain measuring unit measures such strain. The sample micromotion mechanism imparts micromotion so as to reduce the strain in accordance with the measured strain value, thereby reducing deformation of the sample micromotion mechanism.