公开(公告)号：US20170263414A1

公开(公告)日：2017-09-14

申请号：US15174323

申请日：2016-06-06

Applicant: Taiwan Electron Microscope Instrument Corporation

Inventor： FU-RONG CHEN ,  Tsu-Wei HUANG ,  Shih-Yi LIU ,  I-Jiun CHEN ,  CHIH WEI CHEN ,  Ying-Shuo TSENG ,  Yu-Shan HUANG ,  Hsin-Yu LIN ,  Jian-Min FANG ,  Chin-Liang HSU ,  LI-CHIAO YANG

IPC: H01J37/26 ,  H01J37/16 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/162 ,  H01J2237/166 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/202

Abstract: An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.

公开(公告)号：US09589765B2

公开(公告)日：2017-03-07

申请号：US14364530

申请日：2012-12-26

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Toshihiko Ogura

IPC: G21K5/08 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G21K5/08 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2813

Abstract: When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film and a conductive thin film at a site of electron beam injection, the potential barrier of the surface of the insulative thin film becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film tunnel to the conductive thin film along the potential gradient. The secondary electrons, having tunneled, reach a sample while diffusing in the conductive thin film. In the case where the sample is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample. The secondary electrons are detected to acquire an SEM image in which the inner structure of the sample is reflected.

Abstract translation: 当电子注入样品支撑构件时，在电子束注入位置处导致绝缘薄膜和导电薄膜之间的电势梯度，绝缘薄膜表面的势垒变薄，并且电子发射现象 是由隧道效应造成的。 二次电子在绝缘薄膜隧道中引发导电薄膜沿着电位梯度。 已经隧穿的二次电子在导电薄膜中扩散时到达样品。 在样品是具有高电子透射率的样品（例如生物样品）的情况下，二次电子也穿过样品的内部。 检测二次电子以获得样品的内部结构被反射的SEM图像。

公开(公告)号：US09557253B2

公开(公告)日：2017-01-31

申请号：US14343537

申请日：2012-09-07

Applicant: Takahiko Hariyama ,  Yasuharu Takaku ,  Hiroshi Suzuki ,  Yoshinori Muranaka ,  Isao Ohta ,  Masatsugu Shimomura ,  Daisuke Ishii

Inventor： Takahiko Hariyama ,  Yasuharu Takaku ,  Hiroshi Suzuki ,  Yoshinori Muranaka ,  Isao Ohta ,  Masatsugu Shimomura ,  Daisuke Ishii

IPC: H01J37/00 ,  G01N1/44 ,  G01N23/225 ,  G01N23/04 ,  H01J37/20 ,  G01N1/28

CPC classification number: G01N1/44 ,  G01N1/2853 ,  G01N23/04 ,  G01N23/225 ,  G01N23/2252 ,  G01N2223/612 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2004

Abstract: Provided is an observation method by an electron microscope, in which a biological sample can be observed as it is alive and a situation that the biological sample is moving can be observed using an electron microscope, and a composition for evaporation suppression under vacuum, a scanning electron microscope, and a transmission electron microscope used in the method.The sample observation method by an electron microscope according to the invention includes applying a composition for evaporation suppression containing at least one kind selected from an amphiphilic compound, oils and fats, and an ionic liquid to the surface of a sample to form a thin film, and covering the sample with the thin film, and displaying an electron microscopic image of the sample, which is covered with the thin film and accommodated in a sample chamber under vacuum, on a display device.

Abstract translation: 通过根据本发明的电子显微镜的样品观察方法包括将包含选自两亲性化合物，油和脂肪中的至少一种的蒸发抑制组合物和离子液体施加到样品的表面以形成薄膜， 并用薄膜覆盖样品，并在显示装置上显示被薄膜覆盖并在真空下容纳在样品室中的样品的电子显微镜图像。

公开(公告)号：US09472375B2

公开(公告)日：2016-10-18

申请号：US14443293

申请日：2013-11-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC: G21K5/04 ,  H01J37/26 ,  H01J37/20 ,  H01J37/16 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

Abstract: A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

Abstract translation: 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

公开(公告)号：US20160189919A1

公开(公告)日：2016-06-30

申请号：US14911723

申请日：2014-08-12

Applicant: MEDICAL RESEARCH COUNCIL

Inventor： Lori A. PASSMORE ,  Christopher J. RUSSO

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/06

CPC classification number: H01J37/20 ,  H01J37/06 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/2004 ,  H01J2237/26

Abstract: An electron microscopy sample support comprises: a support member; and a metal foil comprising a porous region. The support member is configured to give structural stability to the metal foil, and the porous region of the metal foil is configured to receive an electron microscopy sample. Also provided is a method of manufacturing such an electron microscopy sample support, a method of imaging using such an electron microscopy sample support and an apparatus operable to perform such imaging. An electron microscopy specimen support in accordance with aspects and embodiments may reduce particle motion and/or sample char ging in electron microscopy, and thus improve information content available from electron micrographs. Appropriately designed and constructed supports may lead to an increased resolution per particle and increased accuracy of angular assignments in 3D reconstructions of for example, biological specimens. This may enable the determination of structures of smaller and more difficult proteins than was previously possible using EM techniques.

Abstract translation: 电子显微镜样品载体包括：支撑构件; 以及包含多孔区域的金属箔。 支撑构件被配置为给予金属箔的结构稳定性，并且金属箔的多孔区域构造成接收电子显微镜样品。 还提供了制造这种电子显微镜样品载体的方法，使用这种电子显微镜样品支架成像的方法和可操作以执行这种成像的装置。 根据方面和实施方案的电子显微镜样品载体可以减少电子显微镜中的粒子运动和/或样品特征，从而改善从电子显微照片可获得的信息含量。 适当设计和构造的支撑可以导致例如生物样本的3D重建中每个颗粒的分辨率提高和角度分配的准确性。 这可以使得能够测定比以前使用EM技术更小和更困难的蛋白质的结构。

公开(公告)号：US20150022807A1

公开(公告)日：2015-01-22

申请号：US14384770

申请日：2013-03-12

Applicant: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)

Inventor： Graham Knott

IPC: G01N21/01 ,  H01J37/26

CPC classification number: G01N21/01 ,  G01N1/06 ,  G02B21/34 ,  H01J37/20 ,  H01J37/261 ,  H01J2237/2004 ,  H01J2237/2007 ,  H01J2237/20214

Abstract: This device is for holding samples during their preparation prior to imaging in the electron microscope. The design means it can be transferred between the light and electron microscopes as well as trimming devices used to prepare the final sample. It can also be used at both ambient and cryo temperatures down to −110° C. The device consists of a base plate that can be held on the stage of a light microscope. It has an aperture through which transmitted light can pass. In this aperture is a clamp which holds a small transparent plastic sphere; the sample sphere. The sample for preparation is bonded to this sphere. The shape of this clamp and sphere means that the sample can be held at any angle to allow for optimal imaging in any light microscope and in the trimming devices, including the ultramicrotome. Once trimmed, the entire universal sample holder can then be transferred into the scanning electron microscope, or held in the ultramicrotome for thin sectioning.

Abstract translation: 该装置用于在电子显微镜成像之前准备样品。 该设计意味着它可以在光和电子显微镜之间转移，以及用于制备最终样品的修整装置。 它也可以在低于-110°C的环境温度和低温条件下使用。该设备由可以保持在光学显微镜的平台上的基板组成。 它具有透射光可以通过的孔径。 该孔是夹持小透明塑料球的夹具; 样品球体。 用于制备的样品结合到该球体上。 该夹具和球体的形状意味着样品可以保持任何角度，以允许任何光学显微镜和修剪装置（包括超薄切片机）中的最佳成像。 一旦修整，整个通用样品架可以转移到扫描电子显微镜中，或者保持在超薄切片机中用于薄切片。

公开(公告)号：US08158937B2

公开(公告)日：2012-04-17

申请号：US12546069

申请日：2009-08-24

Applicant: Mitsuru Koizumi ,  Hidetoshi Nishiyama

Inventor： Mitsuru Koizumi ,  Hidetoshi Nishiyama

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J2237/022 ,  H01J2237/0268 ,  H01J2237/2004 ,  H01J2237/2608

Abstract: A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.

Abstract translation: 提供一种粒子束系统，其可以防止物镜内部的污染，物镜位于光学柱的前端。 粒子束系统具有装备有用于发射粒子束的粒子束源和光束通过的射束通过管的光学柱。 该系统还包括与柱的前端部连接的真空室。 通过管道的梁从柱的前端释放。 内管可拆卸地设置在位于塔的前端侧的梁通道管内。

公开(公告)号：US20120017415A1

公开(公告)日：2012-01-26

申请号：US13239632

申请日：2011-09-22

Applicant: Charles P. MARSH ,  Eric OLSON ,  Todor I. DONCHEV ,  Ivan PETROV ,  Jianguo WEN ,  Ryan FRANKS ,  Dongxiang LIAO

Inventor： Charles P. MARSH ,  Eric OLSON ,  Todor I. DONCHEV ,  Ivan PETROV ,  Jianguo WEN ,  Ryan FRANKS ,  Dongxiang LIAO

IPC: B23P11/00

CPC classification number: H01J37/26 ,  G02B21/34 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/28 ,  Y10T29/49826

Abstract: A method for using a reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. The method may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, the method provides a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Abstract translation: 一种使用可重复使用的样品保持装置的方法，用于容易地加载非常小的湿样品，以通过微观设备特别是在真空环境中观察样品。 该方法可以用扫描电子显微镜（SEM），透射电子显微镜（TEM），X射线显微镜，光学显微镜等来使用。 为了观察样品，该方法提供了在两个硅晶片的每一个的中心蚀刻的薄膜窗口，其邻接以将样品容纳在窗口之间形成的小的均匀间隙中。 该间隙可以通过使用间隔物来调节。 或者，通过其中包含样品的流体建立的膜的厚度确定了间隙而不需要间隔物。 为了优化分辨率，每个窗口可以具有大约50nm的厚度，并且间隙可以在50nm量级。

公开(公告)号：US07880144B2

公开(公告)日：2011-02-01

申请号：US12223012

申请日：2007-01-19

Applicant: Susumu Kuwabata ,  Tsukasa Torimoto

Inventor： Susumu Kuwabata ,  Tsukasa Torimoto

IPC: H01J37/26 ,  G21K5/08

CPC classification number: G01N23/225 ,  G01N1/30 ,  H01J37/20 ,  H01J2237/0044 ,  H01J2237/2004

Abstract: An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of observing a real shape or the like of a sample with a SEM, a TEM or the like. For the purpose of achieving the above-described object, the present invention uses an electrical conductivity-imparting liquid medium, for use in a microscope, which includes an ionic liquid as an essential component thereof and is impregnated into the entirety of a SEM or TEM sample or applied to the observation surface of a SEM or TEM sample to impart electrical conductivity at least to the observation surface of the sample. According to the present invention, the charge built up on the sample surface can be released simply by impregnating or coating the sample with the ionic liquid, and hence the problem of charge-up can be easily solved. Further, even when a sample impregnated or coated with the ionic liquid is placed under vacuum, the ionic liquid is not evaporated from the sample, and hence a biological sample can be observed as it is in an original shape.

Abstract translation: 本发明的目的是提供一种介质; 标本 制备样品的方法; 观察样本的方法; 样品池; 以及可以容易地解决充电问题的电子显微镜，并且还能够用SEM，TEM等观察样品的实际形状等。 为了实现上述目的，本发明使用导电性赋予液体介质，用于显微镜中，其包括离子液体作为其主要成分并浸渍在整个SEM或TEM中 样品或施加到SEM或TEM样品的观察表面，以至少将样品的观察表面赋予导电性。 根据本发明，可以简单地通过用离子液体浸渍或涂布样品来释放在样品表面上积聚的电荷，因此可以容易地解决充电问题。 此外，即使将浸渍或涂布有离子液体的样品置于真空下，离子液体也不会从样品中蒸发，因此可以原样观察生物样品。

公开(公告)号：US20100276277A1

公开(公告)日：2010-11-04

申请号：US12432037

申请日：2009-04-29

Applicant: S. Jay Chey ,  Mark den Heijer ,  Aparna Prabhakar ,  Frances M. Ross ,  Ranjani Sirdeshmukh

Inventor： S. Jay Chey ,  Mark den Heijer ,  Aparna Prabhakar ,  Frances M. Ross ,  Ranjani Sirdeshmukh

IPC: C25B9/06

CPC classification number: G01N27/416 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/26

Abstract: An electrochemical cell apparatus is disclosed where the cell has a chamber for containing an electrolyte. The chamber is situated between a bottom and a top substrate. One or more bottom windows are in the bottom substrate and one or more top windows are in the top substrate. Each window has a window cover facing the chamber. The top window and bottom window each have a portion in alignment so that an electron beam passes through both respective portions. A spacer is deposited between the top and bottom substrate and forming walls surrounding the chamber. Two or more electrodes, each having an interior portion that is within the chamber and electrically continuous with an exterior portion external to the chamber, are located on the chamber side of the bottom substrate.

Abstract translation: 公开了一种电化学电池装置，其中电池具有用于容纳电解质的室。 腔室位于底部和顶部衬底之间。 一个或多个底部窗口位于底部基板中，并且一个或多个顶部窗口位于顶部基板中。 每个窗口都有一个朝向腔室的窗口盖。 顶窗和底窗各自具有对准的部分，使得电子束通过两个相应的部分。 间隔件沉积在顶部和底部基底之间以及形成围绕该腔室的壁。 两个或更多个电极，每个具有位于室内部的内部部分并且与室外部的外部部分电连接，位于底部基板的腔室侧。