公开(公告)号：US20030104129A1

公开(公告)日：2003-06-05

申请号：US10254884

申请日：2002-09-24

Applicant: Matsushita Electric Industrial Co., Ltd.

Inventor： Norihisa Mino ,  Mitsuo Ebisawa ,  Yoshiaki Oono ,  Kazufumi Ogawa

IPC: B05D003/12

CPC classification number: B82Y30/00 ,  B05C1/02 ,  B05C1/06 ,  B05C9/14 ,  B05D1/185 ,  B05D3/0486 ,  B05D5/08 ,  B82Y40/00 ,  C03C17/28 ,  C03C17/30 ,  C04B41/009 ,  C04B41/4933 ,  C04B41/84 ,  C04B35/10

Abstract: A compound represented by a general formula (1) ABXn (where A is a carbon-containing group; B is at least one element selected from Si, Ge, Sn, Ti and Zr; X is a hydrolyzable group; and n is 1, 2 or 3), for example, a chlorosilane compound having a fluorocarbon group, is measured in an amount required for one time application, and dropped from a nozzle on a surface of a substrate having an active hydrogen on the surface, and simultaneously it is rubbed with a coater made of a sponge or a nonwoven fabric, etc. Furthermore, it is rubbed with a coater made of a sponge or a nonwoven fabric, etc. while blowing a dry warm air, and an elimination reaction is caused between the active hydrogen on the surface of the substrate and the hydrolyzable group of the compound. Thus, the compound is covalently bonded to the substrate. The molecules of the is silane compound also are polymerized with one another to be fixed. Thus can be provided a coating film and a method and an apparatus for producing the same, in which: an amount of a liquid required for forming a film is decreased even when the substrate has an irregular shape and a large size; it is not necessary to be concerned for the pot life of a coating solution; the substrate is manipulated easily; and cost is low.

Abstract translation: 由通式（1）表示的化合物ABXn（其中A是含碳基团; B是选自Si，Ge，Sn，Ti和Zr中的至少一种元素; X是可水解基团; n是1， 2或3）例如具有碳氟化合物基团的氯代硅烷化合物以一次施加所需的量测量，并从表面上具有活性氢的基材的表面上的喷嘴滴落，同时它 用由海绵或无纺布制成的涂布机进行擦拭等。此外，用吹制干燥暖风的海绵或无纺布等涂布机进行擦拭，并且在活性物质之间产生消除反应 底物表面上的氢和化合物的可水解基团。 因此，化合物共价结合到基材上。 硅烷化合物的分子也彼此聚合而固定。 因此，可以提供一种涂膜及其制造方法和装置，其中：即使当基板具有不规则形状和大尺寸时，形成膜所需的液体量也减少; 不必关心涂布液的适用期; 基板操作容易; 成本低廉。

公开(公告)号：US06534127B2

公开(公告)日：2003-03-18

申请号：US09938674

申请日：2001-08-27

Applicant: Souji Ohmoto ,  Tohru Takeuchi ,  Akira Kasari ,  Hiroshi Shimizu ,  Satoshi Ino

Inventor： Souji Ohmoto ,  Tohru Takeuchi ,  Akira Kasari ,  Hiroshi Shimizu ,  Satoshi Ino

IPC: B05D136

CPC classification number: B05B3/1014 ,  B05B3/001 ,  B05B3/1092 ,  B05D3/0486 ,  B05D7/572 ,  B05D7/574

Abstract: In a coating film formation method in which the thermosetting water-borne color paint (A) is coated on the surface of the substrate, then a thermosetting water-borne paint containing color pigment and/or glittering pigment (B) is coated on said coated surface, and, after predrying as necessary, a thermosetting clear paint (C) is coated and after that said 3-layer coating films of (A), (B) and (C) are simultaneously cured by heating, the solid content of the wet coat is controlled by an air jet step in which the air, whose temperature and/or humidity are controlled, is jetted from behind the paint nozzle in approximately the same direction as the atomized particles of said thermosetting water color paint (A) move to the surface of the substrate, when said paint is coated, around the spray pattern so that the air touches said pattern.

公开(公告)号：US20020090461A1

公开(公告)日：2002-07-11

申请号：US09938674

申请日：2001-08-27

Inventor： Souji Ohmoto ,  Tohru Takeuchi ,  Akira Kasari ,  Hiroshi Shimizu ,  Satoshi Ino

IPC: B05D003/02 ,  B05D001/36 ,  B05D003/04

CPC classification number: B05B3/1014 ,  B05B3/001 ,  B05B3/1092 ,  B05D3/0486 ,  B05D7/572 ,  B05D7/574

Abstract: In a coating film formation method in which the thermosetting water-borne color paint (A) is coated on the surface of the substrate, then a thermosetting water-borne paint containing color pigment and/or glittering pigment (B) is coated on said coated surface, and, after predrying as necessary, a thermosetting clear paint (C) is coated and after that said 3-layer coating films of (A), (B) and (C) are simultaneously cured by heating, the solid content of the wet coat is controlled by an air jet step in which the air, whose temperature and/or humidity are controlled, is jetted from behind the paint nozzle in approximately the same direction as the atomized particles of said thermosetting water color paint (A) move to the surface of the substrate, when said paint is coated, around the spray pattern so that the air touches said pattern.

Abstract translation: 在将热固性水性着色漆（A）涂布在基材表面上的涂膜形成方法中，将含有着色颜料和/或闪光颜料（B）的热固性水性涂料涂布在所述涂布 表面，并且根据需要预干燥后，涂布热固性透明涂料（C），之后，通过加热同时使（A），（B）和（C）的3层涂膜同时固化， 湿涂层通过空气喷射步骤控制，其中控制温度和/或湿度的空气沿着与所述热固性水性颜料（A）的雾化颗粒移动到大致相同的方向从喷漆器后面喷射， 当所述涂料涂覆时，基材的表面围绕喷雾图案，使得空气接触所述图案。

公开(公告)号：US06339012B1

公开(公告)日：2002-01-15

申请号：US09450991

申请日：1999-11-29

Applicant: Thomas Jackson ,  Jianna Wang

Inventor： Thomas Jackson ,  Jianna Wang

IPC: H01L2120

CPC classification number: B05D1/18 ,  B05D3/0486 ,  H01L51/0012

Abstract: In a method for fabricating a thin film of polymer, particularly a semiconducting thin film of polymer with an improved structural order, wherein the thin film is formed by deposition of a polymer material onto a solid substrate material from a polymer solution formed by means of a solvent, the polymer solution is provided in a closed container such that a free volume is left in the container above the polymer solution and the substrate material immersed in the solution, whereupon the substrate material with a thin film deposited thereon is withdrawn from the polymer solution with a withdrawal speed being selected dependent on the concentration of the polymer solution, until the substrate material is located in the free volume a certain distance above the polymer solution. The substrate material is kept in vertical position in the free volume while the solvent evaporates, whereupon the substrate material with the thin film is removed from the container for further drying in a vacuum oven.—Use in fabrication of organic thin-film transistors.

Abstract translation: 在制造聚合物薄膜，特别是具有改进的结构顺序的聚合物的半导体薄膜的方法中，其中所述薄膜是通过将聚合物材料沉积在固体基质材料上而形成的，所述聚合物材料由通过 溶剂中，将聚合物溶液设置在密闭容器中，使得容器在聚合物溶液上方留下自由体积，浸渍在溶液中的基材，随后将沉积有薄膜的基底材料从聚合物溶液中取出 其中取决于聚合物溶液的浓度的取出速度，直到基材材料位于聚合物溶液上方一定距离的自由体积中。 将基底材料保持在自由体积的垂直位置，同时溶剂蒸发，随后将具有薄膜的基底材料从容器中取出，以便在真空烘箱中进一步干燥。 - 用于制造有机薄膜晶体管。

公开(公告)号：US20010053409A1

公开(公告)日：2001-12-20

申请号：US09780797

申请日：2001-02-09

Inventor： Toshihiro Akimori

IPC: B05D005/06 ,  B05D003/04 ,  B05D003/12

CPC classification number: G11B7/246 ,  B05D3/0486 ,  G11B7/007 ,  G11B7/2533 ,  G11B7/2534 ,  G11B7/259 ,  G11B7/2595 ,  G11B7/26

Abstract: A recording medium based on the organic dye having excellent storage reliability is to be produced. In producing an optical recording medium having on a substrate a recording layer containing an organic dyestuff and a metal layer, the metal layer is first formed, and the atmosphere of a transport path used for transferring the resulting product to the next stage is set to the relative humidity of 40% or less. The metal layer may e.g., be a reflective layer. In controlling the relative humidity, a shielding plate is provided around the transport path and the relative humidity of an area encircled by this shielding plate is controlled by an air conditioner.

Abstract translation: 可以制造出具有良好存储可靠性的基于有机染料的记录介质。 在制造在基板上具有包含有机染料和金属层的记录层的光学记录介质时，首先形成金属层，并将用于将所得产物转移到下一级的输送路径的气氛设定为 相对湿度在40％以下。 金属层可以例如是反射层。 在控制相对湿度时，围绕输送路径设置遮蔽板，由该遮蔽板包围的区域的相对湿度由空调器控制。

公开(公告)号：US20010026839A1

公开(公告)日：2001-10-04

申请号：US09812549

申请日：2001-03-21

Inventor： Masami Akimoto ,  Yoichi Deguchi

IPC: B05D003/06 ,  B05D005/00

CPC classification number: H01L21/6715 ,  B05D1/005 ,  B05D3/0263 ,  B05D3/0486 ,  B05D3/0493 ,  B05D3/068 ,  B05D5/00 ,  H01L21/31 ,  H01L21/3105

Abstract: A closed space is formed in a reduced pressure drying station, and the closed space is brought to a vacuum state. In this state, an EB unit irradiates a wafer mounted on a hot plate with an electron beam to foam an insulating film material. Subsequently, the hot plate is raised to a predetermined temperature, and drying processing is performed under a reduced pressure. As described above, since the foaming processing is performed in the reduced pressure drying station, bubbles remain in the insulating film, so that the existence of the bubbles can decrease the relative dielectric constant.

Abstract translation: 在减压干燥站中形成封闭空间，封闭空间成为真空状态。 在这种状态下，EB单元用电子束照射安装在热板上的晶片，以发泡绝缘膜材料。 随后，将热板升高至预定温度，并在减压下进行干燥处理。 如上所述，由于在减压干燥站中进行发泡处理，所以在绝缘膜中残留有气泡，使得气泡的存在可以降低相对介电常数。

公开(公告)号：US5989638A

公开(公告)日：1999-11-23

申请号：US61822

申请日：1993-05-13

Applicant: Kenneth Andrew Nielsen

Inventor： Kenneth Andrew Nielsen

IPC: B05B7/00 ,  B05D1/02 ,  B05D3/04

CPC classification number: B05D1/02 ,  B05B7/00 ,  B05D1/025 ,  B05D3/0466 ,  B05D3/0486 ,  B05D2401/90

Abstract: The invention is directed to a method and apparatus for coating substrates by a liquid spray so as to avoid entrapment of gaseous bubbles, particularly air bubbles, in the coating and desirably to thereby obtain bubble-free coatings. More particularly, the invention involves spray applying the coating to a substrate in an atmosphere consisting of gases having appreciable solubility in the applied coating, such as carbon dioxide, such that gas bubbles that may become entrapped in the coating are removed after application by the gases dissolving into the coating and diffusing to the surface.

Abstract translation: 本发明涉及一种用于通过液体喷涂来涂覆基材的方法和装置，以避免在涂层中夹带气泡，特别是气泡，并期望从而获得无气泡的涂层。 更具体地说，本发明涉及将涂层喷涂到由涂覆涂层（例如二氧化碳）中具有明显溶解度的气体组成的气氛中，使得可能被包埋在涂层中的气泡在气体施加之后被去除 溶解在涂层中并扩散到表面。

公开(公告)号：US5976630A

公开(公告)日：1999-11-02

申请号：US939617

申请日：1997-09-29

Applicant: Solomon T. Korokeyi ,  Kenneth J. Ruschak ,  Kurt S. Hardenbrook ,  Douglas S. Finnicum ,  Robert J. Deprez

Inventor： Solomon T. Korokeyi ,  Kenneth J. Ruschak ,  Kurt S. Hardenbrook ,  Douglas S. Finnicum ,  Robert J. Deprez

IPC: B05C5/00 ,  B05D1/30 ,  B05D3/04 ,  G03C1/74 ,  B05C1/00

CPC classification number: G03C1/74 ,  B05C5/008 ,  B05D1/305 ,  B05D3/0486 ,  Y10S118/04

Abstract: A method and apparatus for preventing vortical air flow behind a free-falling curtain in a curtain coating apparatus. There is a critical region within the coating apparatus defined in part by a coating hopper, the free-falling curtain delivered from the coating hopper, a portion of the moving substrate supported on a roller to which the free-falling curtain is delivered, and an air shield located between the roller and the coating hopper. A first intake slot proximate to the moving substrate shield is used to remove boundary-layer air entrained on the moving substrate. A second intake slot positioned within the critical region is used to remove boundary-layer air entrained on the free-falling curtain. Each of the two intake slots is connected to vacuum source. One or two vacuum sources may be used.

Abstract translation: 一种用于防止涡流气流在帘式涂布装置中自由落下的幕后的方法和装置。 在涂覆装置内有一个关键区域，部分由涂料斗定义，自动落下的窗帘从涂料料斗输送，移动的基板的一部分支撑在自由落下的窗帘送到的辊子上， 空气屏蔽位于辊和涂料斗之间。 靠近移动的基板屏蔽的第一进气槽用于去除夹带在移动的基板上的边界层空气。 定位在临界区域内的第二进气槽用于去除夹带在自由落下的帘幕上的边界层空气。 两个进气口中的每一个都连接到真空源。 可以使用一个或两个真空源。

公开(公告)号：US5916625A

公开(公告)日：1999-06-29

申请号：US44436

申请日：1993-04-08

Applicant: Mary Ellen Rosenberger ,  Donald B. Jones

Inventor： Mary Ellen Rosenberger ,  Donald B. Jones

IPC: B05B7/32 ,  B05B12/12 ,  B05B12/14 ,  B05D1/02 ,  B05D3/04 ,  B05D1/34

CPC classification number: B05D1/02 ,  B05B12/12 ,  B05B12/1418 ,  B05B7/32 ,  B05D3/0486

Abstract: The detrimental effects of fluctuating humidity are neutralized by adjusting the viscosity of a waterborne coating as it is being conducted to the spraying device. A predetermined amount of water or other viscosity modifying additive is mixed continuously with the coating in the coating supply line immediately upstream from the spray device. The amount of water or other additive to be added may be determined by monitoring the humidity in the spray zone. Preferably, an automated feedback control system is employed to adjust the amount of water or other viscosity altering additive being mixed into the coating stream.

公开(公告)号：US5361515A

公开(公告)日：1994-11-08

申请号：US983843

申请日：1993-03-02

Applicant: Vladimir A. Peremyschev

Inventor： Vladimir A. Peremyschev

IPC: B05C9/12 ,  B05C9/14 ,  B05D3/00 ,  B05D3/02 ,  B05D3/04 ,  B05D3/12 ,  F26B3/00 ,  F26B7/00 ,  F26B15/12 ,  F26B15/18 ,  H01L21/027 ,  H01L21/30 ,  H01L21/56

CPC classification number: B05D3/0486 ,  B05D3/0272 ,  F26B15/12 ,  F26B15/18 ,  F26B7/00

Abstract: The method and apparatus operate to complete the following stages. At the first stage the coating is held at room temperature in the time interval from 20 s to 1 hour, depending on the type of polymer coating. At the second stage the coating is held at an elevated temperature under excessive pressure, sufficient for suppressing propagation of microcracks in such time interval so that at reaching the predetermined protective properties the thermodestruction of the polymer coating does not occur. At the third stage performed is the cooling of the coating to room temperature. According to the invention, the excessive pressure is built up at the first stage and maintained at the cooling stage. The invention may find application in manufacture of integrated circuits, as well as for the formation of thin polymer insulation coatings.

Abstract translation: PCT No.PCT / SU91 / 00088 Sec。 371日期1993年3月2日 102（e）1993年3月2日PCT PCT 1991年5月8日提交PCT公布。 第WO92 / 19925号公报 日期：1992年11月12日。该方法和装置操作完成以下阶段。 在第一阶段，根据聚合物涂层的类型，涂层在20秒至1小时的时间间隔内保持在室温。 在第二阶段，涂层在过高的压力下保持在升高的温度下，足以在这样的时间间隔内抑制微裂纹的传播，使得在达到预定的保护性能下，不会发生聚合物涂层的热破坏。 在第三阶段，将涂层冷却至室温。 根据本发明，在第一阶段建立过大的压力并保持在冷却阶段。 本发明可以应用于集成电路的制造以及形成薄聚合物绝缘涂层。