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    Ultra-low voltage capable zipper switch
    103.
    发明申请
    Ultra-low voltage capable zipper switch 失效
    超低电压拉链开关

    公开(公告)号：US20060290443A1

    公开(公告)日：2006-12-28

    申请号：US11165795

    申请日：2005-06-23

    Applicant: Tsung-Kuan Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

    Inventor： Tsung-Kuan Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

    IPC: H01P1/10

    CPC classification number: H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

    Abstract: An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

    Abstract translation: 机电开关包括致动电极，锚，悬臂电极，触点和信号线。 致动电极和锚固件安装到基板上。 悬臂电极由致动电极上方的锚固件支撑。 触点安装到悬臂电极。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点形成闭合电路，导致悬臂电极以拉链的方式朝着致动电极弯曲，从悬臂的远端开始 电极。

    Nanoelectromechanical transistors and switch systems
    104.
    发明申请
    Nanoelectromechanical transistors and switch systems 失效
    纳米机电晶体管和开关系统

    公开(公告)号：US20050104085A1

    公开(公告)日：2005-05-19

    申请号：US10886648

    申请日：2004-07-07

    Applicant: Joseph Pinkerton ,  John Harlan ,  Jeffrey Mullen

    Inventor： Joseph Pinkerton ,  John Harlan ,  Jeffrey Mullen

    IPC: G11C13/02 ,  G11C23/00 ,  H01H1/00 ,  H01H1/027 ,  H01L31/072 ,  H01L21/336

    CPC classification number: G11C23/00 ,  B81B3/0021 ,  B81B2201/014 ,  B82Y10/00 ,  B82Y30/00 ,  G11C13/025 ,  G11C2213/16 ,  H01H1/0094 ,  H01H1/027 ,  Y10S977/732

    Abstract: Nanoelectromechanical switch systems (NEMSS) that are structured around the mechanical manipulation of nanotubes are provided. Such NEMSS can realize the functionality of, for example, automatic switches, adjustable diodes, amplifiers, inverters, variable resistors, pulse position modulators (PPMs), and transistors. In one embodiment, a nanotube is anchored at one end to a base member. The nanotube is also coupled to a voltage source. This voltage source creates an electric charge at the tip of the free-moving-end of the nanotube that is representative of the polarity and intensity of the voltage source. The free-moving end of this nanotube can be electrically controlled by applying an electric charge to a nearby charge member layer that is either of the same (repelling) or opposite (attracting) polarity of the nanotube. A contact layer is then placed in the proximity of the free-moving end of the nanotube such that when a particular electric charge is placed on the nanotube, the nanotube electrically couples the contact layer.

    Abstract translation: 提供了围绕纳米管的机械操作构建的纳米机电开关系统（NEMSS）。 这样的NEMSS可以实现例如自动开关，可调二极管，放大器，反相器，可变电阻器，脉冲位置调制器（PPM）和晶体管的功能。 在一个实施方案中，纳米管在一端锚定到基底构件。 纳米管还耦合到电压源。 该电压源在纳米管的自由移动端的尖端处产生代表电压源的极性和强度的电荷。 该纳米管的自由移动端可以通过将电荷施加到与纳米管相同（排斥）或相反（吸引））极性的附近的电荷元件层来进行电控制。 然后将接触层放置在纳米管的自由移动端附近，使得当在纳米管上放置特定的电荷时，纳米管电耦合接触层。

    MEMS device and fabrication method thereof
    105.
    发明申请
    MEMS device and fabrication method thereof 失效
    MEMS器件及其制造方法

    公开(公告)号：US20040155306A1

    公开(公告)日：2004-08-12

    申请号：US10773312

    申请日：2004-02-09

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Eun-sung Lee ,  Chung-woo Kim ,  In-sang Song ,  Jong-seok Kim ,  Moon-chul Lee

    IPC: H01L027/14

    CPC classification number: B81B3/0078 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81C2201/0107 ,  B81C2201/014 ,  H01H59/0009

    Abstract: A method for fabricating a MEMS device having a fixing part fixed to a substrate, a connecting part, a driving part, a driving electrode, and contact parts, includes patterning the driving electrode on the substrate; forming an insulation layer on the substrate; patterning the insulation layer and etching a fixing region and a contact region of the insulation layer; forming a metal layer over the substrate; planarizing the metal layer until the insulation layer is exposed; forming a sacrificial layer on the substrate; patterning the sacrificial layer to form an opening exposing a portion of the insulation layer and the metal layer in the fixing region; forming a MEMS structure layer on the sacrificial layer to partially fill the opening, thereby forming sidewalls therein; and selectively removing a portion of the sacrificial layer by etching so that a portion of the sacrificial layer remains in the fixing region.

    Abstract translation: 一种用于制造具有固定到基板上的固定部件，连接部件，驱动部件，驱动电极和接触部件的MEMS器件的方法，包括在所述基板上图形化所述驱动电极; 在所述基板上形成绝缘层; 图案化绝缘层并蚀刻绝缘层的固定区域和接触区域; 在衬底上形成金属层; 使金属层平坦化直到绝缘层露出; 在所述基板上形成牺牲层; 图案化牺牲层以形成露出固定区域中绝缘层和金属层的一部分的开口; 在所述牺牲层上形成MEMS结构层以部分地填充所述开口，从而在其中形成侧壁; 并且通过蚀刻选择性地去除牺牲层的一部分，使得牺牲层的一部分保留在固定区域中。

    Microelectromechanical device having an active opening switch
    107.
    发明申请
    Microelectromechanical device having an active opening switch 失效
    具有主动开启开关的微机电装置

    公开(公告)号：US20040061579A1

    公开(公告)日：2004-04-01

    申请号：US10260598

    申请日：2002-09-30

    Inventor： Richard D. Nelson

    IPC: H01H051/22

    CPC classification number: B81B3/0054 ,  B81B2201/014 ,  H01H59/0009

    Abstract: A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another microelectromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

    Abstract translation: 提供了一种微机电装置，其包括被构造成在闭合的开关上施加开启力的梁。 打开力可以基本上独立于存储在闭合开关中的力。 由梁施加的力与存储在闭合开关中的力的组合可能足以在移除与开关的致动相关联的力之后打开开关。 另一微电子机械装置包括在闭合闸门上方间隔开的开关梁和接触结构。 该装置还可以包括被配置成沿远离接触结构的方向在开关梁上施加力的附加梁。 用于打开开关的方法包括减小开关束和关闭门之间的吸引力。 该方法还包括在离开关闭门的方向上向开关梁外部施加机械力。

    Device adapted to pull a cantilever away from a contact structure
    108.
    发明授权
    Device adapted to pull a cantilever away from a contact structure 失效
    适于将悬臂从接触结构拉出的装置

    公开(公告)号：US06646215B1

    公开(公告)日：2003-11-11

    申请号：US09895455

    申请日：2001-06-29

    Applicant: Richard D. Nelson

    Inventor： Richard D. Nelson

    IPC: B81B700

    CPC classification number: B81B3/0008 ,  B81B2201/014 ,  G11C23/00 ,  H01H59/0009 ,  H01H2001/0089 ,  H01H2059/0063

    Abstract: A device is provided which is adapted to electrostatically pull a cantilever away from a conductive pad. In particular, a microelectromechanical device is provided which includes a fulcrum contact structure interposed between two electrodes spaced under a cantilever and a conductive pad arranged laterally adjacent to one of the electrodes. The cantilever may be brought into contact with the conductive pad by residual forces within the cantilever and/or an application of a closing voltage to one of the electrodes. Such a device may be adapted bring the cantilever in contact with the fulcrum contact structure by applying an actuation voltage to the other of the electrodes. In addition, the actuation voltage may deflect the cantilever away from the conductive pad. In some cases, deflecting the cantilever from the conductive pad may include releasing the closing voltage and increasing the actuation voltage subsequent to the release of the closing voltage.

    Abstract translation: 提供了一种适于将悬臂静电拉离导电垫的装置。 特别地，提供了一种微机电装置，其包括插入在悬臂之间间隔开的两个电极之间的支点接触结构和布置成横向邻近其中一个电极的导电焊盘。 悬臂可以通过悬臂内的残余力与导电垫接触和/或向其中一个电极施加闭合电压。 这种装置可以通过向另一个电极施加致动电压而使悬臂与支点接触结构接触。 此外，致动电压可以将悬臂偏离导电焊盘。 在一些情况下，从导电焊盘偏转悬臂可包括释放闭合电压并在释放闭合电压之后增加致动电压。

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