OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT
    107.
    发明申请
    OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT 有权
    在ArF EXCIMER激光光刻仪中使用的QUARTZ玻璃的光学元件及其制造方法

    公开(公告)号:US20160002092A1

    公开(公告)日:2016-01-07

    申请号:US14769382

    申请日:2014-02-19

    Inventor: Bodo KUEHN

    Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193nm when measured using the applied wavelength of 193 nm and a second measured value M633nm when measured using a measured wavelength of 633 nm. The ratio M193nm/M633nm is less than 1.7.

    Abstract translation: 由合成石英玻璃制成的光学部件包括基本上不含氧缺陷部位的玻璃结构,氢含量为0.1×1016〜1.0×1018分子/ cm3,SiH基含量小于2×1017分子/ cm3, 羟基含量为0.1〜100wt。 ppm,并且有效温度低于1070℃。光学组件响应于波长为193nm的辐射的照射,使用脉冲宽度为125的5×109脉冲对激光引起的折射率变化 ns,相应的能量密度为500μJ/ cm2,脉冲重复频率为2000Hz。 当使用193nm的施加波长测量时,该变化达到第一测量值M193nm,并且当使用633nm的测量波长测量时,该变化达到第二测量值M633nm。 M193nm / M633nm的比例小于1.7。

    MULTI-MODE OPTICAL FIBER
    109.
    发明申请
    MULTI-MODE OPTICAL FIBER 有权
    多模光纤

    公开(公告)号:US20130089296A1

    公开(公告)日:2013-04-11

    申请号:US13253445

    申请日:2011-10-05

    Abstract: The present invention relates to a multi-mode optical fiber having a structure enabling stable production and broadening of communication bandwidth as compared with the conventional structures. The multi-mode optical fiber has a core with a diameter 2a that is doped with GeO2 and chlorine. The chlorine concentration profile in the core along the diametric direction of the multi-mode optical fiber has a shape such that the chlorine concentration at a second measurement position within a range at a distance of from 0.9 a to 1.0 a from the center of the core in the radial direction thereof is higher than the chlorine concentration at a first measurement position at a distance of a/2 from the center of the core in the radial direction thereof.

    Abstract translation: 本发明涉及一种具有与常规结构相比能够稳定生产和扩大通信带宽的结构的多模光纤。 多模光纤具有掺杂有GeO 2和氯的直径为2a的芯。 核心中沿着多模光纤的直径方向的氯浓度分布具有这样的形状,使得第二测量位置处的氯浓度在距芯的中心0.9a至1.0a之间的范围内 在径向方向上的距离高于核心的径向a / 2的距离处的第一测量位置处的氯浓度。

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